Changes In Deposition Rates Research Articles

Influence of natural amphipod (Victoriopisa australiensis) (Chilton, 1923) population densities on benthic metabolism, nutrient fluxes, denitrification and DNRA in sub-tropical estuarine sediment

The influence of natural populations of the sub-surface deposit-feeding amphipod Victoriopisa australiensis on sediment biogeochemistry was assessed by randomly collecting 21 sediment cores in a zone of Coombabah Lake, southern Moreton Bay, Australia, where the benthic infauna was dominated by this species. Cores were incubated sequentially to determine sediment–water column fluxes of oxygen, dissolved inorganic carbon and inorganic N species, followed by incubations to determine rates of denitrification and dissimilatory nitrate reduction to ammonium (DNRA) using the isotope pairing technique. Finally, each core was sieved in order to determine the population and biomass of amphipods present. Whilst all measures of overall benthic metabolism (sediment oxygen demand, and effluxes of inorganic carbon and nitrogen) showed increased with amphipod density, with rates being stimulated 70–220% at the highest categorised density range of 2,500–3,500 ind m−2, only the correlation with dissolved inorganic carbon was statistically significant. In contrast, there were no discernable trends between amphipod densities and any of the N-cycle processes with the slopes of all correlations being very close to zero. These results highlight the differences in mesocosm simulations of fauna effects, which primarily relate to shifts in rates of organic matter turnover, compared to natural sediments where fauna effects relate more to induced changes in rates of organic matter deposition. Therefore, while mesocosms represent a powerful tool to investigate the mechanisms by which fauna influences microbial metabolism in the sediment, only studies of natural sediments can determine to what extent these mechanisms function in situ.

On Estimating Dry Deposition Rates in Complex Terrain

Abstract In complex terrain, horizontal advection and filtration through a canopy can add substantially to the vertical diffusion component assumed to be the dominant transfer mechanism in conventional deposition velocity formulations. To illustrate this, three separate kinds of terrain complexity are addressed here: 1) a horizontal landscape with patches of forest, 2) a uniformly vegetated gentle hill, and 3) a mountainous area. In flat areas with plots of trees, the elevation of the standard area-weighted dry deposition velocity will likely depend on the product hn1/2, where h is the tree height and n is the number of plots per unit area. For the second case, it is proposed that the standard “flat earth” deposition velocity might need to be increased by a factor like [1 + Ra/(Rb + Rc)]1/2. For mountainous ecosystems, where no precise estimate of local dry deposition appears attainable, the actual dry deposition rate is probably bounded by the extremes associated with 1) the flat earth assumption involving aerodynamic, quasi-boundary layer, and canopy resistances as in conventional formulations, and 2) an alternative assumption that the aerodynamic resistance is zero. Such issues are of particular importance in the context of atmospheric loadings to sensitive ecosystems, where the concepts of critical loads and deposition forecasting are now of increasing relevance. They are probably of less importance if the emphasis is on air quality alone, because air quality responds slowly to changes in deposition rates. The issues addressed here are mainly appropriate in the context of air surface exchange that is not controlled by surface resistance (e.g., for deposition of easily captured chemicals such as nitric acid vapor, and perhaps for atmospheric momentum) and for chemicals that have no local sources. It is argued that dry deposition rates derived from classical applications of deposition velocities are often underestimates.

Practical implications of quantifying ancient sedimentation rates in lakes

S ediments stored in lakes represent a valuable archive that can be used to reveal the erosion history of watersheds. A portion of the soil that is moved down gradient during runoff events is deposited in lakes, and the rate at which sediment accumulates should be proportional to the rate of erosion from the surrounding land. The ability to calculate historical sedimentation rates opens several opportunities for improved understanding and management of watershed processes. Examples include quantifying changes in erosion and deposition rates caused by anthropogenic or natural shifts in land use or by climate change. Erosion is difficult to quantify at the watershed scale because of the large degree of spatial and temporal variation in erosion rates. Changes in slope, vegetative cover, soil compaction and composition, and a host of other variables can result in a wide range of erosion rates over distances of a few meters. Erosion rates can likewise vary significantly with changes in rainfall intensity and time since the last precipitation event. Lakes receiving this variable influx have a normalizing effect that allows long-term changes in sediment accumulation rates, and thus changes in erosion at the watershed scale, to be identified. Changes in erosion at scales smaller …

Practical implications of quantifying ancient sedimentation rates in lakes

Sediments stored in lakes represent a valuable archive that can be used to reveal the erosion history of watersheds. A portion of the soil that is moved down gradient during runoff events is deposited in lakes, and the rate at which sediment accumulates should be proportional to the rate of erosion from the surrounding land. The ability to calculate historical sedimentation rates opens several opportunities for improved understanding and management of watershed processes. Examples include quantifying changes in erosion and deposition rates caused by anthropogenic or natural shifts in land use or by climate change.

