Acoustic Wave Sensor Research Articles

A Surface Acoustic Wave-Based PM 1.0 Fine Dust Detection System Using Full Digital Time-Interleaved Counters.

This paper proposed a fine dust detection system using time-interleaved counters in which surface acoustic wave (SAW) sensors changed the resonance point characteristic. When fine dust was applied to the SAW sensor, the resonance point decreased. The SAW oscillator made of the SAW sensor and radio frequency (RF) amplifier generated an oscillation frequency that was the same as the resonance frequency. The oscillation frequency was transferred to digital data by a 20-bit asynchronous counter. This system has two channels: a sensing channel and a reference channel. Each channel has a SAW oscillator and a 20-bit asynchronous counter. The difference of the two channel counter results is the frequency difference. Through this, it is possible to know whether fine dust adheres to the SAW sensor. The proposed circuit achieved 0.95 ppm frequency resolution when it was operated at a frequency of 460 MHz. This circuit was implemented in a TSMC 130 nm CMOS process.

Acoustic Effects of Uneven Polymeric Layers on Tunable SAW Oscillators

Surface acoustic wave (SAW) sensors in tunable oscillator configuration, with a deposited polymeric layer, were used to investigate the layer’s impact on the oscillator’s resonant frequency. The SAW oscillators were tuned by means of variable loop amplification. Full-range amplification variation led to a resonant frequency increase of ~1.7 MHz due to the layer’s nonlinear reaction. The layer’s morphology and location resulted in a specific resonant frequency–amplitude dependence. Five types of layers were used to test the causal linkage between the layers’ morphological parameters or positioning and the SAW oscillator’s resonant frequency. The frequency variation trend is almost linear, with a complex minute variation. Small amplitude sigmoids occur at certain attenuation values, due to layer acoustic resonances. Multiple sigmoids were linked with layer resonances of different orders. A good correlation between the layer’s thickness and resonance position was found.

Study on the attributes of transverse surface waves in a layered piezoelectric semi-space with surface elasticity theory and extended stroh formalism

Previous works on surface acoustic wave sensors have shown great limitations in selecting piezoelectric materials and the wave propagation direction. To eliminate such limitations in the technological revolution of SAW sensors, the current paper's main purpose is to explore how wave propagation orientation affects the performance of SAW macro- and nano-sensors. Based on Extended Stroh formalism, the theoretical forms are derived and exploited to present the wavenumber of transverse waves in an arbitrary direction of the piezoelectric medium. Furthermore, we consider surface elasticity theory to acquire the phase velocity equation on the basis of the expression of the wavenumber. More intuitively, a physical model is set up to obtain the horizontal shear stiffness of the surface and bulk layers. Then, the numerical case is carried out to determine the relationship between phase velocity and wave propagation orientation. By comparing the numerical study and the physical model, it can be found that the empirical formula of shear stiffness for bulk and surface layers offers a helpful route to precisely predict the mechanical attributes of SAW macro- and nano-sensors, respectively. The summaries of the current theoretical work benefit the manufacturing of surface acoustic wave sensors with improved performance.

Synthesis and characterization of nitrogen-doped-MWCNT@cobalt oxide for nerve agent simulant detection

Organophosphorus nerve agents are toxic compounds that disrupt neuromuscular transmission by inhibiting the neurotransmitter enzyme, acetylcholinesterase, leading to rapid death. A hybrid composite was synthesized using a hydrothermal process for the early detection of dimethyl methyl phosphonate (DMMP), a simulant of the G-series nerve agent, sarin. Quartz crystal microbalance (QCM) and surface acoustic wave (SAW) sensors were used as detectors. Nitrogen-doped multiwalled carbon nanotubes (N-MWCNTs), cobalt oxide (Co3O4), and N-MWCNT@Co3O4 were compared to detect DMMP concentrations of 25–150 ppm. At 25 ppm, the differential frequencies (Δf) of the N-MWCNT, Co3O4, and N-MWCNT@Co3O4 sensors were 5.8, 2.3, and 99.5 Hz, respectively. The selectivity results revealed a preference for the DMMP rather than potential interference. The coefficients of determination (R2) of the N-MWCNT, Co3O4, and N-MWCNT@Co3O4 sensors for detecting 25–150 ppm DMMP were 0.983, 0.986, and 0.999, respectively. The response times of the N-MWCNT, Co3O4, and N-MWCNT@Co3O4 sensors for detecting 100 ppm DMMP were 25, 27, and 34 s, respectively, while the corresponding recovery times were 85, 105, and 181 s. The repeatability results revealed the reversible adsorption and desorption phenomena for the fixed DMMP concentration of 100 ppm. These unique findings show that synthesized materials can be used to detect organophosphorus nerve agents.

