Efficient polarization management is a key issue for on-chip silicon photonic integrated circuits. Here, we propose a compact and broadband on-chip silicon polarization beam splitter (PBS) using tilted subwavelength grating (SWG) structure. The key polarization separation region consists of an input tapered SWG, a titled SWG, and two output tapered SWGs at both output ports. The tilted SWG has a strong polarization dependence for the mode coupling, and we have introduced different grating duty cycles, positional offset, and a new, to the best of our knowledge, output mode transition structure to enhance the device performance. Based on these techniques, the key coupling length of the proposed PBS is only 5 µm (total length, 12 µm), together with polarization extinction ratio (ER) 21.2 dB (19.7 dB) and insertion loss 0.21 dB (0.39 dB) for the TE (TM) mode. Moreover, the device working bandwidth can be extended to 311 nm (154 nm) by keeping E R > 15 d B ( E R > 18 d B ), satisfying the on-chip broadband applications. We believe the proposed device could become a good candidate to boost the on-chip polarization management toward compact and broadband directions.
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