The impact of Eurasian dust storms and anthropogenic emissions on atmospheric nutrient deposition rates in forested Japanese catchments and adjacent regional seas

Bulk precipitation and stream water chemistry data from 1993 to 2005 are used to analyze the relationship between Eurasian dust storms and nutrient deposition rates in the Kutsuki experimental forest (near Lake Biwa). From 2000 to 2005, atmospheric deposition, total nitrogen (TN), total phosphorus (TP) and dissolved silica (DSi) deposition rates increased by 26%, 132%, and 38%, respectively in the Kutsuki experimental forest. These TN and TP increases are associated with three seasonal factors: the increasing frequency and intensity of Eurasian spring dust events (March/April); the annual typhoon period (late August/September); and autumn/early winter (October to December) monsoons. The annual typhoon and monsoon winter periods are drivers for atmospheric TP and DSi deposition due to the correlation between the deposition and precipitation. In addition, increased spring dust deposition is a primarily driver for TN deposition changes. Increased emissions from urbanized areas in China (and likely Korea) affect the chemical properties of aerosols reaching downwind Japanese regions. Aerosol processes are responsible for increasing TN in aerosols, which are affected primarily by anthropogenic emissions. From 2000 to 2005, coal burning emissions from East Asia have contributed to an increase in TP (and possibly DSi) deposition rates. The observed increase in nutrient deposition did not noticeably impact short-term (5 year) stream water fluxes in the Kutsuki experimental forest. Due to plant uptake, the forest ecosystem retained atmospherically deposited N and P. Finally, the observed increases in nutrient deposition rates over the East China Sea and the Sea of Japan may significantly influence intra-annual net primary production. It is recommended that earth system modelling incorporate changes in atmospheric nutrient deposition rates and their impacts on the regional carbon cycle as well as aquatic and terrestrial ecosystems.

Dielectric behavior of Cu–GeO2 cermet thin films

Capacitance and dielectric loss measurements were carried out using an Al/Cu–GeO2/Al sandwich structure for 0 to 10 vol% Cu films, 120–400 nm thick, deposited at 0.4–1.5 nm/s in the frequency and temperature range 1–106 Hz and 90–573 K, respectively. The variation of capacitance and dielectric loss with frequency and temperature follows the Goswami and Goswami model. Capacitance decreases slowly with increasing thickness and also varies with the change in deposition rate of the cermet film.

Surface Morphology of Magnetron Sputtered TiO2 Films

This article reports on investigation of the correlations between the process parameters, structure, and surface morphology of sputtered TiO2 films prepared by magnetron sputtering. It has been found that the increase in the partial pressure of oxygen results in (i) the decrease of TiO2 film deposition rate and (ii) strong changes in its structure. The structure of ∼1 µm thick TiO2 films gradually changes from rutile through mixture of rutile + anatase to anatase with increasing at pT = 0.75 Pa. The same evolution of structure is observed when a TiO2 film is sputtered at a constant value of and the film thickness h increases. Increase in total working pressure leads to suppression of rutile structure. Maximum surface roughness was observed for films sputtered in the transition mode of sputtering.

The effect of deposition rate on the intrinsic stress in copper and silver thin films

The effect of changing the deposition rate on the development of stress in evaporated copper and silver thin films deposited on oxidized silicon was examined. In situ stress measurements were made during deposition in ultrahigh vacuum using a scanning laser curvature system. In some experiments, the deposition rate was alternated without interruption of deposition. For copper thin films, a change in deposition rate has no effect on the development of the tensile stress, while the magnitude of the postcoalescence compressive stress decreases with increasing deposition rate. In silver films, the film thickness at the tensile maximum increases slightly with increasing deposition rate, while the magnitude of the postcoalescence compressive stress again decreases with increasing deposition rate. Analysis of the heat flow during deposition shows that the radiative heating and condensation contribute roughly equally to the temperature rise of the sample.