Thermal Annealing Impact on the Sensitivity of Piezomagnetic Surface Acoustic Waveguide to Applied Magnetic Field

AbstractMagnetostrictive thin films, exhibit significant utility as functionalization materials for Surface acoustic wave sensors designed for magnetic field measurements. This research investigates the influence of annealing under vacuum and magnetic field at various temperatures on the magnetic properties of the FeCo/TbCo2 thin film and therefore on the sensitivity of shear and Rayleigh acoustic waveguides functionalized with these magnetic layers. The observed effects include a reduction in magnetic anisotropy field and an increase in magnetostriction. XPS and TEM coupled with EDS microanalysis provide insights into the variations in the properties of the nanostructured magnetic film. To safeguard the magnetic film, a thin layer of SiO2 is deposited on top, serving as a protective shield. The inclusion of this layer amplifies sensitivity to applied magnetic fields for modes with shear polarization while reducing sensitivity for Rayleigh mode. In ST‐cut Quartz, the shear waves become waveguided upon the incorporation of magnetic thin films, with further enhancement achieved by introducing a SiO2 layer. Rayleigh waves are evanescent modes, the penetration depth is in the order of wavelength, and the addition of SiO2 decrease the wave confinement and therefore the sensitivity. The findings are supported by a theoretical model and experimentally validated results.

The development of sensitive graphene-based surface acoustic wave sensors for NO2 detection at room temperature

Bilayer graphene (Bl-Gr) and sulphur-doped graphene (S-Gr) have been integrated with LiTaO3 surface acustic wave (SAW) sensors to enhance the performance of NO2 detection at room temperature. The sensitivity of the Bl-Gr SAW sensors toward NO2, measured at room temperature, was 0.29º/ppm, with a limit of detection of 0.068 ppm. The S-Gr SAW sensors showed 0.19º/ppm sensitivity and a limit of detection of 0.140 ppm. The origin of these high sensitivities was attributed to the mass loading and elastic effects of the graphene-based sensing materials, with surface changes caused by the absorption of the NO2 molecules on the sensing films. Although there are no significant differences regarding the sensitivity and detection limit of the two types of sensors, the measurements in the presence of interferent gases and various humidity conditions outlined much better selectivity and sensing performances towards NO2 gas for the Bl-Gr SAW sensors.Graphical

Digital twin of surface acoustic wave transceivers for a computational design of an optimal wave guiding layer thickness

AbstractDetection of biomarkers is exploited in lab-on-a-chip devices by means of Love type Surface Acoustic Waves (SAW). Finger type arrangement of electrodes, used for InterDigital-Transducers (IDT), perform well to create and detect SAW by using electro-mechanical coupling. Efficiency of such a transceiver depends on design parameters such as chosen material orientation, thickness, placement of electrodes. An optimized design reduces production costs, hence, we need a digital twin of the device with multiphysics simulations that compute deformation and electric field. In this study, we develop a framework with the open-source package called FEniCS for modal and transient analyses of IDTs by using the Finite Element Method (FEM). Specifically, we discuss all possible sensor design parameters and propose a computational design guideline that determines the “best” thickness parameter by maximizing mass sensitivity, thus, efficiency for a Love surface acoustic wave sensor.

A review of surface acoustic wave sensors: mechanisms, stability and future prospects

Purpose Surface acoustic wave (SAW) sensors have attracted great attention worldwide for a variety of applications in measuring physical, chemical and biological parameters. However, stability has been one of the key issues which have limited their effective commercial applications. To fully understand this challenge of operation stability, this paper aims to systematically review mechanisms, stability issues and future challenges of SAW sensors for various applications. Design/methodology/approach This review paper starts with different types of SAWs, advantages and disadvantages of different types of SAW sensors and then the stability issues of SAW sensors. Subsequently, recent efforts made by researchers for improving working stability of SAW sensors are reviewed. Finally, it discusses the existing challenges and future prospects of SAW sensors in the rapidly growing Internet of Things-enabled application market. Findings A large number of scientific articles related to SAW technologies were found, and a number of opportunities for future researchers were identified. Over the past 20 years, SAW-related research has gained a growing interest of researchers. SAW sensors have attracted more and more researchers worldwide over the years, but the research topics of SAW sensor stability only own an extremely poor percentage in the total researc topics of SAWs or SAW sensors. Originality/value Although SAW sensors have been attracting researchers worldwide for decades, researchers mainly focused on the new materials and design strategies for SAW sensors to achieve good sensitivity and selectivity, and little work can be found on the stability issues of SAW sensors, which are so important for SAW sensor industries and one of the key factors to be mature products. Therefore, this paper systematically reviewed the SAW sensors from their fundamental mechanisms to stability issues and indicated their future challenges for various applications.

