Fabrication processes of porous Ga oxide have attracted attention due to its useful semiconductor properties of Ga oxide that allow completely decomposing water. The porous Ga oxide is expected to be applied to various energy conversion devices, such as hydrogen generation devices. The performance of the devices highly depends on their geometrical structures in addition to their semiconductor properties. Therefore, to improve the device performance, geometrical control of the porous Ga oxide is important. One of the fabrication processes of the porous Ga oxide is an anodization process. An advantageous point of the anodization process is the good controllability of the geometrical structures of the nanohole array. Until now, our group has reported the fabrication process of porous Ga oxide having an ideally ordered nanohole array structure by the anodization process utilizing a pretextureing process [1]. This pretexturing process had been originally proposed to fabricate an ideally ordered anodic porous alumina [2]. Prior to the anodization, an ideally ordered array of nanometer-sized concaves was formed onto the surface of Ga metal by the pretexturing process. During the anodization of the textured sample, the nanoholes preferentially grew from each concave, then, an ideally ordered nanohole array was obtained. However, the formation of straight nanoholes having a high aspect ratio was difficult although various anodizing conditions were considered. In the present research, the formation of a porous Ga oxide having a high aspect ratio was studied [3]. It was observed that the growth direction of nanoholes depends on the crystal orientation of Ga metal. The growth direction of the nanohole was almost coincident with the certain crystal axis of Ga metal when the anodizing voltage was low. The present fabrication process is expected to be applied to fabricate various energy conversion devices requiring a geometrically controlled porous Ga oxide, such as hydrogen generation devices.[1] T. Kondo, Y. Kuroda, T. Shichijo, T. Yanagishita, H. Masuda, J. Vac. Sci. Technol. B, 40, 010603 (2022).[2] H. Masuda, T. Yanagishita, T. Kondo: “Fabrication of Anodic Porous Alumina”, Encyclopedia of Interfacial Chemistry 1st Edition, Elsevier (2018).[3] T. Kondo, Sci. Rep., 13, 12408 (2023).
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