Late Pleistocene submarine mass movements: occurrence and causes

An extensive study of Late Pleistocene continental slope submarine mass movements was undertaken. Twenty-six well-dated mass movements occurred during the last 45 ka BP in the North Atlantic sector. A latitudinal trend is observed: between 45 and 12 ka BP most events occur in the mid- to low-latitudes, post-12 ka BP high-latitude occurring events dominate. A cluster of events is associated with the Last Glacial sea level lowstand and Termination 1B. Further events are associated with Termination 1A and the Holocene. Prior to 23 ka BP no clear relationship with the ice core atmospheric methane record is observed, in contrast during and following the deglaciation there is a possible relationship with atmospheric methane. High-latitude mass movements are primarily controlled by cyrospheric-induced variations in sedimentation and local sea level. In high latitudes, the glaciation subdues mass movement activity through reduced seisimicity, sediment supply and ocean temperatures. Deglaciation increases the sediment supply, seisimicity and ocean temperatures, thus increasing the likelihood of continental slope failures. For example the Storegga event coincides with high isostatic uplift and postglacial seisimicity, while the Andøya and Trænadjupet events occur before and after the peak rates respectively. In contrast low latitudes experience greater risk of slope failures during glacial periods from falling sea levels, although during the deglacial and interglacial period there is a potential for failure from changes in deposition centres and rates, as well as warming ocean temperatures potentially leading to dissociation of gas hydrates. The ongoing rapid deglaciation of coastal Greenland and Antarctica and consequent rapid input of sediment, isostatic uplift, crustal stress release and warming bottom water temperature at the shelf break will increase the risk of continental slope failure in these regions.

Deposition rates and accretion patterns of intramuscular fat, loin muscle area, and backfat of Duroc pigs sired by boars from two time periods1

A study was conducted to evaluate differences in performance and in carcass composition and tissue deposition rates between purebred Duroc pigs sired by boars currently available and those sired by boars from the mid-1980s. Two lines were developed by randomly allocating littermate and half-sib pairs of females to matings by current time period (CTP) or old time period (OTP) boars. Pigs from 2 replications were placed on test at a group mean BW of 63.5 kg. Serial ultrasonic measurements of the 10th-rib LM area (LMA), off-midline backfat (BF10), and intramuscular fat percentage (IMF) were collected every 2 wk in the first replication and used to assess deposition rate differences. Off-test ultrasonic LMA, BF10, and IMF measurements from a total of 557 pigs from 23 CTP sires and 232 pigs from 15 OTP sires across 2 replications and at a mean BW of 109 kg were evaluated. All available barrows and randomly selected gilts (n = 277) were sent to a commercial abattoir, and carcass measurements of 10th-rib backfat, last-rib backfat, last lumbar backfat, and LMA were collected. Analysis of serial backfat measurements revealed a linear relationship between back-fat and BW between 73 and 118 kg for pigs from both time periods. Pigs sired by OTP boars deposited more backfat (P < 0.05) at a faster rate than pigs sired by CTP boars over the entire test period. A curvilinear cumulative tissue deposition pattern was revealed for ultrasonically estimated LMA and IMF within both time periods. Significant linear and quadratic regression coefficient differences between lines indicated that pigs sired by CTP boars deposited more LMA and less IMF per kilogram of BW gain than pigs sired by OTP boars. Pigs sired by CTP boars had more LMA and less BF10 (P < 0.05), whereas pigs sired by OTP boars had more IMF (P = 0.04). Carcass evaluation revealed more (P < 0.01) carcass measurements of LMA and less (P < 0.05) carcass measurements of 10th-rib backfat, carcass measurements of last-rib backfat, and carcass measurements of last lumbar backfat for pigs sired by CTP boars. No difference (P > 0.05) between the time periods was found for ADG over the entire test period. Results from this study illustrate that significant progress in carcass composition has been realized within the Duroc breed since the mid-1980s. The long-term selection response in carcass leanness has also resulted in changes in deposition rates of correlated traits such as LMA and IMF.

