The NiCrAlTi coatings free of N and with N incorporations were deposited on austenitic stainless steel 304L by magnetron sputtering in Ar and in gas mixture of Ar and N2, respectively. The N incorporated in the coatings existed as nitride precipitates (from ∼3 vol.% to ∼17 vol.%) after vacuum annealing. All the NiCrAlTi coatings, whatever free of N or with N incorporations, exhibited better resistance against cavitation erosion than ion plating TiN coating and the substrate 304 L in ultrasonic cavitation tests. The NiCrAlTi coating free of N incorporation presents superior cavitation erosion resistance. However, the nitrogen incorporation within the NiCrAlTi coatings showed negative effects on the resistance against cavitation erosion.