Abstract
ABSTRACTWe have deposited YBa2Cu3O7 (YBCO) films on LaAlO3 substrates up to two inches in diameter using 90° off-axis magnetron sputtering from a single stoichiometric target. With this same method, epitaxial bilayers and trilayers of insulating SrTiO3, LaAlO3, MgO, metallic PrBa2Cu3O7 (PrBCO), or superconducting La2−xSrxCuO4 (LSCO) were deposited in combinations with YBCO. In the resulting structures with c-axis orientations, the YBCO had Tc's of 90K or higher over the entire surface area. Maximum resistivity values of 6 × 109 Ω-cm in YBCO/insulator/YBCO structures were obtained in vertical transport measurements with SrTiO3. An important cause for degraded electrical properties in the structures incorporating epitaxial insulators was the presence of copper oxide particles on the YBCO surface. Methods used to minimize the number of these particles are discussed.
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