Surface Profile Characterization Research Articles

Surface profile inspection for large structures with laser scanning

Fringe projection profilometry is a powerful tool that is widely applied to shape measurement of objects in engineering. Limited by the light intensity of the projection unit, this technique is difficult to be applied to surface inspection of large structures, especially in outdoor applications. In this study, a line laser source is selected as the light projection unit. The line laser beam is controlled to scan the surface with the predefined angular speed while a stationary imaging unit captures images. An image fusion strategy has been proposed to construct grating images with a constant phase shift, which facilitates full-field phase shifting in determination of the structural profile. The accuracy of the measurement method is discussed and compared with a commercial 3D laser scanner. The proposed technique has also been applied to the surface topography of the wind turbine blades. The experimental results show that the bulging defects on the surface of the wind turbine blade model are detectable, which shows the feasibility of the proposed method in characterization of surface profile on large structures.

Asphalt Concrete Modification with Plastomers: A Case Study Conducted 7 Years after Construction

Ever-increasing traffic loads, in addition to hot climates, have always been a challenge for both road pavement authorities and engineers. Technically, asphalt binder and concrete modifiers that generally increase the viscosity and provide higher resistance to permanent deformation have been the optimal choice. In this paper, the asphalt layers of a motorway constructed in 2015 were studied. In this pavement, a plastomeric polymeric compound and synthetic-cellulose composite fibers containing plastomeric polymers were used in its binder course and surface course, respectively. The higher performance of the mixtures containing the plastomeric additives allowed a thinner pavement. This study addressed a quality assurance and monitoring plan spanning 7 years, consisting of core mechanical tests, including stiffness moduli and strength tests, in situ structural analysis by means of a falling weight deflectometer (FWD), surface profile characterization by means of IRI and SCRIM, and experts’ visual inspections. Overall, the test results complied with the specifications, and no distress or failure was recorded after 7 years of being under service. This could indicate that plastomers and the dry method can be considered as reliable alternatives for high quality asphalt pavement production.

Microstructure, micromorphology, and fractal geometry of hard dental tissues: Evaluation of atomic force microscopy images.

Determining surface topography of different tissues of the molar tooth with novel analytical methods has opened new horizons in dental surface measurements which characterize tooth surface quality in dentistry. Studying surface topological measurements and comparing surface morphology of hard tissue of the molar tooth are the ultimate goals of the present study. Ten molar teeth have been chosen for investigating their surface characteristics through image processing techniques. The power spectral density (PSD) and fast Fourier transform algorithms of every molar tooth containing enamel, dentin, and cementum have determined that the characterization of surface profiles is possible. As can be seen, PSD along with fractal dimensions leads to good results for teeth surface topography. Moreover, PSD angular plot assures appropriate description of surface.

Two-body abrasion resistance of high-carbon high-silicon steel: Metastable austenite vs nanostructured bainite

In the current study, a high-carbon, high-silicon steel (1.21 wt% C, 2.56 wt% Mn, 1.59 wt% Si) was subjected to different heat treatments ((a) quenching from 800–1000 °C; (b) quenching from 800–1000 °C with further bainitizing at 250 °C for 8 days), resulting in microstructures consisting (a) of austenite and martensite (up to 94 vol% austenite) or (b) of austenite, nanobainite, and tempered martensite (up to 39 vol% nanobainite). The work is carried out using SEM, XRD, microhardness measurement, surface profile characterization, and two-body abrasion testing. It was found that steel wear behaviour is strongly dependent on austenite volume fraction and its metastability to mechanically-induced martensite transformation under wear. Austenite enrichment with carbon (upon carbides dissolution or bainite transformation) inhibits mechanically-induced transformation leading to decrease in microhardness increment after wear test and to an increase in wear rate. Specimens as-quenched from 900–1000 °C are found to have the highest wear resistance. This is attributed to the higher metastability of the retained austenite of these specimens. Nanobainite-containing specimens exhibit suppressed TRIP-effect under abrasion. The specimens containing 60–94 vol% of metastable austenite are by 1.5–1.8 times more wear resistant compared with the specimens consisting of 10–39 vol% nanobainite and 49–55 vol% of more stable austenite. Also, the relationship between wear behaviour and surface profile of the worn specimens is discussed.

