Aluminum Nitride Microring Research Articles

Critical Coupling Condition and Preparation Technology of Aluminum Nitride Microring Resonator

Critical Coupling Condition and Preparation Technology of Aluminum Nitride Microring Resonator

Widely separated optical Kerr parametric oscillation in AlN microrings.

Here, we report $ {\chi ^{(3)}} $χ(3)-based optical parametric oscillation (OPO) with widely separated signal-idler frequencies from crystalline aluminum nitride microrings pumped at $ 2\,\,\unicode{x00B5}{\rm m} $2µm. By tailoring the width of the microring, OPO reaching toward the telecom and mid-infrared bands with a frequency separation of 64.2 THz is achieved. While dispersion engineering through changing the microring width is capable of shifting the OPO sideband by $ \gt {9}\;{\rm THz}$>9THz, the OPO frequency can also be agilely tuned in the ranges of 1 and 0.1 THz, respectively, by shifting the pump wavelength and controlling the chip's temperature. At high pump powers, the OPO sidebands further evolve into localized frequency comb lines. Such large-frequency-shift OPO with flexible wavelength tunability will lead to enhanced chip-scale light sources.

Stokes and anti-Stokes Raman scatterings from frequency comb lines in poly-crystalline aluminum nitride microring resonators.

In optical microresonators, stimulated Raman scattering (SRS) competes with four-wave mixing process and impact Kerr comb generation. Here, we demonstrate Raman frequency combs in poly-crystalline aluminum nitride (AlN) microring resonators. The Raman shifts at transverse-electric (TE) and transverse-magnetic (TM) polarizations are characterized from AlN straight waveguides using backscattering geometries. In poly-crystalline AlN microring resonators, the frequency matching of cavity resonances with broad Raman gain enhances the SRS and leads to Raman-assisted frequency combs. As a result, comb lines near Raman scattering regions of AlN are generated.

Ultra-high-Q UV microring resonators based on a single-crystalline AlN platform

Development of low-loss photonic components in the ultraviolet (UV) band will open new prospects for classical and quantum optics. Compared with other integrated platforms, aluminum nitride (AlN) is particularly attractive as it features an enormous bandgap of ~6.2 eV and intrinsic chi(2) and chi(3) susceptibilities. In this work, we demonstrate a record quality factor of 2.1 x 105 (optical loss ~ 8 dB/cm) at 390 nm based on single-crystalline AlN microrings. The low-loss AlN UV waveguide represents a significant milestone toward UV photonic integrated circuits as it features full compatibility for future incorporation of AlGaN-based UV emitters and receivers. On-chip UV spectroscopy, nonlinear optics and quantum information processing can also be envisioned.

High-fidelity cavity soliton generation in crystalline AlN micro-ring resonators.

Chip-scale mode-locked dissipative Kerr solitons have been realized on various materials platforms, making it possible to achieve a miniature, highly coherent frequency comb source with high repetition rates. Aluminum nitride (AlN), an appealing nonlinear optical material having both Kerr (χ3), and Pockels (χ2) effects, has immerse potential for comb self-referencing without the need for external harmonic generators. However, cavity soliton states have not yet been achieved in AlN microresonators. Here, we demonstrate mode-locked Kerr cavity soliton generation in a crystalline AlN microring resonator. By utilizing ultrafast tuning of the pump frequency through single-sideband modulation, in combination with an optimized wavelength scan and pump power-ramp patterns, we can deterministically elongate a ∼400 ns short-lived soliton to a time span as long as we wish to hold it.

Control of second-harmonic generation in doubly resonant aluminum nitride microrings to address a rubidium two-photon clock transition.

