We report a simple method for fabricating ZnO gas sensors via a sonochemical route and their gas sensing properties. Vertically aligned ZnO nanorod arrays as a sensing material were synthesized on a Pt-electrode patterned alumina substrate under ambient conditions. The advantage of the proposed method is a high speed of processing. The gas sensor based on ZnO nanorod arrays with large specific surface area showed a high response to and a detection limit of 70 ppm at . Also, their response and recovery time were relatively short and a complete regeneration was observed. A mechanism for sensing gas on the surface of ZnO nanorods is proposed.
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