Abstract
In this paper, strain relaxed InGaAs/GaAs strained-layer superlattice has been studied by X-ray double-crystal diffraction and topography. By simulating the double-crystal rocking curves using X-ray dynamical scattering theory, important imformation such as the structure, the mechanism and degree of strain relaxation, the misorientation between the superlattice layers and the substrate and misfit dislocation density, and so forth are obtained. The misfit dislocation distribution at the interface between the superlattice layers and the substrate and in the superlattice layers are observed by double-crystal topography.
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Published version (
Free)
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
