Abstract
20-in. liquid crystal display (LCD) TVs were successfully fabricated with Ga-doped ZnO (GZO) transparent electrodes on the RGB color filter and conventional indium tin oxide transparent electrodes on the thin film transistor pixel array. The high optical transmittance of the GZO film is beneficial for the color representation characteristics of LCD TVs. A technique for the formation of GZO fine patterns was also developed using wet-chemical etching and the pH values of chemicals used for the photolithography and etching processes were optimized. Line/space patterns widths of 2 um/2 um were accomplished using the optimized patterning technique.
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