Abstract

The improvement of a new type of reflection high-energy electron diffraction (RHEED) apparatus equipped with a retarding field analyzer is reported. Three kinds of meshes are examined for the retarding grids of the analyzer and their energy resolutions are checked. Electron beam trajectories passing through the analyzer are also simulated and the calculated spot sizes and shapes are compared with experimental ones. Very fine 250 mesh, used for the retarding grid, gives very good energy resolution of ΔE=4 eV with an incident beam energy of E=10 keV, and therefore ΔE/E = 4×10-4. Energy-filtered RHEED patterns and energy-filtered rocking curves are taken for the Si(111)7×7 surface and are compared with conventional ones. The advantages and characteristics of energy filtering are described in detail. Improved energy loss spectra for the 0 0 and 1 1 reflected beams are also presented. These clearly show surface plasmon loss peaks.

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