Biomedical Microelectromechanical Systems Research Articles

Development of spiral square coils for magnetic labelling detection in microfluidic systems

Due to the development of microfluidic systems biomedical microelectromechanical systems (BioMEMS) for magnetic labelling detection by magnetic microbeads circling in microfluidic channels, we used the magnetic field created by microcoils. The magnetic field associated with the electric current, but with negatively affects if its value increases too much. Handling bio-species in the microfluidic chip requires that the temperature maintained to keep the cells to prevent their destruction. In this paper we have described the spiral square coil design of different structures to produce an effective magnetic flux density. The simulation of the magnetic flux density is carried out with the help of the COMSOL software. We have presented an optimization of the geometric parameters of the microcoil for a better performance and a miniaturization of the structure with copper wire section S=25 µm<sup>2</sup> and inter-wire space a=5 µm. We have also developed this microcoil by adding a ferromagnetic core to the inner center, the results obtained in this work shown that the magnetic flux density increases around 1.07 times in Bx and 1.45 times in Bz. This new approach in designing a microcoil allows to obtaining a fast trapping of the microbeads and a highly sensitive biological element detection and avoiding increase heat ratio in microfluidic systems.

Strengthening Privacy and Data Security in Biomedical Microelectromechanical Systems by IoT Communication Security and Protection in Smart Healthcare

Biomedical Microelectromechanical Systems (BioMEMS) serve as a crucial catalyst in enhancing IoT communication security and safeguarding smart healthcare systems. Situated at the nexus of advanced technology and healthcare, BioMEMS are instrumental in pioneering personalized diagnostics, monitoring, and therapeutic applications. Nonetheless, this integration brings forth a complex array of security and privacy challenges intrinsic to IoT communications within smart healthcare ecosystems, demanding comprehensive scrutiny. In this manuscript, we embark on an extensive analysis of the intricate security terrain associated with IoT communications in the realm of BioMEMS, addressing a spectrum of vulnerabilities that spans cyber threats, data manipulation, and interception of communications. The integration of real-world case studies serves to illuminate the direct repercussions of security breaches within smart healthcare systems, highlighting the imperative to safeguard both patient safety and the integrity of medical data. We delve into a suite of security solutions, encompassing rigorous authentication processes, data encryption, designs resistant to attacks, and continuous monitoring mechanisms, all tailored to fortify BioMEMS in the face of ever-evolving threats within smart healthcare environments. Furthermore, the paper underscores the vital role of ethical and regulatory considerations, emphasizing the need to uphold patient autonomy, ensure the confidentiality of data, and maintain equitable access to healthcare in the context of IoT communication security. Looking forward, we explore the impending landscape of BioMEMS security as it intertwines with emerging technologies such as AI-driven diagnostics, quantum computing, and genomic integration, anticipating potential challenges and strategizing for the future. In doing so, this paper highlights the paramount importance of adopting an integrated approach that seamlessly blends technological innovation, ethical foresight, and collaborative ingenuity, thereby steering BioMEMS towards a secure and resilient future within smart healthcare systems, in the ambit of IoT communication security and protection.

Three-dimensional AC electroosmotic micropump with high power density

This paper presents a novel three-dimensional alternating current electroosmosis (ACEO) micropump with high power density. ACEO is a phenomenon to generate a flow of a liquid such as water by applying an AC voltage to the liquid. Using a specific configuration, a net flow due to ACEO becomes unidirectional and an ACEO micropump can be constructed. Many ACEO micropumps have been proposed; however, most of them are of the planar type, and their output power per device volume is not sufficiently high for applications such as micro fluid power sources for micro total analysis systems, lab-on-a-chips, biomedical microelectromechanical systems (bio-MEMSs), soft microactuators, and soft microrobots. To achieve a higher output power density, in this study, we proposed an ACEO micropump using an array of plate-cylinder electrodes, which is called PC-ACEO-MP. To induce unidirectional flow efficiently, a square pole-slit electrodes ACEO micropump called SS-ACEO-MP has been proposed using asymmetrical pillar-shaped electrodes. PC-ACEO-MP is an extension of SS-ACEO-MP with a three-dimensional structure. First, the finite element method simulations were performed and the results showed that PC-ACEO-MP has the potential to realize high output power with a 1 cm3 effective pump volume using large numbers of plate-cylinder electrodes connected in parallel and in series. Second, a fabrication method using MEMS fabrication process, including electroplating, was proposed and developed for a micro-holed electrode plate that forms parallel cylinder electrodes. The validity of the proposed process was confirmed by fabricating large models and micro-models of the micro-holed electrode plate. The diameter and number of microholes were 10 μm and 36 100, respectively, for the large models and 3 μm and 65 500, respectively, for the micro models. Finally, PC-ACEO-MPs were constructed and their promising pumping characteristics were clarified through experiments using deionized water. The estimated power density was approximately 400 times higher than that of the former high output power ACEO micropump.

