This paper describes a simple strategy for covalent immobilization of the NHS-PEG-RGD peptide with the three different PEG lengths (8, 13, and 22) onto the amine-terminated monolayers with the subsequent investigation of fibroblast cellular response to the three derivatives of pegylated RGD peptides-modified substrates. First, acetamide-terminated monolayers were prepared on the hydride terminated silicon surface to protect NH2-terminated monolayers. This was followed by the removal of the protective groups, and the reaction of NHS-PEG8-RGD, NHS-PEG13-RGD and NHS-PEG22-RGD peptides with the NH2-terminated monolayers while reducing nonspecific protein adsorption. Analysis of X-ray photoelectron spectroscopy (XPS), Fourier Transform Infrared (ATR-FTIR) spectroscopy, and Ellipsometry measurements demonstrated that PEG13-RGD peptide forms relatively a more homogenous, thicker and stable structure compared with those of PEG8-RGD and PEG22-RGD peptide. The quantitative and qualitative assessment of cell adhesion, spreading, and proliferation indicated that relatively further elongated fibroblast cells attached on the PEG13-RGD peptide relative to those on the PEG8-RGD and PEG22-RGD peptide. The results presented here may offer a developed strategy based on the length of the spacer to regulate cellular behavior on the surface substrates.