Process Capacity Research Articles

Fracture energy of concrete after sustained loading

The fracture energy of concrete after sustained loading is a necessary parameter to calculate the residual carrying capacity of concrete structures in service. This study investigated the fracture energy of concrete after sustained loading by combining experimental observations and theoretical analyses. Firstly, a series of creep fracture tests were conducted on 100 three-point bending beams under various sustained loads, i.e., 75 %, 80 %, 85 %, and 90 % of peak loads. After different loading time, i.e., 10 %, 30 %, 50 %, 70 %, and 90 % of creep fracture lifetimes, the static fracture tests were performed until failure. Then, based on the relationship between the work done by external forces and the energy consumed by the crack propagation of specimens, an analytical model for the fracture energy of concrete after sustained loading was developed, describing the quantitative relationship between the fracture energy of concrete and the crack opening displacement, and the loading time. Finally, the impact of the loading time and sustained load levels on the fracture energy was investigated. The results indicated that the fracture energy of concrete after sustained loading decayed rapidly, with the decay rate gradually decreasing until stability over the loading time. Additionally, specimens subjected to lower sustained load levels experienced a longer loading time for the same crack opening displacement, indicating a greater decay degree of the fracture energy. The analytical model proposed in this study can be employed for predicting and evaluating the crack propagation process and residual carrying capacity of concrete structures during their service life.

Seismic Performance of Precast Concrete Exterior Beam-Column Joint with Disc Spring Devices

ABSTRACT To improve the seismic performance of precast concrete reinforced frame structures which are widely used worldwide, and enable a certain repairable function for the precast structure after an earthquake, this paper proposes a new type of precast concrete frame joint using a full grouting sleeve connection with a disc spring device. The disc spring device was connected in series to the longitudinal reinforcement located in the plastic hinge zone at the beam end to provide a restoring force and protect the concrete. Six exterior beam-column joints consisting of one cast-in-situ beam-column joint and five precast concrete frame joints, using a fully grouted sleeve connection equipped with or without a disc spring device, were designed and fabricated. The failure process, hysteretic characteristics, and energy dissipation capacity of the joint specimens were analyzed based on reversed cyclic loading test. The results showed that the energy dissipation and seismic performance of the newly precast concrete joints equipped with the disc spring device were better than those of the precast concrete frame joints connected by ordinary grouting sleeves without a disc spring device. The disc spring device proposed in this study plays a similar role as a damper in the precast joint during loading and has the characteristics of concentrated damage as it transfers part of the damage in the joint core area to the built-in disc spring area at the beam end. Additionally, the deformation of the precast joints under a lateral seismic load was theoretically calculated, the calculated results were in good agreement with the experimental results.

SOFT MODIFICATION AND FUNCTIONALIZATION OF LIGNOCELLULOSIC BIOMASS USED AS A LOW-COST EFFICIENT BIOSORBENT TO REMOVE BASIC FUCHSINE FROM AQUEOUS SOLUTION

This study proposes a new modification of lignocellulosic biomass based on apricot kernel shells with composite activation KI/KOH and functionalized with a tolerant material (MgO) powder. Apricot kernel shells (NAK), modified apricot kernel shells (MAK) and doped apricot kernel shells (DAK) obtained were characterized using various methods, such as infrared spectroscopy (FTIR), scanning electron microscopy coupled with energy-dispersive X-ray spectroscopy (SEM-EDX), thermogravimetric analysis (TGA), X-ray diffraction (XRD), and point of zero charge (pHpzc). The adsorbents were also evaluated in batch adsorption, using basic fuchsine dye (BF) to determine the performance and specific capacity of the adsorption process. The results showed that only 90 min and 0.1 g of DAK or MAK are sufficient to remove 93% and 91%, respectively, of basic fuchsine from aqueous solutions with a concentration of 20 mg/L in a volume of 100 mL. The MAK and DAK adsorbents can be reused for 5 cycles before their yield decreases below 50%, without requiring complex regeneration procedures, only drying for 4 h at 105°C. The evolution of adsorption was analyzed under different parameters, such as contact time, initial dose of adsorbent, initial dye concentration, initial pH, and temperature. The kinetic adsorption models indicate that the pseudo-second-order model was more suitable than the pseudo-first-order and intraparticle diffusion models for describing the adsorption process. The equilibrium adsorption data of BF were better fitted by the Langmuir isotherm, compared to the Freundlich and Temkin isotherms.