Recent Advances in Magnetic Polymer Composites for BioMEMS: A Review.

The objective of this review is to investigate the potential of functionalized magnetic polymer composites for use in electromagnetic micro-electro-mechanical systems (MEMS) for biomedical applications. The properties that make magnetic polymer composites particularly interesting for application in the biomedical field are their biocompatibility, their adjustable mechanical, chemical, and magnetic properties, as well as their manufacturing versatility, e.g., by 3D printing or by integration in cleanroom microfabrication processes, which makes them accessible for large-scale production to reach the general public. The review first examines recent advancements in magnetic polymer composites that possess unique features such as self-healing capabilities, shape-memory, and biodegradability. This analysis includes an exploration of the materials and fabrication processes involved in the production of these composites, as well as their potential applications. Subsequently, the review focuses on electromagnetic MEMS for biomedical applications (bioMEMS), including microactuators, micropumps, miniaturized drug delivery systems, microvalves, micromixers, and sensors. The analysis encompasses an examination of the materials and manufacturing processes involved and the specific fields of application for each of these biomedical MEMS devices. Finally, the review discusses missed opportunities and possible synergies in the development of next-generation composite materials and bioMEMS sensors and actuators based on magnetic polymer composites.

Evaluation of High-Tech Industry Using Fuzzy ARAS Method

In this article, High technology capacity planning and related to management we review the literature. Using the backdrop of the competitive. Strategic, tactical and operational perspectives. In the field of high technology Product innovation for a sample of 121 firms and the relationship between firm survival. To choose their freight delivery concept can be used by companies it provides a method. Advanced Extension of Additional Rate Assessment (ARAS) Method Rake distribution concept was developed to solve Exam problem. implementation of Based in Czech Republic tire manufacturing company is taken as a case. Despite the study, the proposed picture denouncing the ARAS method is general and any other company can use it. To verify the novel image denouncing the ARAS method, with nine state-of-the-art image fuzzy multi-criteria decision-making methods a comparative analysis is presented. Alternatives is Technological factors (TF), Economic factors (EF), Social (personnel) Factors (SF). Evaluation Parameter is biomedical micro electromechanical systems (BioMEMS) (C1), Nano technology (C2), Biotechnology (C3), Biomedical engineering (C4). In this type of analysis, Fuzzy ARAS methods determine for the best solution to the negative Short distance and very long distance to settlement, but Comparison of these distances doesn’t underestimate the importance. As a result, Technological factors (TF) is first rank, and Social (personnel) Factors (SF) is lowest rank.

An extended Step-Wise Weighted Assessment Ratio Analysis for improving criteria prioritization process Using PROMETHEE Method

The new Step Wise Weighted Assessment Ratio Analysis (SWARA) method incorporates the opinion of experts, advocates or litigants about the importance ratio. The SWARA methodology can be used in the p in a virtual environment Special decision support systems Practical implementation and Alternative Dispute Resolution. Possible polymetallic mineralization Future map of various study datasets Step wise through integration Weighted Ratio Analysis Developed by (SWARA). In the world of external methods PROMETHEE methods are very popular. One of the reasons for this popularity called PROMCALC-Promethee It is very user-friendly calculation software. Many trainers use their multiple criteria PROMCALC to handle problems. However, all users in PROMETHEE methods regarding the consequences of model assumptions made them will not know. We study the application of PROMETHEE outranking methods to portfolio selection problems. Starting from the new formulation of the PROMETHEE V method, based on the concepts of frontier portfolios and c-optimal portfolios we develop several alternative approaches. The Priority Ranking System Method for Saturation Evaluation (PROMETHEE) was used to solve the problem. Alternative is Technological (C1), Economic (C2), Political and legislative (C3), Social (personnel) (C4). Evaluation parameters are biomedical micro electromechanical systems (BioMEMS) (A1), Nano technology (A2), Biotechnology (A3), Biomedical engineering (A4). PROMETHEE methods are the best solution. The solution with the shortest distance from the negative-best solution the longest distance is determined, but comparison of these distances is not considered significant. As a result, technical factors (C1) are ranked first, while economic factors (C2) are ranked lowest.

