Sensor Bolometers Research Articles

Simons Observatory Microwave SQUID Multiplexing Readout: Cryogenic RF Amplifier and Coaxial Chain Design

The Simons Observatory (SO) is an upcoming polarization-sensitive Cosmic Microwave Background (CMB) experiment on the Cerro Toco Plateau (Chile) with large overlap with other optical and infrared surveys (e.g., DESI, LSST, HSC). To enable the readout of \bigO(10,000) detectors in each of the four telescopes of SO, we will employ the microwave SQUID multiplexing technology. With a targeted multiplexing factor of \bigO{(1,000)}, microwave SQUID multiplexing has never been deployed on the scale needed for SO. Here we present the design of the cryogenic coaxial cable and RF component chain that connects room temperature readout electronics to superconducting resonators that are coupled to Transition Edge Sensor bolometers operating at sub-Kelvin temperatures. We describe design considerations including cryogenic RF component selection, system linearity, noise, and thermal power dissipation.

Particle Response of Antenna-Coupled TES Arrays: Results from SPIDER and the Laboratory

Future mm-wave and sub-mm space missions will employ large arrays of multiplexed Transition Edge Sensor (TES) bolometers. Such instruments must contend with the high flux of cosmic rays beyond our atmosphere that induce "glitches" in bolometer data, which posed a challenge to data analysis from the Planck bolometers. Future instruments will face the additional challenges of shared substrate wafers and multiplexed readout wiring. In this work we explore the susceptibility of modern TES arrays to the cosmic ray environment of space using two data sets: the 2015 long-duration balloon flight of the SPIDER cosmic microwave background polarimeter, and a laboratory exposure of SPIDER flight hardware to radioactive sources. We find manageable glitch rates and short glitch durations, leading to minimal effect on SPIDER analysis. We constrain energy propagation within the substrate through a study of multi-detector coincidences, and give a preliminary look at pulse shapes in laboratory data.

Assembly and Integration Process of the High-Density Detector Array Readout Modules for the Simons Observatory

The Simons Observatory will measure the cosmic microwave background temperature and polarization using a suite of new telescopes in the Atacama Desert in Chile. The Simons Observatory will use dichroic transition edge sensor (TES) bolometer arrays spanning six frequency bands from 27 to 280 GHz. The Simons Observatory will pioneer the use of a densely packed multiplexing architecture based on the microwave SQUID multiplexer ($$\mu $$mux), housing $$\sim \! 2000$$ microwave resonators, each coupled to a TES. The Simons Observatory aims to multiplex each array of $$\sim \! 2000$$ detectors with a single pair of coaxial cables and requires a multiplexing factor of $$\sim \! 1000$$. The Simons Observatory cryogenic readout system is called the universal microwave multiplexing module (UMM). The UMM couples to both horn and lenslet-coupled detector arrays and is integrated into the universal focal-plane module (UFM) after being independently characterized. We present processes we have developed for highly repeatable and automated integration methods of UMMs, which will be needed for the production of the 49 UFMs required for the first stage of the Simons Observatory.

Microwave Power Sensors With Integrated Filtering Function for Transfer Power Standards

This letter presents a bolometric power sensor for transfer power standards in a waveguide. This is a novel design of the microwave power sensor with an integrated filter function. An analytical power sensor synthesis technique using the coupling matrix is presented here for the first time. An ${X}$ -band power sensor with the integrated third-order Chebyshev filter function was designed and manufactured. The filtering sensor uses a small bead thermistor as a sensing element. Measurements are in good agreement with simulation and theoretical expectations.

Irradiation Tests of Superconducting Detectors and Comparison with Simulations

For the future satellite mission at the second sun–earth Lagrangian point (L2), we need to mitigate phonon propagation created by cosmic rays to superconducting detectors. We simulate phonon propagation in silicon substrate and show that putting a metal layer on the substrate or making hole in the substrate reduces the propagation. We also show a function which shows the response of a TES bolometer on a substrate. To validate these theoretical expectations, we make irradiation tests using two types of superconducting detectors: transition edge sensor bolometers and kinetic inductance detectors. From the tests, we show that putting metal can reduce correlations between detectors and number of hit events from charged particles.

