Abstract
In order to specifically support the technology trend of increased miniaturization of micro electro mechanical systems (MEMS) devices, highly porous ZrCoCe non-evaporable getter (NEG) film has been produced by direct current magnetron sputtering from a preformed ZrCoCe alloy target. Scanning electron microscopy and x-ray diffraction analysis indicated that the ZrCoCe film is constructed with porous columnar crystals, which are further built up with assembled ZrCoCe amorphous or nanocrystalline grains with an average grain size of 5 nm. Gas sorption investigation shows that this film can be activated at a low temperature of 300°C for 30 min and has excellent stable sorption characteristics. Sorption properties can be further improved with elevating activation temperatures due to nanocrystals growing and amorphous regions crystallizing. The capability of ZrCoCe films to withstand wafer physical or chemical cleaning processes is investigated, indicating their compatibility with MEMS vacuum packaging and the appropriate way to store them.
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