Magneto-Mechanically Triggered Thick Films for Drug Delivery Micropumps.

Given the demanding use of controlled drug delivery systems, our attention was focused on developing a magnetic film that can be triggered in the presence of a magnetic field for both drug delivery and the actuating mechanism in micropump biomedical microelectromechanical systems (BioMEMS). Magnetic alginate films were fabricated in three steps: the co-precipitation of iron salts in an alkaline environment to obtain magnetite nanoparticles (Fe3O4), the mixing of the obtained nanoparticles with a sodium alginate solution containing glycerol as a plasticizer and folic acid as an active substance, and finally the casting of the final solution in a Petri dish followed by cross-linking with calcium chloride solution. Magnetite nanoparticles were incorporated in the alginate matrix because of the well-established biocompatibility of both materials, a property that would make the film convenient for implantable BioMEMS devices. The obtained film was analyzed in terms of its magnetic, structural, and morphological properties. To demonstrate the hypothesis that the magnetic field can be used to trigger drug release from the films, we studied the release profile in an aqueous medium (pH = 8) using a NdFeB magnet as a triggering factor.

Emerging technologies for combating pandemics

ABSTRACT Introduction Covid-19, alongside previous pandemics, has highlighted the need for the continued development of technologies that are at our disposal. Emerging technologies are those that show true promise in achieving such a goal and have begun to form sturdy independent research areas. Technological advances in healthcare must continually develop to ensure that the world is prepared for any future diseases that may ensue. As such, a strategic review into 43 manuscripts since 2019 has been conducted to determine the prominence of emerging technologies since the beginning of the Covid-19 pandemic. Areas Covered Relating to their use in a pandemic state, additive manufacturing (AM), biofabrication, microfluidics, biomedical microelectromechanical systems (BioMEMS), and artificial intelligence (AI) are described. Applications over the past 2–3 years, as well as future developments, are considered throughout. Expert Opinion All the technologies mentioned in this review are sure to develop further, having shown their importance and value during the covid-19 pandemic. As research continues within the area, their efficacy will increase to the point where it likely will become gold standard for pandemic control. Combining certain technologies mentioned has also proved to have had great success in improving the final results obtained.

3D cell culture models: Drug pharmacokinetics, safety assessment, and regulatory consideration.

Nonclinical testing has served as a foundation for evaluating potential risks and effectiveness of investigational new drugs in humans. However, the current two‐dimensional (2D) in vitro cell culture systems cannot accurately depict and simulate the rich environment and complex processes observed in vivo, whereas animal studies present significant drawbacks with inherited species‐specific differences and low throughput for increased demands. To improve the nonclinical prediction of drug safety and efficacy, researchers continue to develop novel models to evaluate and promote the use of improved cell‐ and organ‐based assays for more accurate representation of human susceptibility to drug response. Among others, the three‐dimensional (3D) cell culture models present physiologically relevant cellular microenvironment and offer great promise for assessing drug disposition and pharmacokinetics (PKs) that influence drug safety and efficacy from an early stage of drug development. Currently, there are numerous different types of 3D culture systems, from simple spheroids to more complicated organoids and organs‐on‐chips, and from single‐cell type static 3D models to cell co‐culture 3D models equipped with microfluidic flow control as well as hybrid 3D systems that combine 2D culture with biomedical microelectromechanical systems. This article reviews the current application and challenges of 3D culture systems in drug PKs, safety, and efficacy assessment, and provides a focused discussion and regulatory perspectives on the liver‐, intestine‐, kidney‐, and neuron‐based 3D cellular models.