Indium-Doped SnO2 Based Surface Acoustic Wave Gas Sensor with Ba0.6Sr0.4TiO3 Film

SnO2-based gas sensors have been widely synthesized and used for the detection of various hazardous gases. However, the use of doped SnO2 in sensing applications has recently attracted increased interest due to the formation of a synergistic effect between the dopant and the host. Moreover, in the case of a surface acoustic wave (SAW) sensor, the piezoelectric material used in the fabrication of the sensor plays a crucial role in defining the response of the SAW sensor. As a ferroelectric material, barium strontium titanate (Ba0.6Sr0.4TiO3) has recently been studied due to its intriguing dielectric and electromechanical properties. Its high acoustic velocity and coupling coefficient make it a promising candidate for the development of acoustic devices; however, its use as a piezoelectric material in SAW sensors is still in its infancy. In this paper, we present the design, fabrication and validation of an indium doped SnO2-based SAW gas sensor on Ba0.6Sr0.4TiO3 thin film for room temperature (RT) applications. Pulsed laser deposition was used to deposit thin films of Ba0.6Sr0.4TiO3 and indium-doped SnO2. Different characterization techniques were employed to analyze the morphology and crystallization of the films. The performance of the fabricated sensor was validated by exposing it to different concentrations of ethanol and then analyzing the recorded frequency shift. The sensor exhibited fast response (39 s) and recovery (50 s) times with a sensitivity of 9.9 MHz/Δ. Moreover, the sensor had good linear response and reproducibility. The fabricated indium-doped SnO2-based SAW gas sensor could be suitable for practical room temperature applications.

Modeling and testing of a highly sensitive surface acoustic wave pressure sensor for liquid depth measurements

The fluid depth/level measurement application extends from industry to domestic contexts. This article explores the underutilized potential of Surface Acoustic Wave (SAW) sensor-based devices for liquid depth and pressure measurements. Experiments conducted at room temperature address design challenges using a quartz Y34° cut single-port resonator. Theoretically predicted longitudinal strain sensitivity of −1.15 kHz/μStrain (−1.32 ppm/μStrain) was reduced to −421 Hz/μStrain (-0.48 ppm/μStrain) due to adhesive layer thickness. Numerical simulations investigate the effect of adhesive thickness on strain transfer from a cantilever to the Surface Acoustic Wave (SAW) sensor's top surface. The sensor is tested on a cantilever and integrated into a 20 μm thick diaphragm-based depth gauge, achieving a depth sensitivity of 42 Hz/mm (0.048 ppm/mm). This sensitivity results from bending of the SAW sensor under hydrostatic pressure, causing compression at the top SAW surface, which was an interesting observation. Additional numerical investigations confirm this behavior, aligning well with experimental findings. The article summarizes the comprehensive study of the SAW resonator’s performance and effect of adhesive thickness and provides a guide for designing thin diaphragm-based SAW pressure and depth sensors. It also identifies the device’s high sensitivity compared to other sensors in the literature and outlines potential avenues for future research.

Hydrogen-Bond Acidic Materials in Acoustic Wave Sensors for Nerve Chemical Warfare Agents' Detection.

The latest trends in the field of the on-site detection of chemical warfare agents (CWAs) involve increasing the availability of point detectors to enhance the operational awareness of commanders and soldiers. Among the intensively developed concepts aimed at meeting these requirements, wearable detectors, gas analyzers as equipment for micro- and mini-class unmanned aerial vehicles (UAVs), and distributed sensor networks can be mentioned. One of the analytical techniques well suited for use in this field is surface acoustic wave sensors, which can be utilized to construct lightweight, inexpensive, and undemanding gas analyzers for detecting CWAs. This review focuses on the intensively researched and developed variant of this technique, utilizing absorptive sensor layers dedicated for nerve CWAs' detection. The paper describes the mechanism of the specific interaction occurring between the target analyte and the sensing layer, which serves as the foundation for their selective detection. The main section of this paper includes a chronological review of individual achievements in the field, largely based on the peer-reviewed scientific literature dating back to the mid-1980s to the present day. The final section presents conclusions regarding the prospects for the development of this analytical technique in the targeted application.

A Dual-Mode Surface Acoustic Wave Delay Line for the Detection of Ice on 64°-Rotated Y-Cut Lithium Niobate.