Binding energy, structural, and dielectric properties of thin film of poly(aniline-co-m-fluoroaniline)

Semi-transparent and conducting thin film of poly(aniline-co-m-fluoroaniline) has been synthesized by a conventional oxidative copolymerization method using an aqueous solution of aniline, m-fluoroanilne as the monomers and ammonium persulfate as an oxidizing agent. The binding energy and crystalline behavior of copolymer have been characterized by XPS and XRD studies, respectively. The morphological and surface profile characterization has been performed by atomic force microscopy (AFM), and the thickness of the thin film (50–100 nm) has been studied by transmission electron microscope (TEM). An electrical AC conductivity of the copolymers has been measured in the low- and high-frequency regime. The permittivity of copolymer PA-co-m-FA50 has a higher value than polyaniline in the high-frequency regime and decreases with the increase of frequency. The composition of each copolymer has been confirmed by binding energies of C-C, C-N, and C-F in the XPS study. The dielectric behavior of PA-co-m-FA50 copolymer has been recorded in low- and high-frequency regime.

Nondestructive determination of optical properties of a pear using spatial frequency domain imaging combined with phase-measuring profilometry.

Spatial frequency domain imaging (SFDI), as a rapid, noncontact, and scan-free method, can realize wide-field, quantitative optical property mapping and tomographic imaging for a biological sample. Phase-measuring profilometry (PMP) is a surface profile characterization method. Since the projection of structured light onto an object is the basis for PMP and SFDI, the SFDI system is capable of performing both techniques. In this work, we present the results of a feasibility study with the developed SFDI system to realize acquisition of the optical property information and the surface profile information. The surface profile information was used to correct the absorption (μa) maps and reduced scattering (μs') maps. The evaluation of correction effect of the PMP and the calibration and calculation of detection accuracy of the SFDI system were realized by using a series of self-made hemispheric and homogeneous solid phantoms covering a wide range of absorption and reduced scattering coefficients. The results show that the μa and μs' maps become more uniform after using profilometry correction. The maximum relative errors of the system after profilometry correction and calibration were 8.74% for μa and 4.97% for μs' at the wavelength of 527nm, respectively. A case study was carried out on a pear to verify the application prospect of the method in the field of agricultural products quality inspection. Results indicate that μa and μs' maps of a pear after profilometry correction and calibration were more uniform and more comparable with the reported values.

Characterization of surface profile of shot peened cemented tungsten carbide dies with micro valleys and their lubrication performance in cold forging

Abstract To improve tribological characteristics of dies for cold forging, micro valleys were formed on surface of cemented tungsten carbide dies by shot peening. The mean period of the surface roughness profile ( RSm ) of the shot peened (SP) die was approximately 1/3 times shorter that of the conventional mechanical polished (MP) die. The distribution of peaks and valleys of the surface profile ( Rsk ) was close to symmetric in the SP die ( Rsk = 0), while it was skewed toward peaks in the MP die ( Rsk

Microfocusing of the FERMI@Elettra FEL beam with a K–B active optics system: Spot size predictions by application of the WISE code

FERMI@Elettra, the first seeded EUV-SXR free electron laser (FEL) facility located at Elettra Sincrotrone Trieste has been conceived to provide very short (10–100fs) pulses with ultrahigh peak brightness and wavelengths from 100nm to 4nm. A section fully dedicated to the photon transport and analysis diagnostics, named PADReS, has already been installed and commissioned. Three of the beamlines, EIS-TIMEX, DiProI and LDM, installed after the PADReS section, are in advanced commissioning state and will accept the first users in December 2012. These beam lines employ active X-ray optics in order to focus the FEL beam as well as to perform a controlled beam-shaping at focus.Starting from mirror surface metrology characterization, it is difficult to predict the focal spot shape applying only methods based on geometrical optics such as the ray tracing. Within the geometrical optics approach one cannot take into account the diffraction effect from the optics edges, i.e. the aperture diffraction, and the impact of different surface spatial wavelengths to the spot size degradation. Both these effects are strongly dependent on the photon beam energy and mirror incident angles.We employed a method based on physical optics, which applies the Huygens–Fresnel principle to reflection (on which the WISE code is based). In this work we report the results of the first measurements of the focal spot in the DiProI beamline end-station and compare them to the predictions computed with Shadow code and WISE code, starting from the mirror surface profile characterization.

