XY? actuators using piezoelectric and electromagnetic actuators

Abstract

Microactuators with multiple degrees of freedom, which can provide many benefits in precision engineering, are in demand for industrial applications. We propose two new actuators (Y-type and Δ-type) which can move in the x, y, and θ directions. They are combinations of piezoelectric and electromagnetic actuators. The proposed actuators realize high resolution via the piezoelectric actuators. We describe the structure and principle of the proposed actuators, and discuss their feasibility. A resolution of 70 nm in the x direction and of 0.5 μrad in the θ direction was obtained with the Y-type actuator. A resolution of 90 nm in the x direction and of 0.6 μrad in the θ direction was obtained with the Δ-type actuator. © 2000 Scripta Technica, Electr Eng Jpn, 131(4): 44–51, 2000