Antireflection Structured Surface Research Articles

Numerical study of feature-distribution effects foranti-reflection structured surfaces on binary gratings.

Suppressing Fresnel reflections from dielectric boundaries using periodic and random antireflection structured surfaces (ARSSs) has been vigorously studied as an alternative to thin film coatings for high-power laser applications. A starting point in the design of ARSS profiles is effective medium theory (EMT), approximating the ARSS layer with a thin film of a specific effective permittivity, which has features with subwavelength transverse-scale dimensions, independent of their relative mutual positions or distributions. Using rigorous coupled-wave analysis, we studied the effects of various pseudo-random deterministic transverse feature distributions of ARSS on diffractive surfaces, analyzing the combined performance of the quarter-wave height nanoscale features, superimposed on a binary 50% duty cycle grating. Various distribution designs were investigated at 633nm wavelength for TE and TM polarization states at normal incidence, comparable to EMT fill fractions for a fused silica substrate in air. The results show differences in performance between ARSS transverse feature distributions, exhibiting better overall performance for subwavelength and near-wavelength scaled unit cell periodicities with short auto-correlation lengths, in comparison to equivalent effective permittivity designs that have less complicated profiles. We conclude that structured layers of quarter-wavelength depth and specific feature distributions can outperform conventional periodic subwavelength gratings as antireflection treatments on diffractive optical components.

Near-infrared transmittance enhancement using fully conformal antireflective structured surfaces on microlenses fabricated by direct laser writing

Structured surfaces composed of subwavelength-sized features offer multifunctional properties including antireflective characteristics that are increasingly important for the development of micro-optical components. Here, three-dimensional (3-D) direct laser writing, via two-photon polymerization, is used to fabricate planoconvex spherical microlenses with antireflective structured surfaces. The surfaces are composed of subwavelength-sized conicoid structures, which are arranged fully conformal to the convex surface of the microlenses. The dimensions of the conicoid structures are optimized to effectively reduce Fresnel reflection loss over a wide band in the near-infrared spectral range from 1.4 to 2.2 μm, with a maximum reduction at 1.55 μm. Infrared reflection and transmission measurements are used, in combination with 3-D finite element calculations, to investigate the performance of the microlenses. The experimental results reveal that in the spectral range from 1.4 to 2.2 μm an effective suppression of the Fresnel reflection loss at the convex surface of spherical microlenses can be achieved. The transmittance enhancement is ranging from 1% to 3% for spherical microlenses with antireflective structured surfaces, in comparison to an uncoated reference.

Laser damage of silica optical windows with random antireflective structured surfaces

High intensity nanosecond laser pulses induce damage on uncoated optics and antireflection (AR) coated optics with thin film boundaries. Structured surfaces with AR performance have shown higher damage resistance than conventional AR coatings. This work explores laser-induced damage threshold (LIDT) of random antireflective surface structures (rARSS), covering interfaces of planar fused silica substrates, using a 7 ± 1 nanosecond duration, single damaging pulse at 1064-nm wavelength. The rARSS treated windows were optimized for AR at 1064 nm, and transmittance of each treated interface was increased by 3.2% per ISO 13697. Incident fluence was controlled near LIDT for both entry and exit sides. Multiple locations were tested for each fluence setting in accordance with ISO 21254 1-on-1 LIDT testing. Double-sided and single-sided rARSS, orientation with both entrance-side and exit-side treatments, were tested to determine effects random structures have in damage induced by field enhancement on the exit side. Results show that rARSS on a single side of an optic have higher resistance to onset of laser damage when located at entry (structured) side. All tests resulting in damage of polished and single-sided rARSS oriented on exit side were ballistic on beam exit facet, showing surface cracks. Results from rARSS located on beam entry side (both single- and double-side treated) showed nonballistic damage and densification of rARSS features from localized melting or reflow, capping the rARSS but still preserving effective-gradient index and rARSS transmission enhancement. This suggests that the localized melting of the rARSS optic surface does not constitute damage optically, or at least not catastrophically within the prebulk damage regime. Therefore, it is possible to foresee the onset of true damage within an optical system via tracking transmission drop, and swap optics out before catastrophic system failure. The drop in transmission acts as an early warning system, making these rARSS optics an invaluable tool in high-energy laser development.