Performance of a Low-Parasitic Frequency-Domain Multiplexing Readout

Frequency-domain multiplexing is a readout technique for transition edge sensor bolometer arrays used on modern CMB experiments, including the SPT-3G receiver. Here, we present design details and performance measurements for a low-parasitic frequency-domain multiplexing readout. Reducing the parasitic impedance of the connections between cryogenic components provides a path to improving both the crosstalk and noise performance of the readout. Reduced crosstalk will in turn allow higher multiplexing factors. We have demonstrated a factor of two improvement in parasitic resistance compared to SPT-3G hardware. Reduced parasitics also permits operation of lower-resistance bolometers, which enables better optimization of R$_{\rm{bolo}}$ for improved readout noise performance. The prototype system exhibits noise performance comparable to SPT-3G readout hardware when operating SPT-3G detectors.

Commercially Fabricated Antenna-Coupled Transition Edge Sensor Bolometer Detectors for Next-Generation Cosmic Microwave Background Polarimetry Experiment

We report on the development of commercially fabricated multi-chroic antenna coupled Transition Edge Sensor (TES) bolometer arrays for Cosmic Microwave Background (CMB) polarimetry experiments. The orders of magnitude increase in detector count for next-generation CMB experiments requires a new approach in detector wafer production to increase fabrication throughput. We describe collaborative efforts with a commercial superconductor electronics fabrication facility (SeeQC, Inc.) to fabricate antenna coupled TES bolometer detectors. We have successfully fabricated an operational dual-polarization, dichroic sinuous antenna-coupled TES detector array on a 150 mm diameter wafer. The fabricated detector arrays have average yield of 95\% and excellent uniformity across the wafer. Both RF characteristics and TES bolometer properties are suitable for CMB observations. We successfully fabricated different types of TES bolometers optimized for frequency-multiplexing readout, time-domain multiplexing readout, and microwave SQUID multiplexing readout. We also demonstrated high production throughput. We discuss the motivation, design considerations, fabrication processes, test results, and how industrial detector fabrication could be a path to fabricate hundreds of detector wafers for future CMB polarimetry experiments.

The CLASS 150/220 GHz Polarimeter Array: Design, Assembly, and Characterization

We report on the development of a polarization-sensitive dichroic (150/220 GHz) detector array for the Cosmology Large Angular Scale Surveyor (CLASS) delivered to the telescope site in June 2019. In concert with existing 40 and 90 GHz telescopes, the 150/220 GHz telescope will make observations of the cosmic microwave background over large angular scales aimed at measuring the primordial B-mode signal, the optical depth to reionization, and other fundamental physics and cosmology. The 150/220 GHz focal plane array consists of three detector modules with 1020 transition edge sensor (TES) bolometers in total. Each dual-polarization pixel on the focal plane contains four bolometers to measure the two linear polarization states at 150 and 220 GHz. Light is coupled through a planar orthomode transducer (OMT) fed by a smooth-walled feedhorn array made from an aluminum-silicon alloy (CE7). In this work, we discuss the design, assembly, and in-lab characterization of the 150/220 GHz detector array. The detectors are photon-noise limited, and we estimate the total array noise-equivalent power (NEP) to be 2.5 and 4 aW$\sqrt{\mathrm{s}}$ for 150 and 220 GHz arrays, respectively.

