Nano-logic magnetic structures are of great interest for spintronic applications. While the methods used for developing arrays of magnetic L10-phase dots are, in most cases, based on deposition followed by annealing at high temperatures, usually around 700 °C, we demonstrate here a technique where a much lower annealing temperature (i.e., 400 °C) is needed in order to promote fully the disorder–order phase transformation and achievement of highly coercive L10-phase dots. In order to develop building blocks based on arrays of L10-phase FePt dots for further spintronic applications, an engraving technique using electron beam lithography is employed. This paper describes the fabrication, as well as the morphological and magnetic characterization, of regularly placed FePt dots of various shapes, as pre-requisites for integration into nano-logic devices. As a proof of concept, regular arrays of FePt circular dots were devised and their structural characterization, using X-ray diffraction (XRD) and transmission electron microscopy (TEM), was performed. It has been shown that annealing at only 400 °C for 30 min proved the occurrence of the tetragonal L10 phase. Moreover, structural characterization showed that the disorder–order phase transformation was complete with only the L10 phase detected in high resolution TEM. The magnetic characterization provided more insight into the potential of such arrays of magnetic devices with convenient values of magnetic coercivity, remanent and saturation magnetization. These findings show good potential for developing regular arrays of uniformly shaped magnetic entities with encouraging magnetic performances in view of various applications.