The ever-increasing global energy demand together with the environmental issue originated from the use of fossil fuel, has triggered an intense search for sustainable and clean energy alternatives, such us hydrogen energy, biomass and solar energy among others. In this context, a pivotal key to deliver sustainable and superior energy systems lies on the rational design and development of high-quality and cost-effective catalyst offering enhanced stability, activity and selectivity. Consequently, intense efforts have been devoted in the search and synthesis of new catalyst materials to replace the scarce and expensive traditional noble metals (e.g. Pt, Pd, Au and Ru) for energy conversion and energy storage applications.Among the recently explored novel catalyst materials, metal phosphides (MPs) have emerged in recent years, attracting significant attention thanks to their intriguing properties [1]. In particular transition metal phosphides (TMPs) exhibit striking properties. The moderately strong M−P bonds lend outstanding mechanical properties, high thermal stability and outstanding chemical resistance to chemical attack and oxidation in acidic and alkaline solutions. Additionally, Co, Ni, Mo-based phosphides demonstrated excellent catalytic and bifunctional properties, in particular towards water splitting as both hydrogen evolution reaction (HER) and oxygen evolution reaction (OER) [2,3].Herein, we present the synthesis of TMPs by thermal Atomic Layer Deposition (ALD) based on the use of different transition metal precursors and tris(trimethylsilyl)phosphine. The physical and chemical properties of the resulting TMPs thin films were extensively characterized by different methods, including atomic force microscopy, X-ray photoelectron spectroscopy and X-Ray diffraction. The presentation will introduce and describe the synthesis of the TMPs and the corresponding physical and electrochemical characterization toward electrocatalytic application.[1] Z. Pu, T. Liu, I. S. Amiinu, R. Cheng, P. Wang, C. Zhang, P. Ji, W. Hu, J. Liu, S. Mu, Transition-metal phosphides: activity origin, energy–related electrocatalysis applications, and synthetic strategies, Adv. Funct. Mater., 2020, 30, 2004009.[2] C.C. Weng, J.T. Ren, Z.Y. Yuan, Transition Metal Phosphide-Based Materials for Efficient Electrochemical Hydrogen Evolution: A Critical Review, ChemSusChem, 2020, 13, 3357-3375.[3] C.-J. Huang, H.-M. Xu, T.-Y. Shuai, Q.-N. Zhan, Z.-J. Zhang, G.-R. Li, A review of modulation strategies for improving catalytic performance of transition metal phosphides for oxygen evolution reaction, Applied Catalysis B: Environmental, 2023, 325, 122313.
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