The Design of the CCAT-prime Epoch of Reionization Spectrometer Instrument

The Epoch of Reionization Spectrometer (EoR-Spec) is an instrument module for the Prime-Cam receiver of the 6 m aperture CCAT-prime Telescope at 5600 m in Chile. EoR-Spec will perform 158 $\mu$m [CII] line intensity mapping of star-forming regions at redshifts between 3.5 and 8 (420 - 210 GHz), tracing the evolution of structure during early galaxy formation. At lower redshifts, EoR-Spec will observe galaxies near the period of peak star formation - when most stars in today's universe were formed. At higher redshifts, EoR-Spec will trace the late stages of reionization, the early stages of galaxy assembly, and the formation of large-scale, three-dimensional clustering of star-forming galaxies. To achieve its science goals, EoR-Spec will utilize CCAT-prime's exceptionally low water vapor site, large field of view ($\sim 5$ degrees at 210 GHz), and narrow beam widths ($\sim 1$ arcminute at 210 GHz). EoR-Spec will be outfitted with a cryogenic, metamaterial, silicon substrate-based Fabry-Perot Interferometer operating at a resolving power ($\lambda/\Delta\lambda$) of 100. Monolithic dichroic arrays of cryogenic, feedhorn-coupled transition edge sensor bolometers provide approximately 6000 detectors, which are read out using a frequency division multiplexing system based on microwave SQUIDs. The novel design allows the measurement of the [CII] line at two redshifts simultaneously using dichroic pixels and two orders of the Fabry-Perot. Here we present the design and science goals of EoR-Spec, with emphasis on the spectrometer, detector array, and readout designs.

A Thermalized Bias Circuit for Wider Operating Temperature Range in Bolometric Infrared Imagers

This letter presents a device for biasing bolometric infrared imaging sensors to increase the operating temperature range and enhance performance. It addresses the market's need for uncooled readout circuits that are easier to use. Here, we propose an integrated biasing system capable of managing the bolometric sensor's high-temperature dependence. We demonstrated that a biasing architecture using thermalized bolometers can automatically offset resistance variations in the active bolometer due to temperature variations of the focal plane array (FPA). Our research concerns a 12-μm pixel pitch QVGA matrix that operates at 50-mK noise equivalent temperature difference (NETD).

Developing AlMn Films for Argonne TES Fabrication

The reference design for the next-generation cosmic microwave background (CMB) experiment, CMB-S4, relies on large arrays of transition edge sensor (TES) bolometers coupled to Superconducting Quantum Interference Device (SQUID)-based readout systems. Mapping the CMB to near cosmic variance limits will enable the search for signatures of inflation and constrain dark energy and neutrino physics. AlMn TESes provide simple film manufacturing and highly uniform arrays over large areas to meet the requirements of the CMB-S4 experiment. TES parameters such as critical temperature and normal resistance must be tuned to experiment specifications and can be varied based on geometry and steps in the fabrication process such as deposition layering, geometry, and baking time and temperature. Using four-terminal sensing, we measured $T_C$ and $R_N$ of AlMn 2000 ppm films and devices of varying thicknesses fabricated at Argonne National Laboratory to motivate device geometries and fabrication processes to tune $T_C$ to 150-200 mK and $R_N$ to $\sim$10 mOhms. Measurements of IV curves and time constants for the resulting devices of varying leg length were made using time-division SQUID multiplexing, and determined $T_C$, $G$, $k$, $f_{3db}$, and $R_N$. We present the results of these tests along with the geometries and fabrication steps used to tune the device parameters to the desired limits.

On-Sky Performance of the SPT-3G Frequency-Domain Multiplexed Readout

Frequency-domain multiplexing (fMux) is an established technique for the readout of large arrays of transition edge sensor (TES) bolometers. Each TES in a multiplexing module has a unique AC voltage bias that is selected by a resonant filter. This scheme enables the operation and readout of multiple bolometers on a single pair of wires, reducing thermal loading onto sub-Kelvin stages. The current receiver on the South Pole Telescope, SPT-3G, uses a 68x fMux system to operate its large-format camera of $\sim$16,000 TES bolometers. We present here the successful implementation and performance of the SPT-3G readout as measured on-sky. Characterization of the noise reveals a median pair-differenced 1/f knee frequency of 33 mHz, indicating that low-frequency noise in the readout will not limit SPT-3G's measurements of sky power on large angular scales. Measurements also show that the median readout white noise level in each of the SPT-3G observing bands is below the expectation for photon noise, demonstrating that SPT-3G is operating in the photon-noise-dominated regime.

