Ultra-high nickel material is considered to be a promising cathode material. However, with the increase of nickel content, the interfacial side reactions between the cathode and electrolyte become increasingly serious. Herein, an atomically controllable ionic conductor Li3PO4 (LPO) coating is deposited on the LiNi0.90Co0.06Mn0.04O2 (NCM9064) based electrode by the atomic layer deposition method. The results shows that the LPO coating is uniformly and densely covered on the surface of secondary particles of NCM9064, helping to prevent the direct contact between the electrolyte and cathode during the charging-discharging process. In addition, the coating layer is electrochemically stable. As a result, the interfacial side reactions during the long cycle are effectively suppressed, and the solid electrolyte interphase layer at the interface is stabilized. The electrode with 20 layers of LPO deposition (ALD-LPO-20) exhibits an excellent capacity retention of 81% after 200 cycles in 2.8-4.3 V at 25 °C, which is 18% higher than the unmodified material (ALD-LPO-0). Besides, the moderate LPO coating improves the rate capability and high temperature cycling performance of NCM9064. This study provides a method for the modification of ultra-high nickel cathode materials and corresponding electrodes.