Laser surface structuring has emerged as a versatile technology for precise and localized material processing. When dealing with femtosecond lasers, thermal effects and collateral damage are reduced due to nonlinear light-matter interaction, improving the processing. This study explores the fabrication of microstructures using femtosecond pulses on thin films of chalcogenide glasses, which can be used for photonics applications, such as waveguides, fiber lasers, and photonic crystals. Moreover, the photoinduced changes in chalcogenide glasses have opened up new possibilities in optoelectronics, data storage, and other applications. Femtosecond laser machining of amorphous thin films of As2S3 and As2Se3 using femtosecond laser pulses is investigated through various microscopy techniques and spectroscopy tools, focusing on the impact of incubation effects and controlled photo-oxidation. This research contributes to a deeper understanding of the interaction of ultrafast pulses with chalcogenide glasses, promoting further advancements in photonics and optoelectronic applications.
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