Origin and significance of calcium carbonate in soils of southwestern Patagonia

A soil chronosequence spanning the last 0.76–1.0 Ma shows a progressive increase in calcium carbonates based on (1) thickness of the Bk + BCk horizons, (2) maximum carbonate stage, (3) profile accumulation of pedogenic carbonates, and (4) mass flux of Ca from a geochemical mass balance. We favor a dust origin of the carbonates because (1) the till parent materials contain low amounts of CaCO 3, (2) there is minimal evidence for weathering of Ca-bearing minerals in the soil, (3) the amount of CaCO 3 in the profile is far in excess of what could be released by weathering, (4) dust collected from the study area is enriched in CaCO 3, and (5) a source area for the carbonates was identified. Although there likely were changes in dust deposition rates during the Quaternary, our calculations suggest that the current deposition rate of 0.18 g CaCO 3 m − 2 yr − 1 is comparable to the long-term profile accumulation rate of 0.16 g CaCO 3 m − 2 yr − 1 . 230Th/U disequilibrium ages of carbonate pendants are consistent with cosmogenic surface-exposure ages indicating that this method has potential for dating other geomorphic surfaces in Patagonia. Cryogenic processes have affected many of the pedons, particularly during the last glacial maximum.

Two-year follow-up of amyloid deposition in patients with Alzheimer's disease

Beta amyloid is one of the major histopathological hallmarks of Alzheimer's disease. We recently reported in vivo imaging of amyloid in 16 Alzheimer patients, using the PET ligand N-methyl[11C]2-(4'-methylaminophenyl)-6-hydroxy-benzothiazole (PIB). In the present study we rescanned these 16 Alzheimer patients after 2.0 +/- 0.5 years and have described the interval change in amyloid deposition and regional cerebral metabolic rate for glucose (rCMRGlc) at follow-up. Sixteen patients with Alzheimer's disease were re-examined by means of PET, using PIB and 2-[18F]fluoro-2-deoxy-d-glucose (FDG) after 2.0 +/- 0.5 years. The patients were all on cholinesterase inhibitor treatment and five also on treatment with the N-methyl-d-aspartate (NMDA) antagonist memantine. In order to estimate the accuracy of the PET PIB measurements, four additional Alzheimer patients underwent repeated examinations with PIB within 20 days (test-retest). Relative PIB retention in cortical regions differed by 3-7% in the test-retest study. No significant difference in PIB retention was observed between baseline and follow-up while a significant (P < 0.01) 20% decrease in rCMRGlc was observed in cortical brain regions. A significant negative correlation between rCMRGlc and PIB retention was observed in the parietal cortex in the Alzheimer patients at follow-up (r = 0.67, P = 0.009). A non-significant decline in Mini-Mental State Examination (MMSE) score from 24.3 +/- 3.7 (mean +/- standard deviation) to 22.7 +/- 6.1 was measured at follow-up. Five of the Alzheimer patients showed a significant decline in MMSE score of >3 (21.4 +/- 3.5 to 15.6 +/- 3.9, P < 0.01) (AD-progressive) while the rest of the patients were cognitively more stable (MMSE score = 25.6 +/- 3.1 to 25.9 +/- 3.7) (AD-stable) compared with baseline. A positive correlation (P = 0.001) was observed in the parietal cortex between Rey Auditory Verbal Learning (RAVL) test score and rCMRGlc at follow-up while a negative correlation (P = 0.018) was observed between RAVL test and PIB retention in the parietal at follow-up. Relatively stable PIB retention after 2 years of follow-up in patients with mild Alzheimer's disease suggests that amyloid deposition in the brain reaches a plateau by the early clinical stages of Alzheimer's disease and therefore may precede a decline in rCMRGlc and cognition. It appears that anti-amyloid therapies will need to induce a significant decrease in amyloid load in order for PIB PET images to detect a drug effect in Alzheimer patients. FDG imaging may be able to detect a stabilization of cerebral metabolism caused by therapy administered to patients with a clinical diagnosis of Alzheimer's disease.

Detection of water quality trends at high, median, and low flow in a Catskill Mountain stream, New York, through a new statistical method