Broadband near-infrared antireflection coatings fabricated by three-dimensional direct laser writing.

Three-dimensional direct laser writing via two-photon polymerization is used to fabricate anti-reflective structured surfaces (ARSSs) composed of subwavelength conicoid features optimized to operate over a wide bandwidth in the near-infrared range from 3700 cm-1 to 6600 cm-1 (2.7-1.52μm). Analytic Bruggemann effective medium calculations are used to predict nominal geometric parameters such as the fill factor of the constitutive conicoid features of the anti-reflective structured surfaces (ARSSs) presented here. The performance of the ARSSs was investigated experimentally using infrared reflection and transmission measurements. An enhancement of the transmittance by 1.35%-2.14% over a broadband spectral range from 3700 cm-1 to 6600 cm-1 (2.7-1.52μm) was achieved. We further report on finite-element-based reflection and transmission data using three-dimensional (3D) model geometries for comparison. A good agreement between experimental results and the finite-element-based numerical analysis is observed once as-fabricated deviations from the nominal conicoid forms are included in the model. 3D direct laser writing is demonstrated here as an efficient method for the fabrication and optimization of ARSSs designed for the infrared spectral range.

Angle-of-incidence performance of random anti-reflection structures on curved surfaces

Random anti-reflection structured surfaces (rARSS) have been reported to improve transmittance of optical-grade fused silica planar substrates to values greater than 99%. These textures are fabricated directly on the substrates using reactive-ion etching techniques, and often result in transmitted spectra with no measurable interference effects (fringes) for a wide range of wavelengths. The inductively coupled reactive-ion plasma (ICP-RIE) used in the fabrication process to etch the rARSS is anisotropic and thus well suited for planar components. The improvement in spectral transmission has been found to be independent of optical incidence angles for values from 0° to ±30°. Qualifying and quantifying the rARSS performance on curved substrates, such as convex lenses, is required to optimize the fabrication of the desired AR effect on optical-power elements. In this work, rARSS was fabricated on fused silica plano-convex lenses using a planar-substrate optimized ICP-RIE process to maximize optical transmission in the range from 500 to 1100nm. Results are presented from optical transmission tests of rARSS lenses for both TE and TM incident polarizations at a wavelength of 633nm and over a 70° full field of view. These results suggest optimization of the fabrication process to account for anisotropy is not required, mainly due to the wide angle-of-incidence AR tolerance performance of the rARSS lenses.

Reversibly Thermoswitchable Two-Dimensional Periodic Gratings Prepared from Tethered Poly(N-isopropylacrylamide) on Silicon Surfaces

In this study we used atom transfer radical polymerization to graft poly(N-isopropylacrylamide) (PNIPAAm) onto flat Si substrates. We then applied very large-scale integration and reactive ion etching sequentially to generate 200-nm-scale hole arrays of tethered PNIPAAm as two-dimensional periodic concave gratings (2DPCGs) on the Si surfaces. The hole array structures of tethered PNIPAAm could be created and erased reversibly at 25 and 40 °C, respectively, leading to significant changes in the effective refractive index (neff). The values of neff of the 2DPCGs were related to the depth of their holes generated after etching for various times, resulting in a color change from blue to red that could be observed by the naked eye at incident angles of 10-20°. Moreover, we used effective-medium theory to calculate the filling factors of air inside the 2DPCGs to verify the structural changes of the tethered PNIPAAm. Such designed 2DPCGs of thermorespective hydrogel films have potential applications in temperature-responsive optical devices [e.g., as antireflection structured surfaces (ARSs)] that operate at both visible and near-infrared wavelengths.