Performance of Al–Mn Transition-Edge Sensor Bolometers in SPT-3G

SPT-3G is a polarization-sensitive receiver, installed on the South Pole Telescope, that measures the anisotropy of the cosmic microwave background (CMB) from degree to arcminute scales. The receiver consists of ten 150~mm-diameter detector wafers, containing a total of 16,000 transition-edge sensor (TES) bolometers observing at 95, 150, and 220 GHz. During the 2018-2019 austral summer, one of these detector wafers was replaced by a new wafer fabricated with Al-Mn TESs instead of the Ti/Au design originally deployed for SPT-3G. We present the results of in-lab characterization and on-sky performance of this Al-Mn wafer, including electrical and thermal properties, optical efficiency measurements, and noise-equivalent temperature. In addition, we discuss and account for several calibration-related systematic errors that affect measurements made using frequency-domain multiplexing readout electronics.

Commercially Fabricated Low Loss Superconducting Resonators Integrated With Detectors for Frequency Domain Multiplexing Readout of Future Cosmic Microwave Background Experiments

Planned Stage-IV cosmic microwave background (CMB) experiments call for telescopes with the order of 500 000 transition edge sensor (TES) bolometers. Such large arrays would benefit from detector multiplexing, as well as miniaturization and integration of readout components. In addition, fabrication of micro-fabricated devices at a commercial foundry could potentially boost production rate and reduce overall cost. To this end, HYPRES, Inc., LBNL, and U.C. Berkeley are developing low loss, superconducting LC resonators integrated with antenna coupled TES bolometers for frequency multiplexing readout. The resonators are fabricated on the same wafer and are in the same process flow as the TES detectors, reducing size, weight, and wiring complexity of a detector module compared to the conventional design, where each component is fabricated separately. We have fabricated and tested resonators from 0.6 to 70 MHz, both as standalone devices and integrated with TES bolometers, all fabricated on 150- mm wafers. We discuss the design and fabrication of these devices and present measurements of the standalone resonators.

MEMS micro-bridge structure-based process platform fabricated with CMOS Al BEOL compatible process

A common MEMS micro-bridge structure-based process was developed on 200 mm standard CMOS Al back end of line. Thick amorphous-Si (alpha-Si) film was developed and used as the sacrificial material with well-controlled film stress to improve the wafer warpage. Anchor/contact structure was formed by a trench first scheme with no metal or dielectric plug in it, and thin Ti/TiN bilayer barrier metal was used as an electrode layer to define the sensing material resistor with improved step coverage on the anchor sidewall. A wet etching process was introduced for electrode layer patterning with almost no damage to the sensing material. The micro-bridge structure-based bolometer device was fabricated and evaluated on this platform. Good electrical performance had been achieved, and after optimized stress engineering the range of the released micro-bridge surface height variation was controlled to less than 10%, which indicated that the process platform can well match the bolometer, micro-lens and related sensor requirements.

SOFIA-HIRMES: Looking Forward to the HIgh-Resolution Mid-infrarEd Spectrometer

The HIgh-Resolution Mid-infrarEd Spectrometer (HIRMES) is the 3rd Generation Instrument for the Stratospheric Observatory For Infrared Astronomy (SOFIA), currently in development at the NASA Goddard Space Flight Center (GSFC), and due for commissioning in 2019. By combining direct-detection Transition Edge Sensor (TES) bolometer arrays, grating-dispersive spectroscopy, and a host of Fabry-Perot tunable filters, HIRMES will provide the ability for high resolution ([Formula: see text]), mid-resolution ([Formula: see text]), and low-resolution ([Formula: see text]) slit-spectroscopy, and 2D Spectral Imaging ([Formula: see text] at selected wavelengths) over the 25–122[Formula: see text][Formula: see text]m mid to far infrared waveband. The driving science application is the evolution of proto-planetary systems via measurements of water-vapor, water-ice, deuterated hydrogen (HD), and neutral oxygen lines. However, HIRMES has been designed to be as flexible as possible to cover a wide range of science cases that fall within its phase-space, all whilst reaching sensitivities and observing powers not yet seen thus far on SOFIA, providing unique observing capabilities which will remain unmatched for decades.