Ice accumulation on infrastructure poses severe safety risks and economic losses, necessitating effective detection and monitoring solutions. This study introduces a novel approach employing surface acoustic wave (SAW) sensors, known for their small size, wireless operation, energy self-sufficiency, and retrofit capability. Utilizing a SAW dual-mode delay line device on a 64°-rotated Y-cut lithium niobate substrate, we demonstrate a solution for combined ice detection and temperature measurement. In addition to the shear-horizontal polarized leaky SAW, our findings reveal an electrically excitable Rayleigh-type wave in the X+90° direction on the same cut. Experimental results in a temperature chamber confirm capability for reliable differentiation between liquid water and ice loading and simultaneous temperature measurements. This research presents a promising advancement in addressing safety concerns and economic losses associated with ice accretion.

The Influence of SnO2 and Noble Metals on the Properties of TiO2 for Environmental Sustainability

In order to find solutions to current worldwide environmental problems, it is crucial to develop sustainable nanomaterials, ideally with multifunctional properties. Considering this, novel TiO2-SnO2@NMs (noble metals: Au and Ag) composites, for use as sustainable nanomaterials, were successfully prepared via a two-step synthesis process consisting of laser pyrolysis followed by the chemical impregnation of the collected materials with noble metals. The addition of SnO2 favors the transformation of TiO2 from a mixture with a majority Anatase phase to one with a Rutile phase majority. With consideration for their level of environmental toxicity, the features of the synthesized nanomaterials were structurally, morphologically, and optically described and assessed for environmental protection applications as gas sensors and photocatalysts. In the case of the Surface Acoustic Wave sensor, based on a pure TiO2 nanopowder, a notable difference in the frequency shift was detected in comparison to the other examined sensors. All sensors responded to the CH4 concentrations tested (0.02–0.1%). On the other hand, when methyl orange was photodegraded under visible light, the results obtained using NMs for decoration revealed that the photocatalytic activity of TiO2-SnO2@NMs was significantly improved compared to the TiO2-SnO2 binary composite, which already has an enhanced photocatalytic activity, compared to pure TiO2. Overall, this work produces nanoparticles that exhibit better sensory and photocatalytic features, as well as higher levels of biocompatibility with skin cells, for use as eco-friendly nanomaterials for a sustainable future.

On propagation behavior of shear wave in piezoelectric-sandwiched structure

This paper delves into the analysis of shear wave propagation with a sandwiched structure comprising a piezoelectric layer and an elastic layer, with a transversely isotropic layer in between. The frequency equation has been derived following Biot’s theory. The dimensionless phase velocities numerical values are computed and visually depicted to demonstrate their dependencies on anisotropy, piezoelectricity, initial stress and porosity in a comparative manner. The explicit demonstration of the relationship between each parameter and the geometry has been presented. The observation shows that as porosity in the medium increases, the phase velocity also increases. Furthermore, the existence of medium anisotropy results in a decrease in the phase velocity of shear waves. Moreover, a correlation is observed where higher tensile initial stress within the medium leads to a corresponding reduction in the phase velocity of shear waves. We conclude that considered parameters (viz. piezoelectricity, anisotropy, porosity, initial stress and thickness of layers) affect the velocity profile of the shear waves significantly. This study holds practical significance in the development of innovative-layered composites, surface acoustic wave (SAW) devices and sensors utilizing intelligent piezoelectric devices for engineering purposes.

Terahertz plasmonic resonances in coplanar graphene nanoribbon structures

We analyze plasmonic oscillations in the coplanar graphene nanoribbon (GNR) structures induced by the applied terahertz (THz) signals and calculate the GNR impedance. The plasmonic oscillations in the GNR structures are associated with the electron and hole inductances and the lateral inter-GNR capacitance. A relatively low inter-GNR capacitance enables the resonant excitation of the THz plasmonic oscillations in the GNR structures with long GNRs. The GNR structures under consideration can be used in different THz devices as the resonant structures incorporated in THz detectors, THz sources using resonant-tunneling diodes, photomixers, and surface acoustic wave sensors.

Simultaneous Detection of Exosomal microRNAs Isolated from Cancer Cells Using Surface Acoustic Wave Sensor Array with High Sensitivity and Reproducibility.

We present a surface acoustic wave (SAW) sensor array for microRNA (miRNA) detection that utilizes photocatalytic silver staining on titanium dioxide (TiO2) nanoparticles as a signal enhancement technique for high sensitivity with an internal reference sensor for high reproducibility. A sandwich hybridization was performed on working sensors of the SAW sensor array that could simultaneously capture and detect three miRNAs (miRNA-21, miRNA-106b, and miRNA-155) known to be upregulated in cancer. Sensor responses due to signal amplification varied depending on the concentration of synthetic miRNAs. It was confirmed that normalization (a ratio of working sensor response to reference sensor response) screened out background interferences by manipulating data and minimized non-uniformity in the photocatalytic silver staining step by suppressing disturbances to both working sensor signal and reference sensor signal. Finally, we were able to successfully detect target miRNAs in cancer cell-derived exosomal miRNAs with performance comparable to the detection of synthetic miRNAs.