Microscopic TV Holography for Microsystems Metrology

<!--[if gte mso 9]><xml> <w:WordDocument> <w:View>Normal</w:View> <w:Zoom>0</w:Zoom> <w:PunctuationKerning /> <w:ValidateAgainstSchemas /> <w:SaveIfXMLInvalid>false</w:SaveIfXMLInvalid> <w:IgnoreMixedContent>false</w:IgnoreMixedContent> <w:AlwaysShowPlaceholderText>false</w:AlwaysShowPlaceholderText> <w:Compatibility> <w:BreakWrappedTables /> <w:SnapToGridInCell /> <w:WrapTextWithPunct /> <w:UseAsianBreakRules /> <w:DontGrowAutofit /> </w:Compatibility> <w:BrowserLevel>MicrosoftInternetExplorer4</w:BrowserLevel> </w:WordDocument> </xml><![endif]--><!--[if gte mso 9]><xml> <w:LatentStyles DefLockedState="false" LatentStyleCount="156"> </w:LatentStyles> </xml><![endif]--><!--[if gte mso 10]> <mce:style><! /* Style Definitions */ table.MsoNormalTable {mso-style-name:"Table Normal"; mso-tstyle-rowband-size:0; mso-tstyle-colband-size:0; mso-style-noshow:yes; mso-style-parent:""; mso-padding-alt:0in 5.4pt 0in 5.4pt; mso-para-margin:0in; mso-para-margin-bottom:.0001pt; mso-pagination:widow-orphan; font-size:10.0pt; font-family:"Times New Roman"; mso-ansi-language:#0400; mso-fareast-language:#0400; mso-bidi-language:#0400;} --> <!--[endif] --> <p class="MsoNormal" style="text-align: justify;">The continuously advancing Micro-Electro-Mechanical Systems (MEMS) technology requires a robust non-contact quantitative measurement system for the characterization of their performance, reliability and integrity. A TV holographic system with long working distance microscope is developed for the static, dynamic and 3-D surface profile characterization of Microsystems. The system can be operated either in <em>continuous</em> or <em>stroboscopic</em> illumination mode of operation.<span> </span>In this paper we present the development of a microscopic imaging system and its applications <span style="color: black;">for </span>Microsystems Metrology.</p><p class="MsoNormal" style="text-align: justify;"><strong>Defence Science Journal, 2011, 61(5), pp.491-498</strong><strong><strong>, DOI:http://dx.doi.org/10.14429/dsj.61.908</strong></strong></p> <!--[if gte mso 9]><xml> <w:WordDocument> <w:View>Normal</w:View> <w:Zoom>0</w:Zoom> <w:PunctuationKerning /> <w:ValidateAgainstSchemas /> <w:SaveIfXMLInvalid>false</w:SaveIfXMLInvalid> <w:IgnoreMixedContent>false</w:IgnoreMixedContent> <w:AlwaysShowPlaceholderText>false</w:AlwaysShowPlaceholderText> <w:Compatibility> <w:BreakWrappedTables /> <w:SnapToGridInCell /> <w:WrapTextWithPunct /> <w:UseAsianBreakRules /> <w:DontGrowAutofit /> </w:Compatibility> <w:BrowserLevel>MicrosoftInternetExplorer4</w:BrowserLevel> </w:WordDocument> </xml><![endif]--><!--[if gte mso 9]><xml> <w:LatentStyles DefLockedState="false" LatentStyleCount="156"> </w:LatentStyles> </xml><![endif]--><!--[if gte mso 10]> <mce:style><! /* Style Definitions */ table.MsoNormalTable {mso-style-name:"Table Normal"; mso-tstyle-rowband-size:0; mso-tstyle-colband-size:0; mso-style-noshow:yes; mso-style-parent:""; mso-padding-alt:0in 5.4pt 0in 5.4pt; mso-para-margin:0in; mso-para-margin-bottom:.0001pt; mso-pagination:widow-orphan; font-size:10.0pt; font-family:"Times New Roman"; mso-ansi-language:#0400; mso-fareast-language:#0400; mso-bidi-language:#0400;} --> <!--[endif] --> <p class="MsoNormal" style="text-align: justify;"> </p>

