Ferromagnetic spiral inductors were fabricated using thick copper technology. 30% increase in L is shown over the air core value. However, we observe a large restriction in Q when frequency is beyond 1 GHz. This strongly contrasts with the high ferromagnetic resonance (FMR) frequency measured at 6 GHz. Also still increasing the FMR up to 10 GHz using multipatterning do not improve Q. The highlight is on excess losses not originating from magnetic losses (/spl mu/'') and the Joule effect. Additionally, when comparing multiturn inductor to single strip inductor, proximity effect or current crowding is shown responsible.
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