Design, Simulation & Optimization of a MEMS Based Piezoelectric Energy Harvester

Abstract

Energy harvesting is defined as a process of acquiring energy surrounding a system and converting it into electrical energy for usage. Piezoelectric energy harvesting is a very important concept in energy harvesting in microelectronics. In this report, an analysis of the cantilever type piezoelectric energy harvester is conducted using the finite element method (FEM) based software COMSOL Multiphysics. A unimorph type cantilever beam of the silicon substrate, structural steel as proof mass and support, and PZT-5A material as piezoelectric constitute the physical system.