As development of micro electro mechanical systems (MEMS) technology, microforming is gaining attention. And, lubricant-free microforming process is a strong demand. Due to the low effect of lubricant in microscale dimensions, the tribological issues in microforming confronts with further severe problems to enhance the performance of microdie surface. So an approach to enhance the tribological performance is applying the micro-textured structure to the surface of microdie with expecting the function of wear debris ejecting effect. Micro-texturing was realized by using stainless steel wire mesh as a masking during the ionized vapored deposition of diamond-like carbon (DLC) coating film. To characterize the basic tribological properties of micro-textured DLC films under dry condition, the ball-on-disk type tribology test was carried out. In view of the confirming wear debris ejecting effect, titanium oxide nanoparticles were intentionally added as artificial wear debris. As results, the micro-textured DLC film showed low coefficient of friction, while the conventional non-textured DLC films showed the significantly large value. Wear track observation after the friction tests revealed that the stable tribological properties of textured DLC films were attributed to the promotion of wear debris ejection, which can prevent the ploughing and adhesion inside the apparent area of contact.