This paper aims to present the results of an investigation on the angularity error calculated for micro polygonal cavities i.e. triangular, square, pentagonal and hexagonal cavities. The investigation began by machining of micro polygonal shapes in series of three on steel sample using 400 µm tungsten carbide electrode in die-sinking EDM integrated with e-pulse supply and précised multi-axes electrode movement enabling micro-machining capabilities. After that the machined micro-cavities and their geometry were examined by an Olympus optical microscope and the accuracy of shapes has been evaluated after analyzing angularity error of these geometries by profile projector and olympus analysis five software. It was found that the average angularity error of triangular micro cavities is 4.34° while that for square, pentagonal and hexagonal micro cavities are 1.33°, 7.93° and 8.74° respectively. On the basis of obtained data, it is found that the square cavities have maximum angular accuracy as compared to others. It may be attributed to the fact that there is lesser presence of secondary discharge in case of square cavities and limited tool travel.