Effect of surface particle interactions during pool boiling of nanofluids

The pool boiling characteristics of nanofluids is affected by the relative magnitudes of the average surface roughness and the average particle diameter. In the present work, an attempt has been made to study the interactions between the nanoparticles and the heater surface. The experimental methodology accounts for the transient nature of the boiling phenomena. The boiling curves of electro-stabilized Al 2O 3 water-based nanofluids at different concentrations on smooth and rough heaters and the burn-out heat flux have been obtained experimentally. Extensive surface profile characterization has been done using non-intrusive optical measurements and atomic force microscopy. A measure of the surface wettability has been obtained by determining the advancing contact angle. These results give an insight into the relative magnitudes of dominance of the prevalent mechanisms under different experimental conditions. Boiling on nanoparticle coated heaters has been investigated and presented as an effective solution to counter the disadvantageous transient boiling behavior of nanofluids.

Optical Characterization of Surface Profiles of Various Si1-xGex/Si Wafers Before and After Annealing Step

During the steps of semiconductor processing, a wafer goes through global and local (macro and micro) surface profile and strain/stress changes due to chemical reactions and physical changes brought about by changes in the wafer's environment. In the case of Si1-xGex/Si, intentional local strain generation is introduced to enhance device performance by adding tens of atomic percents of Ge in Si. Process induced surface profile changes in TiN/NiPt/Si1-xGex/Si (100) and Si1-xGex/Si (100) wafers are characterized before and after various annealing techniques and conditions using the newly developed, very high magnification optical surface profilometry (OSP-300) system. Spike anneal steps induced significant global and local changes of wafer surface profiles in TiN/NiPt/Si1-xGex/Si (100) and Si1-xGex/Si (100) wafers, which were compared to a conventional lamp-based RTP step.

Optical Characterization of Surface Profile of Various Si1-xGex/Si Wafers Before and After Annealing Step

not Available.

Electrical and Wafer Surface Profile Characterization of NiSi Formation Process using a Four Point Probe and Optical Surface Profilometer

Sheet resistance and surface profiles of TiN (~10nm thick) capped, Ni films (~30nm thick) on (100) oriented p-type 300mm blanket Si wafers were measured using a conventional four point probe and WaferMasters' optical surface profilometer (OSP-300) system. Process induced surface profile changes were characterized and traced between process steps. Measurements were done after NiSi formation using WaferMasters SAO-300LP (stacked annealing oven) system and removal of the TiN capping layer and unreacted Ni layer by wet etching. Annealing of the NiSi formation was done in the temperature range of 200~425oC in N2 at 1 atmosphere for 5 min. Significant changes in wafer surface profile were observed near the phase transition (Ni/Si→Ni2Si→NiSi) temperatures as determined by the temperature sensitivity curve of sheet resistance. Wafer surface profiles became flatter after wet etching due to the release of build up between the TiN capping layer and the nickel silicide layer. The origin of the wafer distortion after annealing was found to be at the interface between the TiN capping layer and the silicide layer.

Electrical and Wafer Surface Profile Characterization of NiSi Formation Process using a Four Point Probe and Optical Surface Profilometer

not Available.

Microscopic TV holography for MEMS deflection and 3-D surface profile characterization

Recent industrial demands for greater product quality in the fields of microelements and micro-electro-mechanical systems (MEMS) generate new challenges for metrology. The fast-growing MEMS industry requires a robust non-destructive quantitative measurement system for the characterization of their performance, reliability and integrity. A microscopic TV holographic system using a long working distance microscope with an extended zoom range has been developed for microelements and MEMS deformation and 3-D surface profile analysis. The system is capable of evaluating both rough and smooth surfaces. Noisy wrapped phase map is a usual problem in speckle interferometry. We have compared several phase-shifting algorithms for evaluation of speckle phase for their usefulness in generating less-noisy phase maps. The experimental results on a MEMS pressure sensor for out-of-plane deflection and 3-D surface profile analysis are presented.