The effects of changes in acid deposition rates resulting from the Clean Air Act Amendments of 1990 should first appear in stream waters during rainstorms and snowmelt, when the surface of the watershed is most hydrologically connected to the stream. Early detection of improved stream water quality is possible if trends at high flow could be separately determined. Trends in concentrations of sulfate (SO42−), nitrate (NO3−), calcium plus magnesium (Ca2++Mg2+), and acid‐neutralizing capacity (ANC) in Biscuit Brook, Catskill Mountains, New York, were assessed through segmented regression analysis (SRA). The method uses annual concentration‐to‐discharge relations to predict concentrations for specific discharges, then compares those annual values to determine trends at specific discharge levels. Median‐flow trends using SRA were comparable to those predicted by the seasonal Kendall tau test and a multiple regression residual analysis. All of these methods show that stream water SO42− concentrations have decreased significantly since 1983; Ca2++Mg2+ concentrations have decreased at a steady but slower rate than SO42−; and ANC shows no trend. The new SRA method, however, reveals trends that differ at specified flow levels. ANC has increased, and NO3− concentrations have decreased at high flows, but neither has changed as significantly at low flows. The general downward trend in SO42− flattened at median flow and reversed at high flow between 1997 and 2002. The reversal of the high‐flow SO42− trend is consistent with increases in SO42− concentrations in both precipitation and soil solutions at Biscuit Brook. Separate calculation of high‐flow trends provides resource managers with an early detection system for assessing changes in water quality resulting from changes in acidic deposition.

Modeling vertical excursions of the redox boundary in sediments: Application to deep basins of the Arctic Ocean

A diagenetic reaction‐transport model was used to simulate how the sediment redox boundary migrates in response to persistent or episodic changes in the deposition flux of degradable organic matter and the concentration of oxygen in the overlying bottom water. The position of the redox boundary is represented by the depth of oxygen penetration. The simulations reveal that the position of the redox boundary in organic‐poor sediments, such as those in the deep basins of the Arctic Ocean, is highly sensitive to the flux of organic matter: relatively small and/or brief increases in that flux can cause the redox boundary to migrate rapidly from deep within the sediment to within a few centimeters of the sediment‐water interface. Reoxidation of the sediment column after such an event can take years. Redox fluctuations can redistribute solid‐phase manganese within the sediment column and produce multiple concentration peaks in its depth profile on a decadal time scale. Manganese peaks observed in sediment cores from the deep basins of the Arctic Ocean do not necessarily correspond to the position of the redox boundary during previous climatic periods or reflect historical changes in manganese deposition rates. The model supports the hypothesis that the recent decrease in the Arctic ice cover has increased the flux of organic matter to the seafloor and moved the redox boundary close to the sediment‐water interface. The presence of iron sulfides at depths significantly below the bioturbated layer suggests that either the Arctic sediments have been anoxic for millennia, or iron and sulfate are reduced at these depths by dissolved organic matter diffusing downward from the bioturbation zone.

The Flow Phase of Wound Metabolism Is Characterized by Stimulated Protein Synthesis Rather Than Cell Proliferation

Healing of a skin wound requires net protein deposition to repair the tissue defect and new epidermal cells to cover the wound. However, the true course of changes in rates of cell proliferation and protein deposition following skin injury has not been previously determined. This experiment was to measure DNA fractional synthetic rate (FSR), reflecting cell division, and protein FSR and fractional breakdown rate (FBR) in skin wound at three times after injury. The experiment consisted of a surgery and a tracer infusion on separate days. During the surgery (day 0), a donor wound was created and indwelling catheters were inserted into the carotid artery and jugular vein under general anesthesia. On day 1, day 3, or day 7, stable isotope tracer infusion was performed in conscious rabbits to determine DNA FSR and protein FSR and FBR in the wound. Protein FSR and FBR in the day 7 wound were 20.5 +/- 8.4 and 12.6 +/- 4.7%/day, respectively, which were greater (P < 0.01-0.05) than the corresponding values in the day 1 and day 3 wounds. Net protein deposition (FSR-FBR) in day 7 wound (7.9 +/- 6.0%/day) was greater (P < 0.05) than in day 3 wound (0.8 +/- 2.4%/day). DNA FSRs were 1.94 +/- 0.58, 2.43 +/- 0.96, 2.86 +/- 0.90%/day in the day 1, day 3 and day 7 wounds, respectively (P = 0.2). The flow phase in the wound is characterized by increased protein synthesis rather than cell proliferation; net protein deposition in the wound is a major cause of protein requirements in severe burns.

Combinatorial approach to morphology studies of epitaxial thin films

Described is the application of a combinatorial physical vapor deposition (CPVD) method for studying the growth dynamics of epitaxial films. The CPVD method takes advantage of the angle-dependent evaporation rate from a point source to produce thin film libraries whose deposition rate changes continuously for a factor of 50 across a 70-mm long-substrate. The link between the deposition rate and the resulting thin film morphology was made by spatially correlated absorption and atomic force microscopy measurements. It is shown that the growth of tryphenyldiamine derivate on a silica surface proceeds by three-dimensional growth of isolated islands which, at some critical coverage, coalesce to form uniform amorphous film. While the critical coverage of such films depends on the deposition rate in the 0.015–0.4nm∕s region, the particle size distribution function does not.