Process capacity improvement by equipment and operations control ratios in de-husking lines of small-scale rice processing factories

Process capacity improvement by equipment and operations control ratios in de-husking lines of small-scale rice processing factories

The technical, economic, and environmental assessment of solvothermal liquefaction processes: An experimental and simulation study on the influence of solvent reichardt parameter

This study explored solvothermal liquefaction (STL) as a viable method for repurposing food waste (FW). Various solvents with different Reichardt parameters were used to facilitate liquefaction, and their impacts on biocrude yields were analyzed. Notably, among the solvents investigated, water and ethanol yielded the highest biocrude yields of 24.7 wt% and 23.6 wt%, respectively. Synergistic effects from combining these solvents were also observed, resulting in enhanced biocrude yields. The STL process was simulated using ASPEN Plus to evaluate its economic feasibility, including sensitivity analysis on input data. Additionally, a negative non-linear correlation was found between net greenhouse emissions and processing capacity. The study determined that the environmental performance of STL becomes less competitive compared to FW landfilling when process capacity falls below a minimum level. Overall, these findings highlight the potential of STL technology for FW management, offering both economic and environmental benefits.

Organizational Capacity for Sexual Assault Prevention Within a U.S. Army Installation

ABSTRACT Introduction Preventing military sexual assault (SA) is a DoD priority. Building prevention capacity could strengthen the impact of prevention programs and improve outcomes. Capacity was conceptualized as implementation knowledge and skills using the Getting To Outcomes (GTO) process and organizational-level capacities using the Prevention Evaluation Framework, a framework that applies best practices in prevention and implementation science to prevention at the program and organizational level. The present study assesses implementation knowledge and skills currently possessed by SA prevention personnel in one U.S. Army installation with the goal of identifying preexisting proficiencies and potential gaps. The study uses the Prevention Evaluation Framework organizational-level domains to identify organizational capacities that could be improved. Materials and Methods Fifteen SA prevention program personnel were recruited for individual 1-hour interviews from one U.S. Army installation. A semi-structured interview guide was developed by the study team to assess knowledge and skills within the GTO framework. Applied thematic analysis guided data coding and analysis. Results Participants reported a range of proficiencies and gaps in capacity for SA prevention. Within the prevention workforce capacity, proficiencies were skill in tailoring training, and an existing train-the-trainer model. Gaps were training to facilitate difficult conversations, and an inability to tailor trainings to audience needs. Two proficiencies related to the comprehensive approach were having a victim advocate present during trainings, and providing training across leadership levels. The final proficiency involved data. Existing data sources were viewed as useful for identifying the nature and extent of local problems. However, participants reported a lack of confidence and skill in selecting appropriate outcome measures and collecting and using primary data. Gaps in leadership capacity were cultural norms, lack of trust, leader investment, logistical difficulty working with leaders, and comfort engaging with leaders. Gaps in collaborative relationships were the lack of informal networking within the SA prevention area to include civilians. Conclusions The GTO-specific knowledge and skills of SA prevention personnel at one U.S. Army installation revealed proficiencies and gaps in organizational capacities influencing the prevention mission. Findings indicate that GTO support could be useful for improving the quality of program activities. However, results also indicate that GTO support would be more effective if they were paired with sufficient prevention infrastructure at the organizational level.

Sorption thermal battery with solar powered absorption chiller for various building cooling applications

In the proposed sorption thermal energy storage (STES) system, the thermal energy storage (TES) tanks are integrated with solar assisted-absorption chiller (AC) to perform extended operation while matching the incompatibility of time gap between the renewable energy heat source and cooling demand of the building. In this study, the operating characteristics of sorption thermal battery (STB) at discharging process and storage capacity of STES charging process are studied. The feasibility study is conducted for four different types of buildings (hotel, hospital, single-family house, and office) to investigate the optimized discharging cooling capacity of STB and the optimized TES ratio. Under the condition of the 200 kWh of the building cooling load and cooling area of 181.63 m2, the most effectively meeting the demand is shown in the hotel, in which STES responds to 78.1 % of the cooling demand with 7.5 kW discharging cooling capacity of STB and 55 % charging the storage capacity of the STES system. The optimum energy storage density is 68.2 kWh/m3 and coefficient of performance is estimated of 0.41. The optimized STES can meet the cooling demand as much as 67.4 % for the hospital and 26.9 % for the single-family house. The office doesn’t require to apply the STES due to the absence of the cooling load at discharging period.

