Influence of Matrix Circuit Switching Device Junction Capacitance on Piezoelectric Actuator Drive Performance

Abstract

Piezoelectric actuators are widely used as fine-motion actuators for positioning devices. Current pulse driving reduces displacement hysteresis, and the drive circuit provides current pulses considered constant charge pulses to the piezoelectric actuator. The circuit for devices with multiple degrees of freedom using multiple piezoelectric actuators should be simple. Matrix circuits are used to drive liquid crystal displays to reduce the number of drive-circuit control signals and components. A group of 2 × 2 piezoelectric actuators was driven alternately using a 4-switch matrix circuit, and two field effect transistors were used as a fast matrix circuit switch. Piezoelectric actuator drive performance was studied in the case of using the current pulse circuit and the matrix circuit. When the matrix circuit drove actuators performing as capacitive loads, switching device junction capacitors adversely affected drive performance.