Cantilever Type Piezoelectric Energy Harvester Research Articles

Fabrication and physical properties of Na(Nb1-xSbx)O3 templates for the [001]-texturing of KNN-based ceramics

Na(Nb1-xSbx)O3 [N(N1-xSx)] templates were fabricated to texture the 0.96(Na0.5K0.5)(Nb1-ySby)O3-0.01BaZrO3-0.03(Bi0.5Ag0.5)ZrO3 [KN(N1-ySy)-BZ-BAZ] piezoceramics along the [001] direction. To the best of our knowledge, this is the first study that fabricated these templates. Thus far, NaNbO3 (NN) templates have been utilized to texture KNN-modified piezoceramics; however, they produce many holes in the piezoceramics because of the dissolution of the NN templates during sintering. N(N0.9S0.1) templates with an average size of ∼18 μm were produced by the molten-salt and topochemical methods utilizing Bi2.5Na3.5(Nb0.9Sb0.1)5O18 precursors. Due to their high melting temperature, the N(N0.9S0.1) templates did not dissolve during sintering. Therefore, no holes were present in the KN(N0.95S0.05)-BZ-BAZ piezoceramic textured using the N(N0.9S0.1) templates. The piezoceramic textured using the N(N0.9S0.1) templates showed a large hardness (7.56 ± 0.26 GPa) and an elastic modulus (154 ± 5 GPa) similar to those of the untextured piezoceramic. However, the piezoceramic textured using the NN templates showed reduced hardness (5.94 ± 0.58 GPa) and elastic modulus (127 ± 14 GPa) because of the presence of the holes. The KN(N0.95S0.05)-BZ-BAZ piezoceramics textured using the N(N0.9S0.1) templates provided large d33 (740 pC/N) and kp (0.62) values. Cantilever-type piezoelectric energy harvesters (CPEHs) were produced using the KN(N0.95S0.05)-BZ-BAZ piezoceramic textured with N(N1-xSx) templates and the CPEH produced using the piezoceramic textured by N(N0.9S0.1) templates generated the largest power of 2.92 mW. Therefore, N(N0.9S0.1) is a promising template for the [001] texturing of KNN-based piezoceramics with good mechanical properties.

Accurate finite element modeling of multilayered flexible piezoelectric energy harvesting devices with strong coupling of structure, piezoelectricity, and circuit

Multilayered flexible piezoelectric energy harvesting devices (FPEDs) are a new future harvesting technology which are highly flexible and lightweight than familiar cantilever piezoelectric energy harvesters. This mechanical vibration driven FPED is a strongly coupled multiphysics phenomena that involve complex natural three-way interaction among the composite piezoelectric structure, the electric charge accumulated in the piezoelectric material, and a controlling electrical circuit attached to it. Efficient and accurate computational solution approaches are essential for analyzing these mechanical vibration-driven FPEDs to capture the main physical aspect of the coupled phenomena and to accurately predict the output voltage. While there are some numerical models for simple familiar cantilever type piezoelectric energy harvester reported in the literature, a fully three-dimensional strongly coupled model for complex material distributed, complex geometry, and multilayered FPED involving strong coupling of structure, piezoelectricity, and circuit phenomena has not yet been developed. A partitioned iterative algorithm is developed using a hierarchical decomposition approach wherein the coupled three fields are solved separately and coupled through loop union integration techniques that provide an efficient and accurate simulation of FPEDs. The simulation results matched the experiment results very well. This study provides a basis for the natural extension of partitioned iterative finite element coupled algorithm to simulate the future piezoelectric energy harvesting technologies involving a strong coupling of structure, piezoelectricity, and circuit phenomenon.

Effect of simultaneous use of two different piezoelectric materials on the performance of cavity based segmented doubly clamped piezoelectric energy harvester

From the past several decades, energy harvesting using piezoelectric materials has emerged as a potential technique in scavenging electrical energy from environmental low frequency vibrations. In this direction, a cantilever type piezoelectric energy harvester is observed to be the most appropriate structure that constitutes a substrate layer over which one or two layers of same piezoelectric material and a proof mass are embedded. In this paper, the performance of cavity based segmented doubly clamped piezoelectric energy harvester (C-SDC-PEH) has been analyzed for simultaneous use of two piezoelectric materials (PMN-35 wt% PT and PZT-5H) using COMSOL Multiphysics software. Here, the C-SDC-PEH device encompasses the advantages of doubly clamped boundary conditions, cavity inclusion, electrodes and piezoelectric layers segmentation. Also, from observations PMN-35 wt% PT - PZT-5H - PMN-35 wt% PT placing format is found to be most appropriate combination of piezoelectric materials corresponding to which improved values of output voltage (251.2 V), mechanical power (235.7 mW) and electrical power (201.2 m W) have been attained at low (71 Hz) resonant frequency.

