Fundamental studies on isotope ratio measurement of Cl were carried out using inductively coupled plasma triple-quad mass spectrometry (ICP-MS/MS) and the analytical performance obtained was compared to that obtained by ICP sector field mass spectrometer (ICP-SFMS). Though the polyatomic ion interferences of 16O18O1H and 36Ar1H with respect to 35Cl and 37Cl, respectively, made a negative effect on the accuracy and the precision for isotope ratio measurements of Cl, the ICP-SFMS could eliminate these interferences by medium mass resolution mode (m/Δm = 4000) and achieved the isotope ratio measurements with 0.2 - 0.5% of relative standard deviation (RSD) at the concentrations of Cl from 1 to 10 mg kg-1. In the case of ICP-MS/MS, both the single-MS mode without collision reaction gas and the MS/MS mode with collision reaction gases such as oxygen (O2) and hydrogen (H2) were examined and compared their analytical sensitivities as well as the precisions of isotope ratio measurement of Cl. The precisions of Cl isotope ratio measurements were 3 - 14% of RSD at the concentrations of Cl from 5 to 100 mg kg-1, when single-MS mode was carried out, even though the similar isotope ratios of 35Cl/37Cl could be obtained. In the case of O2 gas for MS/MS mode with mass-shift method, precisions of 0.3 - 2% of RSD were obtained at the concentration range of 1 - 100 mg kg-1. In the case of H2 gas, similar sensitivities as those obtained by ICP-SFMS and the precisions of 0.2 - 0.5% of RSD at the concentration range of 1 - 10 mg kg-1 were obtained. From these results, it was evaluated that the ICP-MS/MS in MS/MS mode with collision reaction gas could be used for Cl isotope ratio measurements for such studies as stable isotope tracers, isotope abundance measurements in nuclear chemistry and accurate determinations by isotope dilution mass spectrometry.