Carbon nanofiber layers containing palladium particles were synthesized inside the channels of a silicon based microreactor. Pd catalyst was prepared via dry impregnation using palladium acetylacetonate precursor solution in toluene. Several catalyst loadings were impregnated on five different CNF-layer thicknesses in the range 10–20μm: for all loadings a relatively large average Pd particle size of ∼8nm was obtained. The lateral and axial distribution of these metallic nanoparticles was uniform across the support for CNF-layer thicknesses up to 13μm. For larger thicknesses, the presence of a dense carbonaceous layer underneath the open CNF-layer negatively affects the accessibility for Pd nanoparticles, resulting in a less good lateral distribution. External and internal mass transfer properties were evaluated, by carrying out hydrogenation of nitrite ions in aqueous phase. For sufficiently thin CNF-layers (⩽13μm) hydrogenation was under kinetic control, indicating absence of mass transfer limitations and thus good accessibility and performance of the Pd containing CNF layers for reactant species.