Experiment and analysis of a piezoelectric energy harvester based on combined FEM modeling and spice simulation

This paper presents modeling and simulation of a cantilever-type piezoelectric energy harvester based on a combined FEM (Finite Element Method) and spice circuit. The PEH having dimension of 61 mm × 37 mm × 0.4 mm provides the maximum output power of 8 mW at resonant frequency of 127 Hz. The fabricated cantilever-type PEH (Piezoelectric Energy Harvester) has been characterized with variable resistor, which reveals that maximum power transfer is achieved at 10 kΩ. The modeling and simulation have beenperformed to study the effect of piezoelectric layer thickness on PEH output power in case of load resistance. FEM modeling and simulations have been carried out to extract electrical elements such as Rm, Lm, Cm, Cp and Γ. Those electrical elements have been included into a spice model to find optimal load resistance for maximum power transfer as well as. frequency response as function of piezoelectric layer thickness. Experiment and simulation show a good agreement on optimal load resistance.

Design, Simulation & Optimization of a MEMS Based Piezoelectric Energy Harvester

Energy harvesting is defined as a process of acquiring energy surrounding a system and converting it into electrical energy for usage. Piezoelectric energy harvesting is a very important concept in energy harvesting in microelectronics. In this report, an analysis of the cantilever type piezoelectric energy harvester is conducted using the finite element method (FEM) based software COMSOL Multiphysics. A unimorph type cantilever beam of the silicon substrate, structural steel as proof mass and support, and PZT-5A material as piezoelectric constitute the physical system.

Secondary Resonance Energy Harvesting with Quadratic Nonlinearity

Piezoelectric energy harvesters can transform the mechanical strain into electrical energy. The microelectromechanical transformation device is often composed of piezoelectric cantilevers and has been largely experimented. Most resonances have been developed to harvest nonlinear vibratory energy except for combination resonances. This paper is to analyze several secondary resonances of a cantilever-type piezoelectric energy harvester with a tip magnet. The conventional Galerkin method is improved to truncate the continuous model, an integro-partial differential equation with time-dependent boundary conditions. Then, more resonances on higher-order vibration modes can be obtained. The stable steady-state response is formulated approximately but analytically for the first two subharmonic and combination resonances. The instability boundaries are discussed for these secondary resonances from quadratic nonlinearity. A small damping and a large excitation readily result in an unstable response, including the period-doubling and quasiperiodic motions that can be employed to enhance the voltage output around a wider band of working frequency. Runge–Kutta method is employed to numerically compute the time history for stable and unstable motions. The stable steady-state responses from two different methods agree well with each other. The outcome enriches structural dynamic theory on nonlinear vibration.

Performance analysis of piezoelectric energy harvesters with a tip mass and nonlinearities of geometry and damping under parametric and external excitations

Based on the Hamilton’s principle, a nonlinear mathematical model of the cantilever-type piezoelectric energy harvester with a tip mass is systematically derived under parametric and external excitations. The proposed model accounts for geometric and electro-mechanical coupling nonlinearities, damping nonlinearity and the inextensibility condition of beam. Using the Galerkin approach, the proposed model is converted into the electro-mechanical coupling Mathieu–Duffing equations. Analytical solutions of the frequency–response curves are presented by the multiple scales method. Nonlinear characteristics of the energy harvesters are explored under parametric excitation and hybrid parametric and external excitations. Analytical results provided new insights into the effects of tip mass and nonlinear damping on the performance of the energy harvester. The results show that with the tip mass increasing, the frequency–response curves of the energy harvester change from the nonlinear hardening type to the nonlinear softening type and the operating bandwidth and the output voltages of the energy harvester enlarge. For parametrical excitation, variation of the quadratic damping does not alter the initial threshold of the harvesters and the position of two transcritical bifurcation points of the frequency–response curves. The initiation threshold decreases with the tip mass increasing. Hybrid parametric and external excitations enhance the bandwidth and output voltage of the energy harvester, which will probably be used as an ideal way to improve the performance of the energy harvesting system.

