The small molecule organic solar cells based on boron subphthalocyanine chloride (SubPc) and C<sub >60</sub> by varying the SubPc layer thickness from 3 nm to 21 nm were fabricated. The maximum power conversion efficiency (PCE) of 1.47% was obtained at the 9 nm SubPc layer under 100 mW/cm<sup >2</sup> AM1.5G illumination, which is attributed to reach the optimal balance between the light absorption efficiency and the carrier collection efficiency in the device. To increase the open-circuit voltage (<svg style="vertical-align:-3.39064pt;width:24.575001px;" id="M1" height="15.4" version="1.1" viewBox="0 0 24.575001 15.4" width="24.575001" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns="http://www.w3.org/2000/svg"> <g transform="matrix(.017,-0,0,-.017,.062,11.112)"><path id="x1D449" d="M730 650l-8 -28q-52 -4 -72 -18t-64 -77q-79 -113 -321 -539h-33l-119 541q-13 59 -29.5 73t-66.5 20l7 28h245l-8 -28l-28 -5q-33 -6 -40.5 -15.5t-0.5 -38.5l102 -450h2q191 320 246 430q21 42 15.5 56t-43.5 19l-31 4l7 28h240z" /></g> <g transform="matrix(.012,-0,0,-.012,12.675,15.187)"><path id="x6F" d="M257 449q92 0 154 -65t62 -158q0 -112 -67 -175t-150 -63q-98 0 -158.5 66.5t-60.5 154.5q0 59 21 106.5t54.5 75.5t71 43t73.5 15zM244 416q-48 0 -81 -47t-33 -128q0 -96 38 -158t99 -62q51 0 82 43.5t31 139.5q0 91 -36 151.5t-100 60.5z" /></g><g transform="matrix(.012,-0,0,-.012,18.85,15.187)"><path id="x63" d="M390 111l17 -21q-34 -45 -80 -73.5t-89 -28.5q-91 0 -146 62t-55 147q0 118 101 195q74 57 149 57h1q59 0 90 -27q16 -14 16 -30q0 -15 -12 -29t-21 -14q-8 0 -19 11q-44 41 -101 41q-52 0 -87.5 -42.5t-35.5 -117.5q0 -49 15 -87t39 -58t49 -30t48 -10q33 0 60.5 12
t60.5 43z" /></g> </svg>) of device, the molybdenum oxide (MoO<sub >3</sub>) and poly(3,4-ethylenedioxythiophene):poly(styrene sulfonate) were inserted between the indium tin oxide and the SubPc layer, respectively. Finally, the <svg style="vertical-align:-3.39064pt;width:24.575001px;" id="M2" height="15.4" version="1.1" viewBox="0 0 24.575001 15.4" width="24.575001" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns="http://www.w3.org/2000/svg"> <g transform="matrix(.017,-0,0,-.017,.062,11.112)"><use xlink:href="#x1D449"/></g> <g transform="matrix(.012,-0,0,-.012,12.675,15.187)"><use xlink:href="#x6F"/></g><g transform="matrix(.012,-0,0,-.012,18.85,15.187)"><use xlink:href="#x63"/></g> </svg> of device increased from 0.46 V to 1 V by using MoO<sub >3</sub> buffer layer, resulting in the fact that the PCE of device increased from 1.47% to 2.52%.