We have developed a new microstrip line type probe with a wide conductor having some slits to eliminate the measurement error of the demagnetizing effect in thick samples. The slits enhanced the homogeneity of the high-frequency current in the wide direction of the microstrip conductor, which resulted in the application of a uniform high-frequency magnetic field to the sample. Complex relative permeability of thick NiZn ferrite sheet and carbonyl iron particle (CIP) sheet ( <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$3\times $ </tex-math></inline-formula> 1 mm, <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$100 ~\mu \text{m}$ </tex-math></inline-formula> in thickness) has been evaluated accurately using the probe. The measurement error of permeability was evaluated within about 15% in 0.1–20 GHz compared with the conventional Nicolson–Ross–Weir method.