The effect of additives on low temperature preparation for barium ferrite thin films and their magnetic properties have been investigated. Bi2O3 and PbO which have low melting point were selected for additives. Barium ferrite thin films were deposited on fused quartz substrate by r.f. diode magnetron sputtering method. In order to control the composition in the deposited barium ferrite films, several sintered BaFe2O4 chips, Bi2O3 chips and PbO chips were placed on the barium ferrite target with Fe/Ba ratio of 10. The film thickness was about 2000Å. As-deposited films were post-annealed at the temperatures between 500°C and 700°C for 5 hours in air.Both Bi added barium ferrite films with Bi/Ba ratio between 2.0 and 2.3 and Pb added barium ferrite films with Pb/ Ba ratio of 3.2 or above were well crystallized by the post-annealing at 550°C for 5 hours in air. Especially, Pb added barium ferrite films with Pb/Ba ratio of 0.55 showed excellent magnetic properties, and its grains were small and uniform.