Abstract

An x-ray scanning apparatus (XSA) for imaging the spatial distributions of crystal texture and elements in bulk samples has been further improved and extended to pole figure measurements on selected areas. A beam collimator is used to stop down the white primary beam to a narrow spot on the specimen surface. A broad spectrum of secondary x-rays is emitted which is composed of diffraction peaks, characteristic fluorescence lines and a low background. Peak separation and intensity measurement is performed by energy-dispersive x-ray spectroscopy. The spatial distributions of selected crystallographic directions or elements in the sample surface are acquired by translating the sample step by step on a user defined grid. Local resolution is presently limited to 50 μm by the low intensity of a collimated primary beam. The completion of the XSA by a Philips X'Pert goniometer stage enables pole figure measurement to be performed at a high spatial resolution as a supplement to crystal texture mapping. Texture components significant for mapping can thus readily be selected.

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