Introduction. Boriding and aluminizing are among the effective methods for improving the performance properties (corrosion resistance, heat resistance and wear resistance) of machine parts and tools. Solid-phase methods of carrying out techniques of thermochemical treatment (TCT) require long-term exposure at elevated temperatures, which negatively affects the structure and properties of the base material. From these positions, the selection of reasonable temperature-time parameters of solid-phase boriding and aluminizing processes is an urgent task. The purpose of this work is to assess the effect of low-temperature boriding and aluminizing processes on the structure and microhardness of diffusion layers on the surface of low-carbon steels. The paper considers two grades of steels with a carbon content of up to 0.4%: low-carbon steel St3 and alloy steel 3Cr2W8V. The use of the second steel is due to the need to identify the effect of alloying elements in steel on the thickness of diffusion layers and its composition. Powder mixtures based on boron carbide and aluminum carbide are selected as sources of boron and aluminum. Results and discussions. It is found at a process temperature of 900 °C and holding for 2 hours after boriding, iron borides are formed on the surface of both steels. At the same time, two borides FeB and Fe2B are detected on St3 steel by X-ray phase analysis (XRD), and only the Fe2B phase is detected on 3Cr2W8V steel. After aluminizing, aluminum-containing phases such as Al5Fe2, Na3AlF6 and Al2O3 are formed in both steels. The thickness of the resulting diffusion layer on St3 after boriding is 35 μm, after aluminizing – 65 μm. The thickness of the diffusion layer on 3Cr2W8V steel is equal to 15 μm after boriding and 50 μm after aluminizing, which is significantly less than on carbon steel and is obviously due to the effect of alloying elements. It is established that TCT leads to a significant increase in the microhardness of the samples surface. Thus, the maximum microhardness of St3 steel increased to 2,000 HV, and the maximum microhardness of 3Cr2W8V steel increased to 1,700 HV after boriding. The microhardness after aluminizing is comparable for both steels and is equal to 1,000-1,100 HV. Elemental analysis of the upper sections of the diffusion layers shows that the content of boron (7-9%) and aluminum (50-53%) corresponds to the detected XRD iron borides and aluminides. In all cases, there is a gradual decrease in the diffusing elements in the direction from the surface to the base.