Cr–Al-based oxynitride materials have attracted significant attention as hard protective coatings for decades. However, knowledge of the influence of the constituents on oxidation behavior is limited. Here, Cr–Al–O–N coatings with various Cr/Al ratios prepared using cathodic arc evaporation were studied with respect to their microstructure, mechanical properties, and oxidation behavior. With a decrease in the Cr/Al ratio, the coatings yielded a phase evolution from face-centered cubic CrN to rock salt-type cubic (Cr, Al)2O3 to a wurtzite-type hexagonal AlN structure. The cubic structured coatings showed a comparable indentation hardness, much higher than that of the Cr-free Al–O–N coating with a wurtzite structure. Thermogravimetric together with differential scanning calorimetric (TG-DSC) analysis revealed that the ternary Cr–O–N and Al–O–N coatings were more susceptible to oxidation than the quaternary Cr–Al–O–N coatings. Moreover, isothermal oxidation experiments indicated that the addition of 66 at.% Al within the metallic species gives rise to the growth of an Al-rich oxide scale on top of the Cr–Al–O–N coating. However, this oxide scale containing substantial voids cannot prevent the underlying coating from oxidation. Oxidation kinetics study illustrates that the oxidation activation energies of (CrxAl1−x)–O–N coatings with x = 1.00, 0.76, 0.58, 0.33, and 0 are 252.3, 305.2, 370.7, 303.8, and 297.7 kJ/mol, respectively. The best oxidation resistance was obtained by the (Cr0.58Al0.42)–O–N coating, whereas the Al-containing (Cr0.33Al0.67)–O–N coating showed inferior oxidation resistance owing to its high intrinsic oxygen fraction.
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