In order to improve the performance of the carrier catalytic methane sensor, a new method that utilizes microelectronic planar technology is propounded. The ingredients of the carrier have also been widely investigated. A planar type of carrier catalytic methane sensor has been successfully manufactured. Besides its sufficient sensitivity and excellent linearity, as compared with a conventional element, it also has advantages such as a lower operating current and temperature, a higher degree of shock resistance, stronger capability of anti-activation and longer operating life, etc. However, both the zero-point stability and sensitivity stability must be improved in practical applications.