Nonlinear optical effects have been studied extensively in microresonators as more photonics applications transitions to integrated on-chip platforms. Due to low optical losses and small mode volumes, microresonators are demonstrably the state-of-the-art platform for second-harmonic generation (SHG). However, the working bandwidth of such microresonator-based devices is relatively small, presenting a challenge for applications where a specifically targeted wavelength needs to be addressed. In this Letter, we analyze the phase-matching window and resonance wavelength with respect to varying microring widths, radii, and temperatures. A chip with precise design parameters was fabricated with phase matching realized at the exact wavelength of a two-photon transition of Rb85. This procedure can be generalized to any target pump wavelength in the telecom band with picometer precision.

Parametric down-conversion photon-pair source on a nanophotonic chip

Quantum-photonic chips, which integrate quantum light sources alongside active and passive optical elements, as well as single-photon detectors, show great potential for photonic quantum information processing and quantum technology. Mature semiconductor nanofabrication processes allow for scaling such photonic integrated circuits to on-chip networks of increasing complexity. Second-order nonlinear materials are the method of choice for generating photonic quantum states in the overwhelming majority of linear optic experiments using bulk components, but integration with waveguide circuitry on a nanophotonic chip proved to be challenging. Here, we demonstrate such an on-chip parametric down-conversion source of photon pairs based on second-order nonlinearity in an aluminum-nitride microring resonator. We show the potential of our source for quantum information processing by measuring the high visibility anti-bunching of heralded single photons with nearly ideal state purity. Our down-conversion source yields measured coincidence rates of 80 Hz, which implies MHz generation rates of correlated photon pairs. Low noise performance is demonstrated by measuring high coincidence-to-accidental ratios. The generated photon pairs are spectrally far separated from the pump field, providing great potential for realizing sufficient on-chip filtering and monolithic integration of quantum light sources, waveguide circuits and single-photon detectors.

Second-harmonic generation in aluminum nitride microrings with 2500%/W conversion efficiency

Photonic integrated circuits hold promise as miniaturized and scalable platforms for classical and quantum photonic information processing. Second-order nonlinearity (χ(2)) is the basis of many important applications such as second-harmonic generation, spontaneous parametric down-conversion, and optical parametric oscillation. Here, we present systematical investigation and optimization of the second-harmonic generation in a dual-resonant aluminum nitride microring resonator. By optimizing the quality factor, independently engineering the coupling conditions for dual-band operation, and perfectly fulfilling phase-match conditions through thermal tuning, we demonstrate a second-harmonic generation efficiency of 2500% W−1 in the low-pump-power regime. To the best of our knowledge, this is a state-of-the-art value among all the integrated photonic platforms. We also study the high-power regime where the pump power depletion is non-negligible. A conversion efficiency of 12% is realized with 27 mW pump power. Our high-efficiency second-harmonic generator enables integrated frequency conversion and frequency locking between visible and infrared systems, and our approach can also apply to other photonic platforms.

Phase-dependent interference between frequency doubled comb lines in a χ(2) phase-matched aluminum nitride microring.

Nonlinear optical conversion with frequency combs is important for self-referencing and for generating shorter wavelength combs. Here we demonstrate efficient frequency comb doubling through the combination of second-harmonic generation (SHG) and sum-frequency generation (SFG) of an input comb with a high Q, phase-matched χ(2) microring resonator. Phase coherence of the SHG and SFG nonlinear conversion processes is confirmed by sinusoidal phase-dependent interference between frequency doubled comb lines.

Broadband tunable microwave photonic phase shifter with low RF power variation in a high-Q AlN microring.

An all-optically tunable microwave photonic phase shifter is demonstrated based on an epitaxial aluminum nitride (AlN) microring with an intrinsic quality factor of 3.2×106. The microring adopts a pedestal structure, which allows overcoupling with 700 nm gap size and facilitates the fabrication process. A phase shift for broadband signals from 4 to 25 GHz is demonstrated by employing the thermo-optic effect and the separate carrier tuning technique. A phase tuning range of 0°-332° is recorded with a 3 dB radio frequency (RF) power variation and 48 mW optical power consumption. In addition, AlN exhibits intrinsic second-order optical nonlinearity. Thus, our work presents a novel platform with a low propagation loss and the capability of electro-optic modulation for applications in integrated microwave photonics.