Fabrication and Characterization of Superconducting Bilayer (Al/Ti) Transition-Edge Sensor Bolometer Array

A four-by-four transition-edge sensor (TES) bolometer array based on an Al/Ti bilayer on an Si3N4 substrate for thermal connection, showing an unbiased transition temperature of 1.2 K, was fabricated and characterized. Formation of the Al/Ti bilayer with tetragonal structure was confirmed by x-ray diffraction analysis. The surface roughness of 3.11 nm calculated by atomic force microscopy was found to be negligible compared with the particle size (19.66 nm), indicating a smooth surface. The smoothness of the resistance–temperature (R–T) curve corresponds to the smoothness of the surface of the bilayer sensor, and the superconducting transition curve of the suspended bilayer TES was designed with a biased Tc of 0.45 K and ΔTc = 2 mK. Such TES bolometer arrays are suitable for astrophysical observations and are extensively used in cosmic microwave background polarization detection.

Modelling of Freestanding Membrane-Supported Superconducting Al/Ti Bilayer Transition Edge Sensor Bolometer

The aim of this research work was to model the behaviour of a transition edge sensor (TES) bolometer by applying curve fitting methodology on empirical data. Data obtained from the experiments were used to plot characteristic curves to find resistance–temperature (R–T) and current–voltage (I–V) relations. The measurements were taken by using a cryogenic-free 3He refrigerator with a least temperature of 320 mK. Least-squares curve fitting technique was used to devise the equations of the experimentally obtained data. Similarly, the empirical data and estimated curves were validated using the parameters of R-squared, sum of squares due to error (SSE), adjusted R-squared, and root-mean-squared error (RMSE). By comparing the plot of the empirical data and estimated behaviour curves showed high degree of similarity, and hence it was established that these equations could be used to estimate the bolometer’s operating behaviour for different ambient conditions with minimal percentage error. We also studied etched (TES device suspended on SiN) and non-etched (Si substrate based device) samples of bolometers. It was concluded that bolometers made up of etched sample of TES are appropriate for use in millimetre and submillimeter waves, especially for cosmic microwave background polarization detection.

Detector and Readout Assembly and Characterization for the Simons Array

The Simons Array (SA) is a cosmic microwave background (CMB) polarization experiment comprised of three telescopes that will observe the CMB at 90, 150, 220, and 270 GHz with more than 22,000 Transition Edge Sensor (TES) bolometers. The cryogenic receivers inside each telescope are named POLARBEAR-2a, POLARBEAR-2b, and POLARBEAR-2c (PB-2a, PB-2b, and PB-2c, respectively). To allow for the large number of detectors, SA uses frequency-division multiplexing with multiplexing factor of 40. We describe the process developed to assemble the readout circuit repeatably for SA. After assembly, we characterize the readout circuit and TESs at cryogenic temperatures in a condition of negligible incident optical power. Impedances in the readout circuit bias our estimates of TES parameters, and we describe a method to account for this.

The EBEX Balloon-borne Experiment—Detectors and Readout

Abstract EBEX was a long-duration balloon-borne experiment to measure the polarization of the cosmic microwave background. The experiment had three frequency bands centered at 150, 250, and 410 GHz and was the first to use a kilopixel array of transition edge sensor bolometers aboard a balloon platform. We describe the design and characterization of the array and the readout system. From the lowest to highest frequency, the median measured detectors’ average thermal conductances were 39, 53, and 63 pW/K, the medians of transition temperatures were 0.45, 0.48, and 0.47 K, and the medians of normal resistances were 1.9, 1.5, and 1.4 Ω; we also give the measured distributions. With the exception of the thermal conductance at 150 GHz, all measured values are within 30% of their design. We measure median low-loop-gain time constants τ 0 = 88, 46, and 57 ms. Two measurements of bolometer absorption efficiency gave results consistent within 10% and showing high (∼0.9) efficiency at 150 GHz and medium (∼0.35 and ∼0.25) efficiency at the two higher bands. We measure a median total optical power absorbed of 3.6, 5.3, and 5.0 pW. EBEX pioneered the use of the digital version of the frequency domain multiplexing system. We multiplexed the bias and readout of 16 bolometers onto two wires. The median per-detector noise-equivalent temperatures are 400, 920, and 14,500 . We compare these values to our preflight predictions and to a previous balloon payload. We discuss the sources of excess noise and the path for a future payload to make full use of the balloon environment.