Direct methane-fueled solid oxide fuel cells (DM-SOFCs) operating at low temperature range (<450 C) are promising next-generation energy conversion devices, in which, however, anode reactions should be facilitated for high performance even at low temperatures. Obtaining catalyst with high activity, thermal stability and carbon coking resistance is essential for high-performance SOFC operating with hydrocarbon fuel. Noble metal catalyst, e.g., Ru, can be effective for direct methane oxidation in DM-SOFC anode. However, their high costs prevent them from being extensively applied to such devices as SOFCs, and, therefore, significant efforts have been made to lower the noble metal loading in designing fuel cell electrodes.Herein, we report the design and fabrication of heterogeneous catalyst with ultra-low-loading Ru nanostructures via plasma enhanced atomic layer deposition (PEALD) on SDC backbone anode. We confirmed the presence of highly dispersed PEALD Ru particles over the SDC backbone compared to sputtered Ru deposited on only porous sputtered SDC surface. We found out that PEALD Ru of 100 ALD cycles, or approximately 5nm in thickness with Ru loading of only 0.004 mg/cm2, was sufficient for the use of anode catalyst with methane fuel. Furthermore, compared to the cell with 100 nm-thick sputtered Ru/sputtered SDC anode, the cell with PEALD Ru/sputtered SDC anode showed 45 % higher peak power density with only 1/20 of Ru loading. Moreover, after 4 hours operation with dry methane at 450 C, the activation resistance of the cell with the sputtered Ru composite anode increased by 7 times, while that of the cell with the PEALD Ru composite anode increased by only 2 times. This result suggests that, using PEALD, one can simultaneously reduce Ru loading, thereby reducing cost, and improve the performance and the thermal stability of the anode for DM-SOFC.