Aluminum nitride as nonlinear optical material for on-chip frequency comb generation and frequency conversion

Abstract A number of dielectric materials have been employed for on-chip frequency comb generation. Silicon based dielectrics such as silicon dioxide (SiO2) and silicon nitride (SiN) are particularly attractive comb materials due to their low optical loss and maturity in nanofabrication. They offer third-order Kerr nonlinearity (χ(3)), but little second-order Pockels (χ(2)) effect. Materials possessing both strong χ(2) and χ(3) are desired to enable selfreferenced frequency combs and active control of comb generation. In this review, we introduce another CMOS-compatible comb material, aluminum nitride (AlN),which offers both second and third order nonlinearities. A review of the advantages of AlN as linear and nonlinear optical material will be provided, and fabrication techniques of low loss AlN waveguides from the visible to infrared (IR) region will be discussed.We will then show the frequency comb generation including IR, red, and green combs in high-Q AlN micro-rings from single CW IR laser input via combination of Kerr and Pockels nonlinearity. Finally, the fast speed on-off switching of frequency comb using the Pockels effect of AlN will be shown,which further enriches the applications of the frequency comb.

In-resonator variation of waveguide cross-sections for dispersion control of aluminum nitride micro-rings.

We propose and demonstrate a dispersion control technique by combination of different waveguide cross sections in an aluminum nitride micro-ring resonator. Narrow and wide waveguides with normal and anomalous dispersion, respectively, are linked with tapering waveguides and enclosed in a ring resonator to produce a total dispersion near zero. The mode-coupling in multimoded waveguides is also effectively suppressed. This technique provides new degrees of freedom and enhanced flexibility in engineering the dispersion of microcomb resonators.

Green, red, and IR frequency comb line generation from single IR pump in AlN microring resonator

On-chip frequency comb generations enable compact broadband sources for spectroscopic sensing and precision spectroscopy. Recent microcomb studies focus on the infrared spectral regime and have difficulty accessing the visible regime. We demonstrate comb-like visible frequency line generation through second-harmonic, third-harmonic, and sum-frequency conversion of a Kerr comb within a high-Q aluminum nitride (AlN) microring resonator pumped by a single telecom laser. The strong power enhancement, in conjunction with the unique combination of Pockels (χ2) and Kerr (χ3) optical nonlinearity of AlN, leads to cascaded frequency conversions in the visible spectrum. High-resolution spectroscopic study of the visible frequency lines indicates matched free spectrum range over all the bands. This frequency doubling and tripling effect in a single microcomb structure offers great potential for comb spectroscopy and self-referencing comb.

Electrical tuning and switching of an optical frequency comb generated in aluminum nitride microring resonators

Aluminum nitride (AlN) has been shown to possess both strong Kerr nonlinearity and electro-optic Pockels effect. By combining these two effects, here we demonstrate on-chip reversible on/off switching of the optical frequency comb generated by an AlN microring resonator. We optimize the design of gating electrodes and the underneath resonator structure to effectively apply an electric field without increasing the optical loss. The switching of the comb is monitored by measuring one of the frequency comb peaks while varying the electric field. The controlled comb electro-optic response is investigated for direct comparison with the transient thermal effect.

Optical frequency comb generation from aluminum nitride microring resonator

Aluminum nitride (AlN) is an appealing nonlinear optical material for on-chip wavelength conversion. Here we report optical frequency comb generation from high-quality-factor AlN microring resonators integrated on silicon substrates. By engineering the waveguide structure to achieve near-zero dispersion at telecommunication wavelengths and optimizing the phase matching for four-wave mixing, frequency combs are generated with a single-wavelength continuous-wave pump laser. Further, the Kerr coefficient (n₂) of AlN is extracted from our experimental results.