Axe-Head-Shaped Piezoelectric Energy Harvesters Designed for Base and Tip Excitation-Based Energy Scavenging.

In this article, polyvinylidene fluoride (PVDF) ferroelectric polymer thin-film-based two axe-head-shaped cantilever-type piezoelectric energy harvester (C-PEH) devices are presented, such as Device 1.1 with ring proof mass and Device 2.1 without ring proof mass for base excitation and tip excitation-based energy harvesting, respectively. These fabricated miniature axe-head-shaped C-PEHs comprising different active areas and volumes are evaluated by both finite-element method (FEM) -based simulations and experimentations. We also present a concept to use these prototypes in a wireless mouse to harvest base and tip excitation-based energy. Device 1.1 made with 96.5-mm3 active volume including an axe-head-shaped C-PEH and 0.72-g ring proof mass produces maximum 7.81- and 594.5-nW power outputs when it was excited by the x -axis (direction of normal wireless mouse sliding) and z -axis (direction of gravity entailing 0.5-g acceleration) -based vibrations, respectively. Device 2.1 made with 14.8-mm3 active volume comprising only an axe-head-shaped C-PEH produces maximum 9.3391- and 0.0369- [Formula: see text] power outputs when it was excited by a rotary motion due to wireless mouse-wheel rotation and z -axis (direction of gravity entailing 0.5-g acceleration) -based vibration, respectively. The experimental results demonstrate excellent performance when compared to the test results of the well-known same active area and volume-based trapezoidal-shaped C-PEHs and other already published similar devices.

Fatigue study and durability improvement of piezoelectric single crystal macro-fiber composite energy harvester

In the energy harvester, the fatigue caused by cyclic vibration is an important challenge affecting the lifetime of the device. The aim of this study is to evaluate the fatigue behavior of the cantilever-type piezoelectric energy harvester (PEH) based on a single crystal macro-fiber composite (SFC), and propose a method for improving durability. The initial output of the fabricated PEH shows 6 mW root mean square power at 0.5 gravitational acceleration at resonance frequency (23 Hz). In fatigue test under cyclic vibration, the dramatic power decrease and waveform distortion caused by the mechanical crack at the top electrode line were identified after 5 $$\times$$ 106 cycles. To improve the issue, the stress distribution on the top electrode line was analyzed by finite element analysis and the reinforced structure was proposed by attaching a 50 µm-thick polyimide film. The reinforced PEH shows the durable output power until 107 fatigue cycles without a significant output power loss. These study potentially can be applied to the development of reliable SFC-based PEH with long-term lifetime.

Analysis and experiment of magnetic excitation cantilever-type piezoelectric energy harvesters for rotational motion

In order to solve the problem that when the piezoelectric cantilever generator captures the low-frequency vibration, the structural resonance frequency bandwidth is small and the generating capacity cannot be fully developed. A magnetic excitation cantilever-type piezoelectric energy harvester for rotational motion was presented in this paper. Energy harvesting capability of resonant harvesting structures, such as piezoelectric cantilever beams, can be improved by utilizing coupled oscillations that generate favorable strain mode distribution. The theoretical analysis and simulation analysis of the working state of the piezoelectric energy harvester is performed. The power generation performance of magnetic excitation cantilever-type piezoelectric energy harvester under different environmental excitations was tested by experimental methods. The experimental results show that the magnetic excitation cantilever-type piezoelectric energy harvester has the best power generation performance when the rotational speed is 150 r min−1, the installation angle of the piezoelectric cantilever is 60°, the distance between the mass magnet and the excitation magnet is 8 mm, and the number of excitation magnets is 6. The maximum open-circuit voltage of the magnetic excitation cantilever-type piezoelectric energy harvester is 38.49 V. When the load resistance is 40 KΩ, the magnetic excitation cantilever-type piezoelectric energy harvester has a voltage of 24.84 V and an average power of 15.425 mW. Piezoelectric energy harvesting is an attractive technique for the potential powering of wireless sensors and low power devices.

