The thermomechanical damage and residual stresses in plasma-facing materials operating at high heat flux are experimentally investigated. Materials with micro-surfaces are found to be more resilient, when exposed to cyclic high heat flux generated by an arc-jet plasma. An experimental facility, dedicated to High Energy Flux Testing (HEFTY), is developed for testing cyclic heat flux in excess of 10 MW/m2. We show that plastic deformation and subsequent fracture of the surface can be controlled by sample cooling. We demonstrate that W surfaces with micro-pillar type surface architecture have significantly reduced residual thermal stresses after plasma exposure, as compared to those with flat surfaces. X-ray diffraction (XRD) spectra of the W-(110) peak reveal that broadening of the Full Width at Half Maximum (FWHM) for micro-engineered samples is substantially smaller than corresponding flat surfaces. Spectral shifts of XRD signals indicate that residual stresses due to plasma exposure of micro-engineered surfaces build up in the first few cycles of exposure. Subsequent cyclic plasma heat loading is shown to anneal out most of the built-up residual stresses in micro-engineered surfaces. These findings are consistent with relaxation of residual thermal stresses in surfaces with micro-engineered features. The initial residual stress state of highly polished flat W samples is compressive (≈ -1.3 GPa). After exposure to 50 plasma cycles, the surface stress relaxes to −1.0 GPa. Micro-engineered samples exposed to the same thermal cycling show that the initial residual stress state is compressive at (- 250 MPa), and remains largely unchanged after plasma exposure.