Extraction of Cell-free Dna from An Embryo-culture Medium Using Micro-scale Bio-reagents on Ewod

As scientific and technical knowledge advances, research on biomedical micro-electromechanical systems (bio-MEMS) is also developing towards lab-on-a-chip (LOC) devices. A digital microfluidic (DMF) system specialized for an electrowetting- on-dielectric (EWOD) mechanism is a promising technique for such point-of-care systems. EWOD microfluidic biochemical analytical systems provide applications over a broad range in the lab-on-a-chip field. In this report, we treated extraction of cell-free DNA (cf-DNA) at a small concentration from a mouse embryo culture medium (2.5 days & 3.5 days) with electro-wetting on a dielectric (EWOD) platform using bio-reagents of micro-scale quantity. For such extraction, we modified a conventional method of genomic-DNA (g-DNA) extraction using magnetic beads (MB). To prove that extraction of cf-DNA with EWOD was accomplished, as trials we extracted designed-DNA (obtained from Chang Gung Memorial Hospital (CGMH), Taiwan which shows properties similar to that of cf-DNA). Using that designed DNA, extraction with both conventional and EWOD methods has been performed; the mean percentage of extraction with both methods was calculated for a comparison. From the cycle threshold (Ct) results with a quantitative polymerase chain reaction (q-PCR), the mean extraction percentages were obtained as 14.8 percent according to the conventional method and 23 percent with EWOD. These results show that DNA extraction with EWOD appears promising. The EWOD extraction involved voltage 100 V and frequency 2 kHz. From this analysis, we generated a protocol for an improved extraction percentage on a EWOD chip and performed cf-DNA extraction from an embryo-culture medium (KSOM medium) at 3.5 and 2.5 days. The mean weight obtained for EWOD-extracted cf-DNA is 0.33 fg from the 3.5-day sample and 31.95 fg from the 2.5-day sample. All these results will pave a new path towards a renowned lab-on-a-chip concept.

Slip Molding for Precision Fabrication of Microparts.

Microparts with precise sizes, custom shapes, and a wide selection of materials have various applications, including biomedical microelectromechanical systems(MEMS), drug delivery, single-cell studies, and tissue engineering. Janus microparts containing multiple components are also demonstrated for biomolecule analysis, cell-cell interaction studies, and self-assembly. Small-footprint, affordable, and rapid technologies to fabricate microparts with customized morphologies and a wide selection of materials are highly desired. This paper reports on a SlipChip-based microfluidic molding method to control the interface for the synthesis of microparts-on-demand (mPods) with fast and easy loading-slipping-solidification operations that do not require pumps, masks, or other auxiliary fluidic control instruments. This method is based on the relative movement of two microfluidic plates that are in close contact, and the size and shape of the microparts can be accurately controlled by the geometry of the microcavities imprinted on the contacting surfaces of these microfluidic plates. To demonstrate the capability of this method, mPods of different sizes and various shapes are presented with photosensitive resin via a photopolymerization reaction. The synthesis of two-layer Janus microparts is also demonstrated by a slip overmolding method. This SlipChip-based molding method can offer new opportunities for producing customized microparts with great flexibility for a broad spectrum of applications.

Light-driven micron-scale 3D hydrogel actuator produced by two-photon polymerization microfabrication

Light-driven micro/nano-actuators are one of the most important topics in the biomedical micro-electromechanical systems (MEMS) field. Currently, their development is hampered due to the difficulties in designing and fabricating biocompatible light-driven microactuators with the dimensions less than one hundred micrometres and a response time in the order of seconds. In this work, gel photoresists were prepared by embedding photothermal surface-modified Fe3O4 nanoparticles (NPs) into a mixture that included a photoinitiator, photosensitizer, monomers, crosslinkers and solvents. Macroscopic poly(N-isopropylacrylamide) (PNIPAM)/nano-Fe3O4 hydrogels were prepared by ultraviolet photopolymerization of gel photoresists, which showed good temperature-responsive volume changes and light-triggered bending deformation. Then the two-photon polymerization (TPP) microfabrication properties of gel photoresists with 0, 0.48 and 0.95 wt% Fe3O4 NPs were investigated in detail. Importantly, after the TPP microfabrication and subsequent solvent-exchange procedure, a double-armed near-infrared (NIR)-light-driven three-dimensional (3D) hydrogel microcantilever with a size of ∼26 μm was successfully fabricated. The hydrogel microactuator had a fast response time of ∼0.033 s in water under NIR radiation and showed good reversibility. Furthermore, the distance between the two arms of the hydrogel microcantilever could be manipulated by controlling the laser focus and incident laser power.