Effect of seismic mass thickness on the resonance frequency of cantilever type piezoelectric energy harvester

Piezoelectric energy harvesters find applicability in remote area of application because of simple design and operation. Micro-electromechanical system (MEMS) process technology is utilized to fabricate these cantilever based structures. Piezoelectric layer length and thickness are the key parameters for controlling the resonance frequency. However, for further lowering the resonance frequency and having optimal output a seismic mass is introduced at the tip of the cantilever structure. In this paper, the effect of increasing the thickness of the seismic mass on the resonance frequency of the cantilever structure has been investigated. Finite Element Method (FEM) results have been obtained using Coventorware software by varying the thickness of the seismic mass 10–20 µm. It has been observed the variation of the thickness of the seismic mass has an effect on the resonance frequency of the cantilever. As the thickness increases, the volume of the seismic mass increases and the resonance frequency of the cantilever decreases. The base of the cantilever is Silicon; Aluminum Nitride (AlN) piezoelectric material has been selected of 3 µm thickness. The length of the silicon cantilever is varied from 1600 to 2500 µm and the resonance frequency is obtained. At a length of 1600 µm, variation of seismic mass thickness from 10 to 15 µm results in reduction in resonance frequency by 17.27% whereas when seismic mass is varied from 15 to 20 µm the resonance frequency is reduced by 12.63%.

Piezoelectric layer length and thickness variation effects on displacement, von-Mises stress and electric potential generated by cantilever type piezoelectric energy harvester

Piezoelectric energy harvesters find applicability in remote area of application because of simple design and operation. Piezoelectric layer length and thickness are the key parameters for controlling the resonance frequency and optimal output. In this paper the effect of length and thickness of the piezoelectric layer on the von-Mises stress has been investigated. FEM results have been obtained for varying the length of piezoelectric layer from 50 to 200 µm for two different thicknesses of 2 and 5 µm. It has been observed the variation of the length of the piezoelectric layer has an effect on the von-Mises stress of the cantilever which affects the net potential generated. The base of the cantilever is Silicon; PZT piezoelectric material has been selected for the analysis. The length of the silicon cantilever has been fixed to 200 µm. The parameters for simulation are set as: Variation of Length of piezoelectric layer lpiezo as; 50, 75, 100, 125, 150, 175, and 200 µm. Variation of Thickness of the piezoelectric layer tpiezo as 2 and 5 µm. Thickness of beam Tcanti = 10 µm. Length of beam Lcanti = 200 µm. Displacement, von-Mises stress and electric potential has been obtained from FEM results for the piezoelectric layer length variation from 50 to 200 µm. The displacement of the cantilever increases from 0.0207 to 1.0462 µm, von-Mises stress of the cantilever increases from 6.6899 × 105 to 1.0728 × 108 N/m2 and the electric potential increases from 0.01 to 0.26 Volts when the length is increased from 50 to 200 µm. The results depicts that there is an effect of length and thickness of piezoelectric layer on the total displacement, net stress and electric potential generated by the cantilever.

Design of MEMS-based cantilever-type piezoelectric energy harvester for low frequency vibrations

Piezoelectric energy harvesters find applicability in remote area of application because of simple design and operation. Piezoelectric layer length and thickness are the key parameters for controlling the resonance frequency and optimal output. In this paper the effect of position of piezoelectric layer has been investigated. Finite element method (FEM) results have been obtained for varying the position of the piezoelectric layer from 50 to 200 µm for thicknesses of 5 µm. It has been observed the variation of the position of the piezoelectric layer has an effect on the displacement, von-Mises stress of the cantilever which affects the net potential generated. The base of the cantilever is Silicon; lead zirconate titanate (PZT) piezoelectric material has been selected for the analysis. The length of the silicon cantilever has been fixed to 200 µm. The parameters for simulation are set as: Variation of position of piezoelectric layer lpiezo as; 50, 100, 150, and 200 µm. Thickness of beam Tcanti = 10 µm. Length of beam Lcanti = 200 µm. Displacement, von-Mises stress and electric potential has been obtained from FEM results for the piezoelectric layer position variation from 50 to 200 µm. The displacement of the cantilever changes from 84.03 to 41.25 µm, von-Mises stress of the cantilever increases from 2.96 × 106 to 6.45 × 106 N/m2 and the electric potential increases from 0.3224 to 0.5446 V when the position is varied from 50 to 200 µm. The results depicts that there is an effect of variation of position of piezoelectric layer on the total displacement, net stress and electric potential generated by the cantilever.

