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Abstract
Unusual reflection high-energy electron diffraction (RHEED) patterns were obtained on a homoepitaxial diamond (001) surface. A RHEED pattern with only Kikuchi patterns was observed on the [010] direction, while a RHEED pattern with the specular point missing was observed on the 0 1 ̄ 0 direction, the opposite azimuth angle. In the [100] direction, perpendicular to the above azimuth angles, a RHEED pattern with the 040-0 4 ̄ 0 Kikuchi band tilting from the normal angle to the horizontal shadow edge-line was observed. These patterns are explained by the surface tilt, as in an echelette grating. The off-angle of the surface was estimated to be 3° from the RHEED patterns. This study shows that RHEED is a powerful method for the simultaneous estimation of the surface structures, roughness, and tilt.
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