Design of capacitance based on interdigitated electrode for BioMEMS sensor application

In this paper present, an electrostatic actuation mechanism based on the interdigitated electrode for the Biomedical Micro Electro Mechanical Systems (Bio-MEMS) sensors was mainly used for sensing or actuation in analytical and different detection applications. One of the main things interdigitated electrode (IDE) for capacitance derived from multiple electrode pairs has been connected in parallel with wide proof mass, folded spring beam attached as anchor in the sensor construction. The total capacitance was a sum of capacitance contributed by neighbouring electrodes. Hence the opposite walls of comb electrodes in the overlapping region form a parallel plate capacitor and contribute a capacitance C easily analyzed with fringe capacitance can be estimated to analytically difficult one. However, the nearly accurate way to estimate for the fringe capacitance is by using the finite element method (FEM). The major importance of the geometric dimensions on interdigitated electrode sensors are studied with an analytical model. The design of capacitive based IDE sensors are simulated and demonstrated on visualizing of the electrical properties by COMSOL Multiphysics software.

Magnetic-field-driven ultra-small 3D hydrogel microstructures: Preparation of gel photoresist and two-photon polymerization microfabrication

In the biomedical micro-electromechanical systems (MEMS) field, the fabrication of three-dimensional (3D) magnetic hydrogel microdevices and microactuators with sizes smaller than 100 μm is difficult. In this paper, magnetic-field-driven 3D hydrogel microstructures were fabricated through four steps: the synthesis of surface-modified Fe3O4 nanoparticles (Fe3O4 NPs), the preparation of a magnetic gel photoresist, two-photon polymerization microfabrication, and a solvent-exchange process. For the preparation of a stable magnetic gel photoresist, surface-modified Fe3O4 NPs with an average size of 7.8 nm were synthetized and well dispersed in gel photoresist. The magnetic gel photoresist exhibited a good UV photopolymerization effect, and a magnetic-field-driven macroscopic hydrogel was prepared. The two-photon polymerization properties of gel photoresists with various Fe3O4 NP contents were investigated in detail, and the minimum width of fabricated lines reached 106 nm for the photoresist with 0.32 wt% Fe3O4 NPs. Three hydrogel microstructures—the Qingdao University logo, a magnetically actuated micro-rod, and a magnetically actuated micro-nail—were successfully fabricated using a gel photoresist with 0.96 wt% Fe3O4 NPs. Importantly, obvious and reversible external-magnetic-field-driven bending behavior of the 3D hydrogel micro-nail with a size of 10 μm was observed.

Relationship between student designers’ reflective thinking and their design performance in bioengineering project: exploring reflection patterns between high and low performers

The purpose of this study is to investigate the relationship between students’ patterns of reflective thinking and their performance in solving design problems. Reflective thinking is a critical element in the process of solving ill-defined design problems. Many educators are dedicated to finding ways to promote students’ reflection. Yet few empirical studies attempt to explore the relationship between reflective thinking and design performance. 44 students enrolled in a Biomedical Microelectromechanical Systems and Medical Devices course participated in this study. Through a self-assessed questionnaire, students’ reflection patterns were collected in three areas: timing of reflection, objects of reflection, and levels of reflection. Also, students’ performance scores on their team project in biomedical device design were collected. The results revealed a general pattern of student designers’ reflection behaviors and a number of significant different reflection patterns between high-performing and low-performing students as they approached a design problem-solving task. Implications for supporting students’ reflective thinking and enhancing their problem-solving abilities in design tasks were discussed.

Methods of Micropatterning and Manipulation of Cells for Biomedical Applications.

Micropatterning and manipulation of mammalian and bacterial cells are important in biomedical studies to perform in vitro assays and to evaluate biochemical processes accurately, establishing the basis for implementing biomedical microelectromechanical systems (bioMEMS), point-of-care (POC) devices, or organs-on-chips (OOC), which impact on neurological, oncological, dermatologic, or tissue engineering issues as part of personalized medicine. Cell patterning represents a crucial step in fundamental and applied biological studies in vitro, hence today there are a myriad of materials and techniques that allow one to immobilize and manipulate cells, imitating the 3D in vivo milieu. This review focuses on current physical cell patterning, plus chemical and a combination of them both that utilizes different materials and cutting-edge micro-nanofabrication methodologies.

