Synthesis of NF3 using NH4F/nHF and F2 with ClF3, NF2Cl, and NFCl2 intermediates was conducted by sequential reaction testing for more than 100 h. Results demonstrated that NF3 can be synthesized with yield of more than 90% - fluorine molecule base. The ClF3 produced as a by-product can be recycled for reaction with NH4F/nHF. Improving the yield necessitates ClF3 recovery rate improvement, but characteristics of using ClF + F2 = ClF3 as an equilibrium reaction can be overcome with a two-step reaction. NH4F/nHF can be recycled continuously by controlling the n value in NH4F/nHF through NH3 addition and HF extraction. Using ClF3 as a mediator and NH3 and F2 as raw materials, NF3 synthesis was achieved at atmospheric pressure.
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