Monazite is one of the most important dating accessory minerals for deciphering geological processes. The growth history of monazite can be identified by its internal structure; thus, high-resolution imaging is necessary for in situ U-Th-Pb dating. In this study, cathodoluminescence (CL) techniques were optimized via the key parameters of working distance, accelerating voltage, and beam current and were then applied to monazites from igneous and metamorphic rocks. The CL images of igneous monazites show concentric oscillatory zoning, whereas those of metamorphic monazites clearly show homogeneous, patchy, or core-rim structures. CL imaging is a more effective approach than back-scattered electron (BSE) imaging for the observation of the internal structure of monazite and may yield additional information. CL can add to the interpretation of X-ray maps and the two techniques that may complement each other. The CL spectra of monazite consist of broad peaks and sets of narrow emission rare earth element 3+ (REE3+) peaks (Gd3+, Tb3+, Dy3+, and Sm3+). The microstructures observed via CL imaging techniques can show a certain relationship between light REE (LREE) and U, Th, and Si in some igneous monazites and heavy REE (HREE) variation in some metamorphic monazites.