Effect of excitation frequency on microcrystalline silicon materials prepared by VHF-PECVD

Hydrogenated microcrystalline silicon (μc-Si:H) materials was prepared by plasm a enhanced chemical vapor deposition (PECVD) at silane concentration 6% and 7% w ith changing excitation frequency (40—70MHz). Relationship between excitation f requency and electrical, structural characteristics and deposition rate of the m aterials was studied. The results indicate that the crystalline volume fraction (Xc) decrease firstly and then increase with the increase of excitati on frequency. But the photosensitivity and the deposition rate be have adversely with the change of excitation frequency. The reason of change of structure and deposition rate of thin films with excitation frequency was studied by optical e mission spectroscopy.

Phosphorus geochemistry of recent sediments in the South Basin of Lake Winnipeg

Lake Winnipeg supports the largest commercial fishery on Canadian Prairies. It has been influenced by a variety of environmental forces and anthropogenic activities. To gain a better understanding of recent changes in nutrient status of the lake, it is important to reconstruct its previous history from sedimentary records. Lacustrine sediments are known to be an important sink of many dissolved and suspended substances, including phosphorus, hence, they provide a permanent historical record of changes occurring in the lake. These changes may be induced by natural factors or by anthropogenic activities in the watershed. Phosphorus profiles from dated sediment cores collected in 1999 and 1994 from the South Basin of Lake Winnipeg were investigated to determine phosphorus enrichment in recent sediments. To interpret the nutrient status and depositional conditions responsible for the trends in total phosphorus, three operationally defined forms of phosphorus (P) were determined: non-apatite inorganic P, apatite P, and organic P. Significant increases in sediment phosphorus concentrations were observed in the uppermost 20 cm of the cores and several anomalies were observed at depth. A doubling in total phosphorus relative to aluminum over the last fifty years is largely due to increases in the non-apatite inorganic fraction, suggesting that much of sedimentary phosphorus increase is attributable to changes in the nutrient status of the water column related to anthropogenic inputs. Organic phosphorus exhibits a subtle increase in the upper 20 cm of the gravity cores, likely due to increases in the primary productivity of the lake. Except for the slight increase in deeper sediments, apatite phosphorus, which is thought to be of detrital origin, remained fairly constant over the length of the cores. Anomalous spikes in phosphorus concentrations deeper in the cores, comprised mainly of the non-apatite inorganic phosphorus fraction, likely resulted from natural variation in local oxidizing conditions, possibly induced by changes in water circulation and/or changes in sediment deposition rates due to climatic variation. The results of this investigation contribute to increased understanding of the depositional history of phosphorus in the lake over the last millennium.

Effect of filament temperature on HWCVD deposited a-SiC : H

The filament temperature (TF) is determined to be a critical parameter for the deposition of HWCVD deposited a-SiC:H films. More carbon atoms are incorporated into the films in the favorable configurations and enhance the optical gap of the films. The changes in deposition rate, carbon content, optical gap and IR absorption of Si–C and C–Hn are demonstrated for a-SiC:H alloy films deposited with filament temperature ranging from 1650 to 2100 °C. The films were evaluated by absorption measurements in the visible region, Fourier-transform infrared spectroscopic measurements (FTIR), X-ray photoelectron spectroscopy (XPS) and Raman spectroscopy (RS) measurements.

Effect of inductively-coupled plasma assist on the crystal orientation of magnesium oxide thin films produced by reactive sputtering

High-performance reactive sputter-deposition of magnesium oxide (MgO) thin films is investigated. In this research, planar magnetron (PM) sputtering of Mg target in argon/oxygen mixture is assisted by an inductively coupled plasma (ICP) that is located between the target and the substrate and is driven by an internal RF coil antenna at 13.56 MHz. The changes in deposition rates and X-ray diffraction patterns due to the independent power control of PM and ICP are investigated. As a result, we found that deposition rate of MgO films was predominantly controlled by the PM discharge power and that the crystallinity of deposited MgO films was controlled by the ICP-RF power.