3D Mirror Research Articles

Fabry-Perot etalons using colloidal photonic crystal mirrors

Fabry-Perot etalons have been fabricated with 3D colloidal photonic crystal mirrors. The colloid films were optimized for high reflection and low loss to provide good finesse values in the 1200-1700 nm spectral range. A cavity quality factor of 2400 and a finesse of 8 together with sharp 0.5 nm wide resonance transmission peaks are reported that attest to the relatively good optical quality of the three-dimensionally structured films and the promise of self-assembly colloidal crystal chemistry in providing novel microporous optical interferometers for potential applications such as environmental and biological sensing.

Stability of surface tension self-assembled 3D MOEMS

The thermal and mechanical stability of self-assembled MOEMS components consisting of 3D mirrors have been evaluated. The thermal–mechanical constants of the hinge material (AZ4562 photoresist) used to power the surface tension self-assembly process have been measured and used to predict the stability of assemblies. The Young's moduli and thermal expansion coefficients showed constant values of average 6.78 × 10 9 N/m 2 and 4.08 × 10 −6 °C −1 under various thermal conditions. The angle variation of all the components tested under thermal cycling was less than 0.006° °C −1 up to 110 °C. The use of mechanical limiters enhanced the thermal stability to near 0 up to 150 °C. During dynamic mechanical stability measurement, for a maximum external acceleration of >50 g, no device failure was observed.

CHARACTERISTICS OF MICROMACHINED SHORT-EXTERNAL-CAVITY TUNABLE LASERS

International Journal of Computational Engineering ScienceVol. 04, No. 03, pp. 455-459 (2003) Optical MEMSNo AccessCHARACTERISTICS OF MICROMACHINED SHORT-EXTERNAL-CAVITY TUNABLE LASERSA. Q. LIU, X. M. ZHANG, J. LI and D. Y. TANGA. Q. LIUSchool of Electrical & Electronic Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798, Singapore Search for more papers by this author , X. M. ZHANGSchool of Electrical & Electronic Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798, Singapore Search for more papers by this author , J. LISchool of Electrical & Electronic Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798, Singapore Search for more papers by this author and D. Y. TANGSchool of Electrical & Electronic Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798, Singapore Search for more papers by this author https://doi.org/10.1142/S1465876303001514Cited by:0 PreviousNext AboutSectionsPDF/EPUB ToolsAdd to favoritesDownload CitationsTrack CitationsRecommend to Library ShareShare onFacebookTwitterLinked InRedditEmail AbstractTunable lasers have wide applications in DWDM systems to save inventory cost and to improve the optical network functionalities. The Microelectromechanical Systems (MEMS) technology has shown strong promise to miniaturize the conventional mechanical tunable lasers with adding merits of high compactness, high speed batch production and so on. In this paper, external cavity tunable diode lasers using MEMS movable mirrors and rotary gratings as the external reflectors are presented. One tunable laser of 2 mm × 1.5 mm is formed by integration of a surface-micromachined 3D mirror with a diode laser and an optical fiber. In addition, deep-etched structures such rotary gratings, circular mirror, microlens, and grooves for diode laser and fiber are illustrated to form widely tunable lasers.Keywords:Tunable laserblazed gratingDWDMoptical MEMS References Y. Uenishi, K. Honma and S. Nagaoka, Electron. Lett. 32, 1207 (1996). Crossref, Google ScholarY. Sidorin, M. Blomberg and P. Karioja, IEEE Photon. Technol. Lett. 11, 18 (1999). Crossref, Google ScholarM-H Kianget al., IEEE Photon. Technol. Lett. 8, 95 (1996). Crossref, Google ScholarA. Q. Liuet al., IEEE Photon. Technol. Lett. 13, 427 (2001). Crossref, Google ScholarJ. D. Bergeret al., Proc. LEOS Summer Topic Meet. (Copper Mountain, CO, USA, 2001) pp. 41–42. Google Scholar D. Anthon, J. D. Berger, J. Drake, J. D. Grade, S. Hrinya, F. Ilkov, H. Jerman, D. King, H. Lee, A. Tselikov and K. Yasumura, External cavity diode lasers tuned with silicon MEMS, Proc. OFC2002, Anaheim, California, USA (2002) 97-98 . Google Scholar M. C. Hutley , Diffraction gratings ( Academic Press , London , 1982 ) . Google ScholarT. Hiranoet al., J. Microelectromech. Syst. 1, 52 (1992). Crossref, Google Scholar FiguresReferencesRelatedDetails Recommended Vol. 04, No. 03 Metrics History KeywordsTunable laserblazed gratingDWDMoptical MEMSPDF download

高密度３次元実装技術を用いたマイクロカメラ視覚システム

A CCD micro-camera visual inspection system which consists of an experimental wireless micromachine for inspection of inner surface of 10 mmφ tubes in electric power generators has been developed based on a high-density 3D packaging technology. The CCD imaging data transmission circuit has been packaged at high-density by developing a 3D sidewall interconnection technology which has sidewall footprints realized by high-aspect-ratio Cu wiring layers. The viewpoint changing mechanism for inspection of inner surface of tube was realized by 3D motion reflective mirror which incorporates 2 axial electrostatic wobble motors. The prototyped CCD micro-camera visual inspection system, which includes CCD imaging data transmission circuit and the viewpoint changing mechanism, operates satisfactorily and it has been confirmed that the output CCD images have high resolution which enables 20μm objects to be distinguished inside 10 mmφ tubes.

Monopole Operators and Mirror Symmetry in Three Dimensions

We study vortex-creating, or monopole, operators in 3d CFTs which are the infrared limit of N=2 and N=4 supersymmetric QEDs in three dimensions. Using large-Nf expansion, we construct monopole operators which are primaries of short representations of the superconformal algebra. Mirror symmetry in three dimensions makes a number of predictions about such operators, and our results confirm these predictions. Furthermore, we argue that some of our large-Nf results are exact. This implies, in particular, that certain monopole operators in N=4 d=3 SQED with Nf=1 are free fields. This amounts to a proof of 3d mirror symmetry in a special case.