Granular sludge characterization and microbial response in a hydroxyapatite (HAP)- anammox coupled process at different nitrogen loading rates

To enhance the treatment capacity and operational stability of the anammox process for nutrient-rich wastewater disposal, a hydroxyapatite (HAP)-anammox coupled process was developed in a granular sludge-based upflow bioreactor. The impact of nitrogen loading rate (NLR) on process performance was investigated by gradually increasing the NLR from 1 to 1.5, 3, and 5 kgN/m3/d for 264 days continuous operation. TN and TP removal rates of 82.51 ± 3.58 % and 60.49 ± 2.82 % were achieved at the NLR of 5 kgN/m3/d. The precipitation of Ca and phosphorus resulted in HAP crystals formation evidenced by sludge morphology and component analysis, which enhanced sludge settling properties and facilitated biomass enrichment. The HAP-anammox granular sludge was characterized by the outer layer HAP crystals formed on inner anammox granules, while highly mineralized granular sludge with higher density distributed at the bottom of the reactor is conducive to HAP-based phosphorus recovery. After a long-term accumulation, the abundance of Planctomycetota phylum gradually increased (from 7.7 % to 14.1 %), consisting of three species of anammox bacteria, namely Candidatus_Brocadia_sapporoensis, Candidatus_Brocadia_sinica and Candidatus_Kuenenia_stuttgartiensis. Nitrogen metabolic pathway analysis illustrated that denitrification was also present except the anammox reaction, synergistically contributing to superior nitrogen removal in the HAP-anammox process.

Study on manufacturing process and load-bearing capacity of innovative GFRP composite sandwich panels with connecting grooves

Composite sandwich panels have been widely utilized in various fields, including civil engineering, wind turbine blades, and transportation engineering, due to their lightweight, high strength, corrosion resistance, and exceptional thermal and damping properties. This paper introduces a novel wood-core composite sandwich panel produced through pultrusion. It features connection grooves designed to fulfill lateral connection requirements. The production of this innovative composite sandwich panel has been completed. The bending load-bearing capacity of this panel is comprehensively studied through theoretical analysis, and a modeling approach utilizing the general finite element software ANSYS is introduced. Ultimately, the efficacy of both theoretical methods and finite element simulations is verified through rigorous experiments. The research findings presented in this paper are highly significant for optimizing the design and manufacturing of composite sandwich panels, ultimately enhancing their utilization in rail transit vehicles and other industries.

Regulatory Compliance of Cosmetic Products in Kenya: A Narrative Review on Quality and Safety

This study reviews the regulatory compliance of cosmetic products in Kenya, with a focus on consumer risks and potential public health impact. A narrative review study design was employed and a literature search was conducted using government reports, publications, academic databases, and other relevant sources. Keywords such as cosmetic industry challenges and cosmetic regulation in Kenya were employed to search the literature for papers. Data focusing on regulatory frameworks, enforcement mechanisms, adverse reactions, and industry challenges was then extracted and discussed in the form of a narration. The growth of the cosmetic industry, fueled by urbanization, a rising middle class, and increased grooming awareness, has attracted both local and international investors, presenting challenges in maintaining product quality and safety standards. Seven cases of adverse reactions related to cosmetics were reported by Pharmacy and Poisons Board between 2018-2023. The current study identifies noteworthy challenges by examining Kenya’s regulatory framework, led by the Pharmacy and Poisons Board and the Kenya Bureau of Standards. Enforcement disparities within international standards, variance in regulations on prohibited ingredients, inconsistent labeling requirements, industry dynamics, and counterfeiting, compounded with the complex nature of safety assessments raise concerns for cosmetic regulators, distributors, and manufacturers. The study highlights existing gaps in regulatory oversight emphasizing the necessity of robust enforcement mechanisms. Compliance assessments by KEBS and PPB encompass the evaluation of ingredients, formulations, microbial contamination, packaging, and labeling. Factors contributing to regulatory noncompliance include poor product quality aggravated by supply chain complexities in the vast and diverse sector. The cosmetic cottage industry inadvertently presents a quality risk to consumers due to limited process and testing capacity. Reported adverse reactions, particularly to mercury-containing skin-lightening products, raise concerns about public health implications. This study advocates for continuous product monitoring and heightened vigilance. The review proposes improvement strategies, emphasizing a dynamic regulatory approach, periodic ingredient reviews, a centralized product approval system, and alignment with global manufacturing standards. Targeted consumer education initiatives focusing on product quality attributes, adverse reaction reporting, label reading, and counterfeit awareness are recommended.