Two-wavelength micro-interferometry for 3-D surface profiling

Three-dimensional non-contact optical techniques for rapid and accurate mapping of micro-machined surfaces are important for the optoelectronic industry. Interferometry is a well-established technique for 3-D surface profiling. The conventional interferometric surface profilers using a single wavelength offer excellent vertical resolution, but a serious limitation to their use is that they can only handle smooth profiles and step heights less than half a wavelength. In this paper we describe a two-wavelength micro-interferometric setup for 3-D surface profile characterization of smooth as well as rough micro-specimens. The method removes ambiguity associated with the single-wavelength data and also extends the phase measurement range compared to the conventional single-wavelength interferometry. Seven-phase step algorithm is used for quantitative fringe analysis. The design of the system along with experimental results on smooth and rough micro-specimens is presented.

Transfer of PbSe/PbEuSe epilayers grown by MBE on BaF 2-coated Si(111)

Epitaxial growth of PbSe/PbEuSe/BaF 2/CaF 2 heterostructures was carried out by a molecular beam epitaxy on Si(111) wafers. Successful transfer of 3-μm thick PbSe/PbEuSe epilayers was accomplished by bonding the MBE-grown samples face down to polished copper plates followed by the removal of the silicon substrate by dissolving the BaF 2 buffer layer in water. Nomarski microscopy and surface profile characterization showed that the transferred PbSe/PbEuSe layer had mirror-like morphology. High-resolution X-ray diffraction measurements demonstrated that the PbSe/PbEuSe epilayers maintained high crystalline quality after transfer, and surface analysis by X-ray photoelectron spectroscopy indicated complete removal of BaF 2 buffer layer. The above results indicate that bonded PbSe/PbEuSe could be used as a new substrate material for regrowth of high quality PbSe-related heterostructure devices.

Modeling and Characterization of Surface Profile Under Random Tool Vibration in Turning

Article Modeling and Characterization of Surface Profile Under Random Tool Vibration in Turning was published on March 1, 1999 in the journal Journal for Manufacturing Science and Production (volume 2, issue 1).

The use of a complete surface profile description to investigate the cause and effect of surface features

Until recently, the assessment of a complete surface profile, in terms of both roughness and waviness characteristics, has been restricted by both instrumental and computational limitations. This has meant that previous descriptions of surface texture could not fully recognize the functional aspects of surface interactions. Similarly they were limited in identifying the machining conditions necessary to obtain the optimum surface characteristics for a specific functional application. This paper reviews a complete and unified surface profile characterization scheme developed by the authors. The approach identifies the random and periodic elements of the surface profile naturally, as opposed to the traditional techniques which attempt to relate roughness and waviness to assignable causes at an early stage of assessment. This leads to a more flexible and comprehensive characterization. To improve the understanding of the functional evolution of a surface, a study is presented which aims to establish the surface conditions necessary to obtaine a desired functional performance. These characteristics are then related to manufacture so that the ideal machining characteristics can be established. It is therefore shown that a greater understanding of the machined surface can be obtained in terms of causes and effects, in a way that links manufacture to function via the characterization scheme.

Characterization of surface profiles of LPCVD silicon nitride films by RBS profile

Abstract A Rutherford backscattering spectrometry (RBS)‐profile was applied to the characterization of the surface profile of silicon nitride films prepared by low pressure chemical vapor deposition (LPCVD). This method detected inhomogeneity in the silicon nitride films and demonstrated Si‐richness near the interface. This method was also used to study the silicon nitride profiles associated with bird's beak formation in VLSI devices. This paper presents a scheme for an auto‐search routine for an RBS‐profile program. The potential of the RBS‐profile method for the characterization of LPCVD silicon nitride films are demonstrated.