PurposePossible application of mixed (thick/thin film) thermopiles to supply autonomous microsystems.Design/methodology/approachPdAg/AG or PdAg/TSG thermocouples were deposited onto a circular alumina or LTCC substrates. Their thermoelectric power, resistance as well as output electrical power were characterized vs temperature gradient and chosen parameters of thermopile fabrication process.FindingsSemiconductors have high Seebeck coefficient, so investigated kind of thermopile has high output electrical power ET. It achieves 50 mV per single junction for temperature difference of about 200°C.Research limitations/implicationsThe problem is very high resistivity of germanium alloys, even after burn‐in process. Therefore output electrical power P is seriously reduced. To improve thermocouples properties, optimization process is required. For example, thin film layers quality can be improved, semiconductive arms width can be increased or shorter arms can be used.Originality/valueApplication of mixed thick/thin film technology for fabrication of miniaturized thermoelectric generators.
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