A cataluminescence (CTL) sensor using Y₂O₃ nanoparticles as the sensing materials was proposed for the determination of ethyl acetate. This ethyl acetate sensor showed high sensitivity and specificity at the optimal temperature of 264°C. Quantitative analysis was performed at a wavelength of 425 nm. The linear ranges of CTL intensity vs ethyl acetate concentrations were 2.0-250 ppm (r = 0.9965) and 250-6500 ppm (r = 0.9997) with a detection limit (3σ) of 0.5 ppm. There was no response or weak response when foreign substances such as formic acid, n-hexane, toluene, acetic acid, benzene, and formaldehyde passing through the surface of Y₂O₃ nanoparticles. The sensor had a long lifetime more than 80 h with 3600 ppm ethyl acetate. It had been applied successfully to determine ethyl acetate in artificial air samples.