Annals of the New York Academy of SciencesVolume 168, Issue 3 p. 510-535 HOLOGRAPHIC MICROSCOPY AND INTEGRATED CIRCUIT INSPECTION* Raoul F. van Ligten Ph.D., Raoul F. van Ligten Ph.D. American Optical Corporation Framingham Centre, Mass.Search for more papers by this authorKenneth C. Lawton Ph.D., Kenneth C. Lawton Ph.D. American Optical Corporation Framingham Centre, Mass.Search for more papers by this author Raoul F. van Ligten Ph.D., Raoul F. van Ligten Ph.D. American Optical Corporation Framingham Centre, Mass.Search for more papers by this authorKenneth C. Lawton Ph.D., Kenneth C. Lawton Ph.D. American Optical Corporation Framingham Centre, Mass.Search for more papers by this author First published: February 1969 https://doi.org/10.1111/j.1749-6632.1969.tb43138.xCitations: 1 * This work was sponsored by the National Aeronautics and Space Administration Electronic Research Center contract NAS 12-584. AboutPDF ToolsRequest permissionExport citationAdd to favoritesTrack citation ShareShare Give accessShare full text accessShare full-text accessPlease review our Terms and Conditions of Use and check box below to share full-text version of article.I have read and accept the Wiley Online Library Terms and Conditions of UseShareable LinkUse the link below to share a full-text version of this article with your friends and colleagues. Learn more.Copy URL Share a linkShare onFacebookTwitterLinked InRedditWechat Citing Literature Volume168, Issue3Second Conference on the LaserFebruary 1969Pages 510-535 RelatedInformation