Energy Harvesting from Piezoelectric Cantilever Beam with Different Shapes

This paper reviews the piezoelectric energy harvesting from mechanical vibration. The recent development in the microelectronic devices and wireless sensor networks (WSNs) requires continuous power source for better performance. Many researchers have been done to develop a permanent portable power source for microelectronic devices. Micro energy harvesting (MEH) consists of two basic elements; freely available energy and transducer. Energy is everywhere around us in different forms. The energy conversion ability of piezoelectric energy harvester is high among different MEH techniques. A cantilever type piezoelectric energy harvester under different shapes is mostly studied in the last few years. The output of piezoelectric harvester depends upon the deflection produced, more deflection led to more electrical output. The deflection in cantilever beam under different shapes is different. This review paper presents a comparison of different piezoelectric cantilever beam shapes and output generated analyzed in the last decade.

Effect of elastic modulus of cantilever beam on the performance of unimorph type piezoelectric energy harvester

Piezoelectric energy harvesting is a technique that can utilize ambient vibration energy to generate useful electrical energy, which is promising for powering small-scale autonomous devices such as sensors for wearable, biomedical, and industrial applications. Typically, cantilever-type piezoelectric energy harvesters (PEHs) are operated under resonance condition to achieve the maximum output power at low frequency stimuli. Along with resonance matching, it is also necessary to optimize the PEH configuration with high electromechanical properties for the efficient energy conversion. The purpose of this study is to investigate the effect of the elastic modulus of the passive layer in the cantilever structured PEH on the electromechanical properties and thus harvesting performance. In this regard, two unimorph type PEHs having the identical geometry, piezoelectric properties, and proof mass but with different elastic modulus (55 GPa and 97 GPa) of Ti alloy-based passive layers were fabricated and their output performance was compared under the same acceleration amplitude excitation stimuli. The PEH with the smaller elastic modulus passive layer exhibited almost 53% improvement in the maximum power than that with the higher elastic modulus passive layer, which is attributed to a smaller mechanical damping ratio, higher quality factor, and larger vibration amplitude.

Design of optimized cantilever form of a piezoelectric energy harvesting system for a wireless remote switch

A smart lighting system can be controlled using a smartphone and/or human activated wireless remote switches. We designed a wireless remote switch using a cantilever type piezoelectric energy harvester to make a battery-less IoT node device that has high output power but a small tip displacement through frequency up-conversion. The purpose of this design is to overcome the conventional volume problem of the piezoelectric cantilever beam. In order to apply the high resonance frequency to the model at constant displacement, we set the limiting conditions of maximum vertical displacement of the cantilever beam to be 1 mm and a human input pressing force of 5–8 N, the force generally required when a human presses a switch button. In these limiting conditions, different shapes of steel substrate were used to find the optimal harvester that meets the limiting conditions and generates about 65 μJ of energy at 5 kΩ resistive loads under free vibration. Using this harvester, we designed a wireless remote switch with an impact type mechanical mechanism with two cantilever type energy harvesters to generate 140 μJ of energy, requiring no impedance matching circuit. This energy was then used to power a microcontroller to transmit data packets using ZigBee Green Power communication. Three identical data packets were transmitted by the wireless remote control switch to ensure data reception by the smart LED bulb and to toggle the bulb on or off state. Finally, this study successfully contributed to elevating the possibility of commercialization of the piezoelectric harvester based wireless remote switch for IoT.

Analysis of magnetic plucking dynamics in a frequency up-converting piezoelectric energy harvester

The paper reports on numerical-experimental analysis of magnetic plucking, which is commonly applied for contactless mechanical frequency up-conversion in vibration energy harvesters with the aim of enhancing power output and efficiency under low-frequency (non)periodic excitations. In-plane magnetic plucking is examined thoroughly by treating it as a specific type of transient excitation that is governed by temporal characteristics of complex-shaped magnetic force impulses. The study focuses on systematic analysis of the measured dynamic and electric characteristics of a magnetically plucked cantilever-type piezoelectric energy harvester, which operates in quasi-static, transitory and dynamic modes. Experimental findings are supported by results of magnetostatic/dynamic finite element analysis, enabling to establish key criteria for attaining sharp impulsive excitation, which is a prerequisite for the highly effective frequency up-conversion. The criteria are defined in terms of dimensionless governing parameters that relate relevant temporal characteristics of magnetic force impulses (duration, ramping times) to the dynamic characteristics of the transducer (natural period, rise time). A phenomenon of transient resonance is demonstrated to deliver peak power and energy outputs. The reported findings are applicable to different magnetic plucking configurations and transducers of arbitrary natural frequency. The results serve as a guideline for the rational design of a wide variety of frequency up-converting devices by providing valuable insight into magnetic plucking dynamics, which is conducive to the development of high-performance biomechanical energy harvesters intended for self-powered wearable electronics.