Classical Inference of a New PCI CNpmkc for Logistic-Exponential Process Distribution

The process capability index (PCI) has been developed as a useful instrument for measuring how well a product matches customer expectations while also assessing the performance of a process. We are aware that when the quality characteristics of the processes follow normal distribution, conventional PCIs produces superior results. However, these traditional indices could not yield reliable findings when assessing nonnormally distributed processes, which could make decision-making more difficult. In this paper, we take into account the [Formula: see text] process capacity index, which may be used for both normally distributed and nonnormally distributed processes. We have employed 10 traditional methods of estimation to estimate the PCI [Formula: see text] when the process has a logistic-exponential distribution, and the performances of these traditional estimates of the index [Formula: see text] are compared in terms of their mean squared errors through a simulation exercise. Then, we create five PCI [Formula: see text] bootstrap confidence intervals and contrast them based on their average widths and related coverage probabilities. In order to demonstrate the applicability of the suggested methods of estimation, two data sets pertaining to the electronic industries are re-analyzed.

Pilot testing of water utilization for integrated solar energy storage and power production using linear Fresnel collector and organic Rankine cycle

This work presents a new method of utilizing water as thermal energy storage to improve the capacity factor of integrated linear Fresnel collector – organic Rankine cycle (LFC-ORC). A new process flow diagram has been proposed to manage overnight operation of the ORC relying on thermal energy storage in water. Pilot testing of 10 kW capacity of LFC-ORC process under arid and desert conditions of Arabian Gulf operating conditions (Qatar) is also reported. A thermodynamic analysis has been performed based experimental evaluation and process simulation of the LFC-ORC production and efficiency. The LFC-ORC operations at storage temperatures of 170 °C showed peak electricity production of 6.76 kW (38 W/m2 aperture area of LFC) whereas 1st law, and 2nd law efficiencies were 6 % and 19 %, respectively. An operational strategy is proposed to generate 5 kW over a period of about 12 h using 10 m3 storage capacity. The developed process simulation program showed that two LFC systems, each 176 m2 aperture area, equipped with three storage tanks each 10 m3, must be installed to generate 5 kW electricity for 24 h. The proposed system can be upscaled to any size as per end-user needs. The new system design would be subjected to further optimization and feasibility to cope with the development of the ORC and LFC efficiency in the future.

Post-combustion carbon capture process modeling, simulation, and assessment of synergistic effect of solvents

Post-combustion carbon capture appears to be a promising solution to reduce the emission of carbon dioxide (CO2) from power plants that generate electricity using either coal or natural gas. In addition, carbon capture process efficiency, capacity, and energy consumption have become challenging against the performance of the capture process. However, synergistic effect due to solvents blend has gained attention to reduce the process energy consumption and enhance process efficiency. In this study, blends of methyldiethanolamine (MDEA) and piperazine (PZ) at different concentrations were investigated using a validated post-combustion capture process model using Aspen HYSYS. Results were compared with 30 wt% monoethanolamine (MEA) as reference case. The effective process variables are concentration of solvents, the amount of water and solvent in the makeup section, viscosity of solvent, energy consumed in different process stages, and the amount of lean solvent flow rate. These variables were studied against fixed process variables using rate-based model. The study shows that using (43 wt% MDEA/7 wt% PZ) for post-combustion carbon capture needs 2.53 MJ/kgCO2 regeneration energy for 88.5% process efficiency compared to 4.003 MJ/kgco2 for 30 wt% MEA without the need for any process modifications. In addition, it was found that solvents synergistic effect contributes to resolving the drawbacks of post-combustion capture that will enable the high utilization of the process and contribution to reduce the consequences effect of climate change. Therefore, the study will help policymakers, industries and encourage researchers towards the large-scale commissioning of blended solvent -based post-combustion capture process.