Optical characteristics of gold film on the moth-eye structure

The development of coating optics to lower the reflected light and thereby to increase the optical efficiency of an optical system has been a critical issue over hundreds of years. Multilayered alternation of high and low refractive index layers often leads to an expensive coating process. Lately, the use of anti-reflection structured surface, which is sometimes called “moth-eye structure”, has been proposed as an applicable option. In this study, the experimental results of the reflectance and transmittance of four gold films of four different thicknesses deposited on the moth-eye structure were carried out. The moth-eye structure arrays consisted of periodic length of about 300 nm, with the diameter of about 250 nm and the height of 150 nm. Compared with the gold coating film on the flat PET substrate, the optical property of the gold film coated on the moth-eye structure showed a better result for the anti-reflection application. In addition, the transmittance of the gold film on the moth-eye structure is more uniform than that of silver film in the visible range. The 25 nm-thick gold silm on the moth-eye structure is suggested to be applied to the car window glass of antireflective films to obtain the high performance of heat insulation with acceptable transparency in the visible range.

Optical Properties of Antireflective Subwavelength Structures on 4H-SiC for UV Photodetectors

For the purpose of the improving the efficiency of the 4H-SiC photodiode, we reported the spectral reflectance of the antireflection structure of the 140nm period like Moth Eye structure on the 4H-SiC pn epi-wafer. Measured reflectivity of the antireflection structured surface is below 2% at 310nm. The peak responsivity of SWS photodiode is 170mA/W (QE=75%) at 280nm. The response cut-off wavelength is 380nm. Sensitivity of the sensor with SWS structure has increased by compared with that without SWS structure over 260nm of wavelength. At 310 nm, the sensitivity of the photodiode with SWS has increased by 1.3 times than that without SWS. Total amount of short circuit currents was 22% of increase.

Antireflective Subwavelength Structures on 4H-SiC for UV Photodetectors

We report for fabricating moth-eye antireflection gratings on silicon carbide substrates using a silica mask inverted from hydrogen silsesquioxane (HSQ) technique. We demonstrate optical properties of subwavelength structure on 4H-SiC. The micro-cone array is fabricated by an ECR-reactive ion etching using Cl2-O2 plasma. A nano-pillar array of silica, formed by an electron-beam lithography using HSQ negative-tone resist and annealing process, is used as the etching mask. The fabricated cone array has a period of 140nm and a height of 177nm. Measured reflectivity of the antireflection structured surface is below 2% at 330nm and 10% at 500nm for incident angle of 20 degree. The specular reflection is slightly affected by varying the angle of incidence up to 80o of s- and p- polarized light at 350nm.

Fabrication of subwavelength structured surfaces via electrospray deposition of nanobeads

The usability of electrospray deposition (ESD) to form antireflection structured (ARS) surfaces was studied experimentally. Subwavelength structured (SWS) surfaces were produced by depositing nanobeads with diameters of 50 nm onto glass substrates covered with an ITO-Film. The reflectance from the substrates could be decreased about nearly 3% with an onesided ARS surface.

Ray tracing of an aspherical lens with antireflective subwavelength structured surfaces

A method of ray tracing for an aspherical lens with subwavelength periodic structured surfaces has been developed. The ray tracing in the antireflective subwavelength structure is based on the group velocity of the Bloch wave. Transmittance and phase delay for the surface structure are determined with rigorous coupled wave analysis. Calculated wavefront aberration was smaller than 20 mlambda for an aspherical lens with numerical aperture of 0.6. For a lens with a higher numerical aperture, the wavefront aberrations increase drastically.

