Abstract
YBa2Cu3O7−y (YBCO) microbridges have been fabricated on a SiO2/Si substrate using Y2O3/YSZ (yttria-stabilized zirconia) buffer layer. Using polycrystalline silicon layer overlaid on oxidized Si(100) single crystal, the bridge is microprocessed by means of electron beam lithography and dry etching. The fabricated configuration serves as a mask for depositing YSZ and Y2O3 double buffer layers. The YBCO layer is deposited on the substrate by means of laser ablation deposition. The dimension of the bridge is 1.7 μm wide and 1.3 μm long. The microbridge junctions show a critical temperature of 86 K, and microwave-induced steps are observed indicating the presence of a Josephson junction-type behavior. The IcRn product is 0.5 mV at 30 K.
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