Glow discharge polymerizations of allyltrimethylsilane (ATMS) and trimethylvinyloxysilane (TMVOS) were investigated by elemental analysis and infrared spectroscopy. The formed polymers were far different in elemental composition from the starting materials, and possessed high carbon and hydrogen contents. There was less difference in an infrared-spectral sense between the two polymers from ATMS and TMVOS. A polymer-forming process in a discharge state is discussed.