The development of hydrophobic surfaces is an important factor for clean energy production from solar arrays, enabling their operation at the highest possible efficiencies for the longest possible time, without the need for physical intervention. This work reports the development of hydrophobic Y2O3 thin films on a range of transparent glass substrates. The growth of the Y2O3 films from the mono-hydrate yttrium (III) complex of 1,3-diphenyl-1,3-propanedione [Y(dbm)3(H2O)] is studied using the aerosol-assisted chemical vapor deposition (AACVD) technique. The qualitative evaluation of the deposited films and their hydrophobicity is assessed using several materials characterization techniques, such as scanning electron microscopy, grazing incident X-ray diffraction, Fourier-transform infrared, X-Ray photoelectron spectroscopy, in addition to a surface free energy and water contact angle measurements. This work demonstrates experimentally a relationship between the Y2O3 wettability and its physico-chemical characteristics in terms of surface energy, chemical composition, and morphology which is controlled by the type of glass support used. The water contact angle of the hydrophobic Y2O3 coating grown on the F-doped tin oxide glass reached 128°; currently the first deposited on transparent glass. This film exhibits the highest WCA reported up to date without the need for performing post-reaction surface treatment processes. The hydrophobic nature of the transparent Y2O3 films marks a significant leap forward in the field of anti-soiling coatings suitable for photovoltaic technology.