Non-contact magnetic cantilever-type piezoelectric energy harvester for rotational mechanism

In this work, a piezoelectric energy harvester excited by the magnetic force was proposed and developed for the rotational mechanism applications. The non-contact magnetic force was employed for exciting the piezoelectric cantilever vibration and avoiding power frictional loss. The different directions and configurations of magnetic force, attractive force and repulsive force, were designed and optimized for the piezoelectric energy harvesting system. The different exciting frequencies and duty ratios were carried out by the rotational mechanism for achieving the high power generation. When the exciting frequency approaches the natural frequency of piezoelectric cantilever beam and the duty ratio is larger, the highest power 1.23mW was achieved by the alternate attractive and repulsive magnetic forces.

Micron scale energy harvesters using multiple piezoelectric polymer layers

This paper presents the design, fabrication, and experimental results of micron scale energy harvesters that utilize piezoelectric polymer polyvinylidene fluoride-trifluoroethylene (PVDF-TrFE). Proposed devices are free-standing thin film cantilevers with multiple PVDF-TrFE and electrode layers. During the design phase, optimal piezoelectric layer thickness for the chosen substrate was calculated as 7.4μm. In order to alleviate the potential fabrication problems, a multilayer approach was adopted instead of coating a single layer. Device dimensions were selected to yield resonance frequencies below 1kHz. Cantilever type piezoelectric energy harvesters with 3 parallel-connected PVDF-TrFE layers were created using standard microfabrication techniques. Energy harvesting performances of the fabricated devices were evaluated using an electrodynamic shaker and an accelerometer to create and observe input vibrations at different amplitudes and frequencies. Measurement results were compared with theoretical calculations and the effect of substrate clamping was discussed. The power output of a (1800μm×2000μm) prototype was measured as 0.1μW when driven with a peak input acceleration of 1.0g at its resonance frequency of 192.5Hz. Half power bandwidth of the same prototype was measured as 2.9Hz. Proposed energy harvesters have relatively low resonance frequencies for their sizes and have the potential to be easily integrated with other microfabricated devices.

Dynamic characterization of fabricated guided two beam and four beam cantilever type MEMS based piezoelectric energy harvester having pyramidal shape seismic mass

Piezoelectric energy harvesters are gaining importance due to simplicity in design, operation and ability to power microelectronic sensor nodes in remote areas. A cantilever based piezoelectric energy harvester acts as a spring mass damper system having a resonance frequency tuned with ambient vibrations of low frequency. Maximum potential is generated when the resonance frequency of the energy harvester matches with frequency of ambient vibration. The highlight of this paper is a pyramidal shape seismic mass which results in a higher generated potential as compared to the square shaped seismic mass. This pyramidal shape is realized using tetra methyl ammonium hydroxide CMOS compatible 25 wt% wet etching. Two beam and four beam structures are front released using deep reactive ion etching which are fixed from both ends and having pyramidal shape seismic mass at the center. This paper presents a comparison of guided four beam and two beam cantilever type piezoelectric energy harvester fabricated using MEMS technology using a laser doppler vibrometer (LDV). Experimentally using LDV the resonance frequency for the fabricated guided two beam cantilever structure resonance frequency is 1971.9 Hz and for the guided four beam cantilever structure is 2540.6 Hz. Bandwidth for two beam cantilever structure is 40.6 Hz whereas for four beam cantilever structure bandwidth comes as 101.9 Hz. The maximum displacement measured for two beam cantilever structure at resonance frequency is 49.67 nm and for four beam cantilever structure maximum displacement is 32.17 nm. FEM (Finite Element Method) analysis for the guided two beam and guided four beam device is also performed and parameters such as resonance frequency, displacement, electric potential and von Mises stress are also reported and compared in this paper. Further the resonance frequency calculated analytically and the results obtained from FEM simulator and experimental results are also compared and it is found that they are in close agreement with each other.