Sensitive Materials Used in Surface Acoustic Wave Gas Sensors for Detecting Sulfur-Containing Compounds.

There have been many studies on surface acoustic wave (SAW) sensors for detecting sulfur-containing toxic or harmful gases. This paper aims to give an overview of the current state of polymer films used in SAW sensors for detecting deleterious gases. By covering most of the important polymer materials, the structures and types of polymers are summarized, and a variety of devices with different frequencies, such as delay lines and array sensors for detecting mustard gas, hydrogen sulfide, and sulfur dioxide, are introduced. The preparation method of polymer films, the sensitivity of the SAW gas sensor, the limit of detection, the influence of temperature and humidity, and the anti-interference ability are discussed in detail. The advantages and disadvantages of the films are analyzed, and the potential application of polymer films in the future is also forecasted.

Anomalies in the magnetostrictive modulation of love surface acoustic waves

A magnetic surface acoustic wave (SAW) sensor is built by growing a 100 nm galfenol (Fe72Ga28) film by sputtering between the interdigitated transducers of a SAW delay line. Love waves are produced when the shear waves excited on the piezoelectric substrate are guided by a 3.1 μm layer of amorphous SiO2. Due to the magnetostrictive nature of galfenol deposited on top, the application of magnetic fields modulates the propagation of the mechanical excitations along the sensor by the strain coupling. By introducing the delay line in a feedback loop circuit, these changes are studied as resonant frequency variations. Magnetic field cycles of ±40 mT are applied to the sample and the resonant frequency shift is tracked simultaneously. The sensor exhibited hysteretic frequency behavior that depends on the orientation of the applied magnetic field relative to the direction of Love wave propagation. In the configuration in which the wave vector and the applied field form an angle of 45°, the resonant frequency seems to increase with the magnetization induced by the external field. When the wave vector propagation is parallel to the field, two positive peaks appear close to the coercive field of the film, which has not been reported before. This is probably due to a more complex relationship between the acoustic wave and the magnetic state of the film which could be exploited to give rise to new models of magnetic sensors.

Design and Simulation of MEMS Surface Acoustic Wave Biosensor Based on PVDF Thin Film

Abstract: Surface acoustic wave sensors, as a class of MEMS, are widely used recently. The sensor can transform an input electrical signal into a mechanical wave which can be easily influenced by physical phenomena. Then, the changed mechanical wave is transduced back into an electrical signal. The presence of the desired phenomenon can be detected through the difference between the input and output electrical signal (amplitude, phase, frequency, or time delay). The basic surface acoustic wave device consists of a piezoelectric substrate, an input interdigitated transducer (IDT) on one side of the surface of the substrate, and a second output interdigitated transducer on the other side of the substrate.

Embedding a surface acoustic wave sensor and venting into a metal additively manufactured injection mould tool for targeted temperature monitoring

Injection moulding (IM) tools with embedded sensors can significantly improve the process efficiency and quality of the fabricated parts through real-time monitoring and control of key process parameters such as temperature, pressure and injection speed. However, traditional mould tool fabrication technologies do not enable the fabrication of complex internal geometries. Complex internal geometries are necessary for technical applications such as sensor embedding and conformal cooling which yield benefits for process control and improved cycle times. With traditional fabrication techniques, only simple bore-based sensor embedding or external sensor attachment is possible. Externally attached sensors may compromise the functionality of the injection mould tool, with limitations such as the acquired data not reflecting the processes inside the part. The design freedom of additive manufacturing (AM) enables the fabrication of complex internal geometries, making it an excellent candidate for fabricating injection mould tools with such internal geometries. Therefore, embedding sensors in a desired location for targeted monitoring of critical mould tool regions is easier to achieve with AM. This research paper focuses on embedding a wireless surface acoustic wave (SAW) temperature sensor into an injection mould tool that was additively manufactured from stainless steel 316L. The laser powder bed fusion (L-PBF) “stop-and-go” approach was applied to embed the wireless SAW sensor. After embedding, the sensor demonstrated full functionality by recording real-time temperature data, which can further enhance process control. In addition, the concept of novel print-in-place venting design, applying the same L-PBF stop-and-go approach, for vent embedding was successfully implemented, enabling the IM of defectless parts at faster injection rates, whereas cavities designed and tested without venting resulted in parts with burn marks.