Technoeconomic Analysis of Intensified PEGylated Biopharmaceutical Recombinant Protein Production: Alpha Antitrypsin as a Model Case

Alpha-1 antitrypsin deficiency (AATD) is a genetic disorder characterized by the insufficient production of the AAT protein. Due to availability limitations, not all AATD patients receive protein therapy treatment. In this study, the technoeconomic analysis of different processes (conventional and intensified) producing 200 kg/year of PEGylated recombinant AAT (PEG-AAT) using a Chinese hamster ovary cell line was investigated. All bioprocesses consist of upstream, downstream, and PEGylation sections. A base-case model (process A) of the conventional fed-batch production bioreactor was developed using SuperPro Designer software (Version 13) to evaluate the economic feasibility of the process. The cost of goods (COG) was estimated to be approximately USD 387.6/g. Furthermore, an intensified process (B) was modeled and evaluated to reduce the COG. Process intensification was implemented in the process (N-1 perfusion bioreactor). The specific operating COG for process B was found to be 10% less than that of process A. Scenario analysis was performed to assess the impact of process capacity (100–1000 kg/year) and cell-specific productivity (30–90 pg/cell/day). With an increase in process capacity, the specific operating COG was reduced for all processes. Increasing cell-specific productivity decreases the specific operating COG at different rates for each process, depending on the titer level. Future investigations into the PEGylation section are required since it has the highest COG of all the sections.

The Influence of a Polyphenol-Rich Red Berry Fruit Juice on Recovery Process and Leg Strength Capacity after Six Days of Intensive Endurance Exercise in Recreational Endurance Athletes.

Various nutritional strategies are increasingly used in sports to reduce oxidative stress and promote recovery. Chokeberry is rich in polyphenols and can reduce oxidative stress. Consequently, chokeberry juices and mixed juices with chokeberry content are increasingly used in sports. However, the data are very limited. Therefore, this study investigates the effects of the short-term supplementation of a red fruit juice drink with chokeberry content or a placebo on muscle damage, oxidative status, and leg strength during a six-day intense endurance protocol. Eighteen recreational endurance athletes participated in a cross-over high intensity interval training (HIIT) design, receiving either juice or a placebo. Baseline and post-exercise assessments included blood samples, anthropometric data, and leg strength measurements. A significant increase was measured in muscle damage following the endurance protocol in all participants (∆ CK juice: 117.12 ± 191.75 U/L, ∆ CK placebo: 164.35 ± 267.00 U/L; p = 0.001, η2 = 0.17). No group effects were detected in exercise-induced muscle damage (p = 0.371, η2 = 0.010) and oxidative status (p = 0.632, η2 = 0.000). The reduction in strength was stronger in the placebo group, but group effects are missing statistical significance (∆ e1RM juice: 1.34 ± 9.26 kg, ∆ e1RM placebo: -3.33 ± 11.49 kg; p = 0.988, η2 = 0.000). Although a reduction in strength can be interpreted for the placebo treatment, no statistically significant influence of chokeberry could be determined. It appears that potential effects may only occur with prolonged application and a higher content of polyphenols, but further research is needed to confirm this.

A mechanistic deterioration point assignment model for water pipe condition assessment

ABSTRACT A pipe condition assessment model is required to implement effective and economical planned maintenance of the water distribution system. The application of such a model requires sufficient accuracy, which, however, is limited by the complexity of the pipe deterioration process and data storage capacity of the water utility. The majority of previous studies have focused on the improvement of assessment algorithms for data mining. In this study, a mechanistic deterioration point assignment (MDPA) model is developed to make advancements in the modes of data input and result output to enhance the model's accuracy and application scope for cast iron and steel pipes. In this MDPA model, (1) indicators/sub-indicators on external corrosion, external load, internal corrosion, and internal load are constructed and can be obtained by data estimation or techniques and (2) assessment results include both pipe overall condition and detailed conditions on corrosion and load, offering evidence for primary maintenance measures. The weights of the indicators/sub-indicators are estimated using the Bayesian statistics theory. The modelling results of pipe samples demonstrate that this MDPA model is an effective tool for pipe condition assessment.

Global potential nitrogen recovery from anaerobic digestion of agricultural residues

Meeting the anticipated 50% increase in global food demand by 2050 requires a crucial reassessment of agricultural practices, particularly in terms of nitrogen fertilizers inputs. This study analyzes the technical potential of nitrogen recovery from livestock manure and crop residues, bringing attention to the often-overlooked resource of digestate derived from anaerobic digestion. Our analysis highlights the significant capacity of the anaerobic digestion process, yielding approximately 234 ± 5 million metric tons (Mt) of nitrogen annually, sourced 93% from livestock manure and 7% from crop residues. Additionally, we estimated that substituting synthetic nitrogen with nitrogen from anaerobic digestion has the potential to reduce greenhouse gas emissions by 70% (185 Mt CO2-eq yr−1). Lastly, 2.5 billion people could be sustained by crops grown using nitrogen from anaerobic digestion of manure and crop residues rather than synthetic nitrogen fertilizers. Although agricultural residues have double the technical potential of current synthetic nitrogen fertilizer production, 30% of croplands encounter difficulties in satisfying their nitrogen needs solely through crop residues and anaerobic digestion manure. This deficiency primarily results from inefficient reuse attributed to geographical mismatches between crop and livestock systems. This underscores the urgent need to reconnect livestock and cropping systems and facilitate the transport and reuse of manure in crop production. In conclusion, the mobilization of these large amounts of nitrogen from livestock manure and crop residues will require to overcome the nitrogen from anaerobic digestion green premium with incentives and subsidies.