Optical characteristics of silver film on the moth-eye structure

The development of coating optics to lower the reflected light and thereby to increase the optical efficiency of an optical system has been a very important issue for many years. Conventional solutions to this, such as multilayered alternation of high and low refractive index layers, often lead to an expensive coating process. Recently, the use of antireflection structured (ARS) surface, which is called “moth-eye structure”, has been proposed as an applicable option based on both the theoretical and experimental studies. In the current study, the experimental results of the reflectance and transmittance of two different thicknesses of silver films deposited on the moth-eye structure were carried out. The moth-eye structure arrays were fabricated by holographic exposure and photolithographic processes on the polymer film. The structure arrays were consisted of periodic length of about 300 nm, with the diameter of about 250 nm and the height of 150 nm. Compared with the silver coating film on the flat PET substrate, the optical property of the silver coating film on the moth-eye structure showed a better result for the anti-reflection application. The 25 nm-thick silver film on the moth-eye structure is suggested to be applied for the car window glass of antireflective films to obtain the high performance of heat insulation with acceptable transparency in the visible range.

Diamond micro-optics: microlenses and antireflection structured surfaces for the infrared spectral region

Fabrication and evaluation of a subwavelength grating in diamond, designed to reduce the Fresnel reflection, is demonstrated. The antireflection (AR) structures are designed to reduce the surface reflection at an illuminating wavelength of 10.6 microm. With this AR-treatment, where no other material is introduced (i.e., no thin film coating), the unique properties of diamond can be fully used. The fabricated AR structures were optically evaluated with a spectrophotometer. The transmission through a diamond substrate with AR structures on both sides was increased from 71% to 97%, with a theoretical value of 99%. Microlenses in diamond are also demonstrated. The lenses are evaluated with interferometers and show good performance. The micro-optical structures were fabricated by electron-beam lithography or photolithographic methods followed by plasma etching.

Guided-mode resonant grating filter with an antireflection structured surface.

We describe a new structure of guided-mode resonant grating (GMRG) filters with low sideband reflectance. This GMRG filter consists of a high-index thin film on an antireflective structured surface called "moth-eye structure." Since the high-index film undulates along the surface structure, the film acts as a modulated optical waveguide. An incident light wave satisfying a resonant condition is reflected by the GMRG filter, and nonresonant light waves pass through the filter. This GMRG filter is valid for reducing reflection of nonresonant light waves in a wide spectral range. The resonant reflection of this new filter was investigated by numerical calculation based on an electromagnetic grating analysis. In the case of a triangular antireflective surface structure whose thickness is 2x greater than its period, the sideband reflectance for nonresonant light waves was lower than 0.5% for TM-polarized light in a wide range of wavelengths.

Fabrication of CVD Diamond Optics with Antireflective Surface Structures

Polycrystalline CVD diamond is an excellent material for advanced optical applications, especially in the IR spectral range. However, one drawback of diamond is the significant reflection loss of 29%, caused by its high refraction index n = 2.4. We fabricated subwavelength, “moth-eye” antireflective structured (ARS) surfaces (two-dimensional array of pyramids) by filling with CVD diamond the inverted pyramids etched in a Si substrate, followed by the substrate removal to obtain the patterned diamond replica. An increase in IR transmission up to T = 80% was observed at wavelengths λ > 10 μm for the ARS surfaces compared to T = 71% for flat surfaces even at the non-optimized geometry of the surface relief. A further increase in transmission could be achieved by combining ARS and a single layer AR coating of amorphous carbon.

Antireflection structured surfaces for the infrared spectral region

Antireflection structured (ARS) surfaces on GaAs substrates for application with normally incident, randomly polarized, 10.6-microm-wavelength radiation are designed and analyzed. Both one-dimensional (1-D) and two-dimensional (2-D) multilevel profiles are examined with special attention given to multilevel approximations of 1-D triangular and 2-D pyramidal profiles. The 1-D profiles are designed by using second-order effective medium theory (EMT), as we have found zeroth-order EMT to be insufficient when ARS surfaces are designed for use with optically dense materials, e.g., most materials used in the infrared spectral region. We analyze both 1-D and 2-D profiles by using rigorous coupled-wave analysis and find that the more levels the profile contains, the better the ARS surface's response to bias angles, wavelength detunings, and errors in etch depth. Although both 1-D and 2-D profiles can efficiently suppress reflections for unpolarized light, 2-D gratings are advantageous when randomly polarized light is of interest.