Biocompatible Aurivillius-like layered ferroelectric BaIn2Ta2O9

A biocompatible Aurivillius-like layered ferroelectric that was designed by first-principles analysis and its thin film fabricated using radio frequency magnetron sputtering has been utilized for sensors of biomedical microelectromechanical systems. Aurivillius ferroelectrics have superior characteristics such as ferroelectric anisotropies and high Curie temperatures, and are widely used for sensors and memories. However, they contain the bio-toxic element, bismuth. In this study, we designed and fabricated a new biocompatible Aurivillius-like ferroelectric. SrBi2Ta2O9 was subjected to first-principles calculation for validation. Lattice parameters of SrBi2Ta2O9 in each phase and the spontaneous polarization value were in good agreement with the experimental reports. Subsequently, the prediction of Aurivillius-like materials and generation of its thin films were performed. During the design of the new molecule, 37 candidates were obtained by including constraint conditions such as the tolerance factor. We carried out the first-principles calculations for the structure optimization, determination of the band gap (for insulation), the soft mode (for ferroelectric phase transition), and the ferroelectric properties. The spontaneous polarization of BaIn2Ta2O9 was calculated as 7.95nC/cm2. Next, a BaIn2Ta2O9 thin film was generated. Through the experimental design procedure using an L27 orthogonal array, we determined the sputtering conditions. Introducing the post-annealing process, the polarization-electric field hysteresis loop was obtained and its remnant polarization was calculated to be 15nC/cm2. The x-ray diffraction pattern predicted the crystal structure of SrBi2Ta2O9-type materials. These results show the possible formation of the biocompatible Aurivillius-like ferroelectric material, BaIn2Ta2O9.

Continuously Operating Biosensor and Its Integration into a Hermetically Sealed Medical Implant.

An integration concept for an implantable biosensor for the continuous monitoring of blood sugar levels is presented. The system architecture is based on technical modules used in cardiovascular implants in order to minimize legal certification efforts for its perspective usage in medical applications. The sensor chip operates via the principle of affinity viscometry, which is realized by a fully embedded biomedical microelectromechanical systems (BioMEMS) prepared in 0.25-µm complementary metal–oxide–semiconductor (CMOS)/BiCMOS technology. Communication with a base station is established in the 402–405 MHz band used for medical implant communication services (MICS). The implant shall operate within the interstitial tissue, and the hermetical sealing of the electronic system against interaction with the body fluid is established using titanium housing. Only the sensor chip and the antenna are encapsulated in an epoxy header closely connected to the metallic housing. The study demonstrates that biosensor implants for the sensing of low-molecular-weight metabolites in the interstitial may successfully rely on components already established in cardiovascular implantology.

Hydrogel-reinforced polypyrrole electroactuator.

Robust electroactuators that are lightweight, power-efficient and capable of generating high forces at a low actuation voltage are of great demand in the design of micro-electromechanical systems (MEMS) for biomedical applications. In this work, electroactive composite films of alginate hydrogel and polypyrrole/polyethylene glycol (PPy/PEG) are synthesized and characterized as actuators for driving an implantable insulin micropump. A porous and flexible alginate hydrogel back layer is used to mechanically reinforce the PPy/PEG film by enhancing the actuator's resistance to its generated tension but without increase of its overall rigidness. Scanning electron microscopy (SEM) reveals that the PPy/PEG grows through the alginate hydrogel layer, thus forming a well-integrated composite and eliminating the possibility of delamination in long term applications. Mechanical test proves this alginate-PPy/PEG composite film to be more stretchable than the PPy/PEG film, and electroactuation test in phosphate buffered saline (PBS) demonstrated a large deformation at +2 V in 60 s. Taken together, our work here indicates great promise for this new type of composite actuator to be used in biomedical MEMS.

Micromachining of Parylene C for bioMEMS

Recent advances in the micromachining of poly(p-xylylenes), commercially known as Parylenes, have enabled the development of novel structures and devices for microelectromechanical systems (MEMS). In particular, Parylene C (poly[chloro-p-xylylene]) has been explored extensively for biomedical applications of MEMS given its compatibility with micromachining processes, proven biocompatibility, and many advantageous properties including its chemical inertness, optical transparency, flexibility, and mechanical strength. Here we present a review of often used and recently developed micromachining process for Parylene C, as well as a high-level overview of state-of-the-art Parylene hybrid and free film devices for biomedical MEMS (bioMEMS) applications, including a discussion on its challenges and potential as a MEMS material. Copyright © 2015 John Wiley & Sons, Ltd.