The Role of Air Transport Infrastructure Towards Breaking Seasonality in Emerging Tourism Destinations: A Qualitative Study of Akureyri, North Iceland

This paper examines the impact of air infrastructure development on emerging insular destinations by focusing on Akureyri, located in North Iceland. It examines the intricate relationship between airport infrastructure capacity expansion, the building of human capacity, hospitality infrastructure growth, and seasonality challenges. Through extensive qualitative interviews and literature reviews from stakeholders, policymakers, and academics, the research synthesises how an airport expansion offers democratisation of tourism mobilities and connectedness with the outside world for remotely located communities in the region. The analysis found that despite the stakeholders’ increased awareness of the complexities in accommodating year-round tourism, there is a readiness to increase the tourism enterprise flows. Nevertheless, the study shows a high deficit in hospitality infrastructure along with regional investment imbalances, revealing the lack of a comprehensive capacity building strategy. Ultimately, the authors advocate for an ‘extended capacity’ approach to tackle the challenges presented in the process of overcoming seasonality issues. The paper stresses the need for developed human skill capacity and diversified services and products alongside infrastructure capacity upgrades. The gained insights are gathered in two figures. The first identifies and maps the contextual landscape encompassing North Iceland’s tourism industry and its stakeholders, while the other showcases the complexity of the process the destination undergoes for breaking seasonality, while exposing the interconnections of potential outcomes, stakeholders’ needs, and the existing and in process capacities.

“Prison Life Can Make You Go Crazy”: Insights Into the Situation for People With a Mental Illness in the Malawi Prison System

Little is known with regard to due process and forensic assessment capacities in Africa, where over one million are deprived of their liberty on any given day. A rapid situation assessment explored multi-stakeholder perspectives regarding the situation of people with a mental illness in the Malawi prison system. In-depth interviews were conducted with 10 regional professional stakeholders, 18 former prisoners, and five prison staff from two maximum-security prisons. Reflexive thematic analysis yielded five themes; occurrence of mental illness among people living in prison; prison environment exacerbating harm and levels of mental illness; security responses to the presence of psychiatric disorders; availability and coverage of specialist psychiatric and psychological care; and diversion, other non-custodial measures and continuity of care on release. Narratives highlight the substantial causal impact of the prison environment in amplifying existing and new mental illness, vulnerability and exploitation of people with a mental disorder. Malawi prisons are hampered by lack of specialist forensic capacity nationally; centralized mental health surveillance system; and insufficient skilled staff to conduct evidence-based screening and care. Security operations implement the use of pharmacological and physical restraint measures at times. Faith-based organizations play an important role in providing psychological and spiritual support. Release and reintegration require family involvement. A cross departmental intersectoral partnership response spanning government ministries, key civil society organizations, the Malawi Prison Inspectorate and Malawi Human Rights Commission is warranted. Recommendations include alleviation of prison congestion, prison staff capacity building and investment in forensic mental health services with adequate geographic coverage.

Study on TSV insulating medium based on SACVD process

TSV silicon switching board technology has the advantages of short global interconnection, small delay, low power consumption and high integration. The dielectric insulation performance in the TSV hole will directly affect the signal integrity and power integrity of the TSV silicon switching board. The insulating dielectric layer of TSV requires good forming ability and step covering, and lower leakage current and good heat resistance reliability. In this paper, the filling capacity of SACVD process is analyzed, the coverage rate of SACVD process is studied under different process parameters, and the leakage current of silicon dioxide film is measured by planar capacitance structure. Finally, the leakage current test of the TSV pairs is carried out online. Before the substrate thinning, the leakage current of the two blind hole TSV pairs is measured by the probe station. The voltage ranges form 0 to 50V, and the leakage current ranges from a few pA to a few hundred pA.